公开(公告)号：US20200284467A1

公开(公告)日：2020-09-10

申请号：US16765453

申请日：2018-11-26

申请人： ASM IP Holding B.V.

发明人： Bartholomeus Hans Louis Lindeboom ,  Juul Keijser

IPC分类号： F24F13/08 ,  F24F3/16

摘要： An apparatus (10), including a gas recirculation circuit comprising a mini environment chamber (14), a gas pump (16), a filter assembly (22) which are connected by a recirculation channel (20). The apparatus additionally includes an air supply conduit (18) for supplying air to the gas recirculation circuit and having an air supply conduit inlet (18a) which opens into the ambient air and an air supply conduit outlet (18b) which opens in the recirculation circuit. In use, a mini environment chamber pressure (Pme) is maintained higher than the ambient pressure (Pam). The gas recirculation channel (20) includes a substantially frictionless recirculation restriction embodied as a throat (30). At downstream end of the throat which forms the narrow part of the throat, in use, the static pressure is below the ambient pressure. The air supply conduit outlet opens at the downstream end (30a) of the throat.

公开(公告)号：US20190032998A1

公开(公告)日：2019-01-31

申请号：US15660805

申请日：2017-07-26

申请人： ASM IP Holding B.V.

发明人： Lucian C. Jdira ,  Chris G.M. de Ridder ,  Theodorus G.M. Oosterlaken ,  Klaas P. Boonstra ,  Herbert Terhorst ,  Juul Keijser

IPC分类号： F27B5/04 ,  F27B1/14 ,  F27B1/28 ,  F27B5/08 ,  F27B5/12 ,  F27B5/16 ,  F27D3/00 ,  F27D11/00

摘要： An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising:an inlet opening configured to insert and remove a boat configured to carry substrates in the inner space of the liner;a gas inlet to provide a gas to the inner space. The assembly is constructed and arranged with a gas exhaust opening to remove gas from the inner space and a space between the liner and the low pressure tube.

公开(公告)号：US11639811B2

公开(公告)日：2023-05-02

申请号：US16765453

申请日：2018-11-26

申请人： ASM IP Holding B.V.

发明人： Bartholomeus Hans Louis Lindeboom ,  Juul Keijser

IPC分类号： F24F13/08 ,  F24F3/167

摘要： An apparatus (10), including a gas recirculation circuit comprising a mini environment chamber (14), a gas pump (16), a filter assembly (22) which are connected by a recirculation channel (20). The apparatus additionally includes an air supply conduit (18) for supplying air to the gas recirculation circuit and having an air supply conduit inlet (18a) which opens into the ambient air and an air supply conduit outlet (18b) which opens in the recirculation circuit. In use, a mini environment chamber pressure (Pme) is maintained higher than the ambient pressure (Pam). The gas recirculation channel (20) includes a substantially frictionless recirculation restriction embodied as a throat (30). At downstream end of the throat which forms the narrow part of the throat, in use, the static pressure is below the ambient pressure. The air supply conduit outlet opens at the downstream end (30a) of the throat.

公开(公告)号：US10605530B2

公开(公告)日：2020-03-31

申请号：US15660805

申请日：2017-07-26

申请人： ASM IP Holding B.V.

发明人： Lucian C. Jdira ,  Chris G. M. de Ridder ,  Theodorus G. M. Oosterlaken ,  Klaas P. Boonstra ,  Herbert Terhorst ,  Juul Keijser

IPC分类号： F27D7/06 ,  F27B5/04 ,  F27B1/14 ,  F27B1/28 ,  F27B5/08 ,  F27B5/12 ,  F27B5/16 ,  F27D3/00 ,  F27D11/00 ,  H01L21/67

摘要： An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising: an inlet opening configured to insert and remove a boat configured to carry substrates in the inner space of the liner; a gas inlet to provide a gas to the inner space. The assembly is constructed and arranged with a gas exhaust opening to remove gas from the inner space and a space between the liner and the low pressure tube.