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公开(公告)号：US20200176244A1
公开(公告)日：2020-06-04
申请号：US16702506
申请日：2019-12-03
Applicant: ASM IP Holding B.V.
Inventor： HakJoo Lee , HakJoon Kim , YoungSim Kim
Abstract: A method of cleaning blind spots around a substrate supporting apparatus by controlling a position of the substrate supporting apparatus includes moving the substrate supporting apparatus relative to a ring and supplying a cleaning gas to an upper space of the substrate supporting apparatus.
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