公开(公告)号：US20240019879A1

公开(公告)日：2024-01-18

申请号：US18351150

申请日：2023-07-12

Applicant: ASM IP Holding, B.V.

Inventor： Glenn Holbrook

IPC: G05D7/06

CPC classification number: G05D7/0647

Abstract: A flow control arrangement is provided including a housing seating inlet and outlet conduits is provided. An isolation valve is arranged within the housing and is fluidly coupled to the inlet conduit. A first flow switch with a first shutoff trigger is arranged within the housing and fluidly couples the isolation valve to the outlet conduit. A second flow switch with a second shutoff trigger is arranged outside of the housing and is fluidly separated from the first flow switch. A controller operably connects the first and second flow switches to the isolation valve to close the isolation valve when (a) flow rate of a first fluid traversing the first flow switch is greater than the first shutoff trigger, or (b) flow rate of a second fluid traversing the second flow switch is less than the second shutoff trigger. Semiconductor processing systems and flow control methods are also described.

公开(公告)号：US20240018656A1

公开(公告)日：2024-01-18

申请号：US18351227

申请日：2023-07-12

Applicant: ASM IP Holding, B.V.

Inventor： Glenn Holbrook ,  Mark Fessler

IPC: C23C16/455 ,  G05D7/06

CPC classification number: C23C16/45561 ,  G05D7/0647

Abstract: A flow control arrangement includes a housing, an isolation valve, and a flow switch. The housing seats an inlet conduit and an outlet conduit. The isolation valve is arranged in the housing and is connected to the inlet conduit. The flow switch is arranged in the housing, is connected to the isolation valve, and fluidly couples the outlet conduit to the isolation valve. The flow switch further has a shutoff trigger and is operatively connected to the isolation valve to close the isolation valve when flow traversing the isolation valve is greater than the shutoff trigger. Semiconductor processing systems and flow control methods are also provided.

公开(公告)号：US20240068098A1

公开(公告)日：2024-02-29

申请号：US18458216

申请日：2023-08-30

Applicant: ASM IP Holding, B.V.

Inventor： Glenn Holbrook

IPC: C23C16/455 ,  C23C16/52

CPC classification number: C23C16/45591 ,  C23C16/45561 ,  C23C16/52

Abstract: A flow control arrangement includes a source conduit, a supply conduit, a shutoff valve, and a slow-close actuator. The shutoff valve connects the source conduit to the supply conduit. The slow-close actuator is connected to the shutoff valve to close the shutoff valve during a slow-close interval, the pyrophoric material detector is operably connected to the slow-close actuator to close the shutoff valve upon detection of a metastable mass of a pyrophoric material outside of the flow control arrangement, and the slow-close interval is sized to limit shock communicated to the metastable mass by closing of the shutoff valve and prevent rapid deflagration or detonation of the metastable mass of the pyrophoric material. Semiconductor processing systems including the flow control arrangement and related flow control methods are also described.

公开(公告)号：US20240019880A1

公开(公告)日：2024-01-18

申请号：US18351295

申请日：2023-07-12

Applicant: ASM IP Holding, B.V.

Inventor： Glenn Holbrook ,  Mark Fessler

IPC: G05D7/06 ,  G05B19/05

CPC classification number: G05D7/0688 ,  G05B19/054 ,  G05B19/058

Abstract: A flow control arrangement includes a housing seating inlet and outlet conduits, an isolation valve arranged within the housing and is connected to the inlet conduit, a flow switch, and a bypass switch. The flow switch has a shutoff trigger, is arranged within the housing, and couples the isolation valve to the outlet conduit. The bypass switch is coupled to the isolation valve and has first and second positions. The flow switch is operably coupled to the isolation valve when the bypass switch is in the first position to close the isolation valve when flow rate of fluid traversing the flow switch rises above the shutoff trigger, and is operably decoupled from the isolation valve when the bypass switch is in the second position to flow fluid through the flow switch at flow rates greater than the shutoff trigger. Semiconductor processing systems and related flow control methods are also described.

公开(公告)号：US20220380900A1

公开(公告)日：2022-12-01

申请号：US17750875

申请日：2022-05-23

Applicant: ASM IP Holding B.V.

Inventor： Mark Fessler ,  Glenn Holbrook

IPC: C23C16/455 ,  C23C16/44

Abstract: A gas system includes an enclosure, a process gas metering valve, a shutoff valve, and a flow switch. The process gas metering valve arranged within the enclosure to flow a process gas to a process chamber of a semiconductor processing system. The shutoff valve is connected to the process gas metering valve to fluidly separate the process gas metering valve from a process gas source. The flow switch is operably connected to the shutoff valve to cease flow of the process gas to the process chamber of the semiconductor processing system using the shutoff valve according to flow of a gas traversing the flow switch. Semiconductor processing systems, gas control methods, and gas system kits are also described.