公开(公告)号：US09349620B2

公开(公告)日：2016-05-24

申请号：US14327134

申请日：2014-07-09

Applicant: ASM IP Holding B.V.

Inventor： Keisuke Kamata ,  Hiroyuki Sato ,  Kazunori Furukawahara ,  Masaei Suwada ,  Kenkichi Okubo ,  Izumi Arai

IPC: F26B11/00 ,  H01L21/67 ,  H01L21/677 ,  F27B9/12

CPC classification number: H01L21/67109 ,  F27B17/0025 ,  F27B2009/124 ,  H01L21/67775 ,  H01L21/67778

Abstract: A pre-baking apparatus for heating a substrate upstream of a process tool is adapted to be connected to an EFEM (equipment front end module) and includes: a chamber which has a front face with multiple slots arranged in a height direction of the chamber, and which is divided into multiple compartments extending from the multiple slots, respectively, toward a rear end of the chamber for loading and unloading substrates; and a connecting frame for connecting the chamber to the process tool. The multiple compartments are separated from each other by a divider plate and provided with heaters for heating the multiple compartments, and each compartment has a gas injection port for blowing a hot inert gas over the substrate placed therein toward the slot.

Abstract translation: 用于加热处理工具上游的基板的预烘烤装置适于连接到EFEM（设备前端模块），并且包括：具有在室的高度方向上布置有多个槽的前表面的室， 并且其分成多个隔室，分别从多个槽延伸到用于装载和卸载基板的室的后端; 以及用于将腔室连接到加工工具的连接框架。 多个隔室通过分隔板彼此分离，并设置有用于加热多个隔室的加热器，并且每个隔间具有气体注入口，用于将热惰性气体吹向放置在其中的基板上。

公开(公告)号：US20160013084A1

公开(公告)日：2016-01-14

申请号：US14327134

申请日：2014-07-09

Applicant: ASM IP Holding B.V.

Inventor： Keisuke Kamata ,  Hiroyuki Sato ,  Kazunori Furukawahara ,  Masaei Suwada ,  Kenkichi Okubo ,  Izumi Arai

IPC: H01L21/67

CPC classification number: H01L21/67109 ,  F27B17/0025 ,  F27B2009/124 ,  H01L21/67775 ,  H01L21/67778

Abstract: A pre-baking apparatus for heating a substrate upstream of a process tool is adapted to be connected to an EFEM (equipment front end module) and includes: a chamber which has a front face with multiple slots arranged in a height direction of the chamber, and which is divided into multiple compartments extending from the multiple slots, respectively, toward a rear end of the chamber for loading and unloading substrates; and a connecting frame for connecting the chamber to the process tool. The multiple compartments are separated from each other by a divider plate and provided with heaters for heating the multiple compartments, and each compartment has a gas injection port for blowing a hot inert gas over the substrate placed therein toward the slot.

Abstract translation: 用于加热处理工具上游的基板的预烘烤装置适于连接到EFEM（设备前端模块），并且包括：具有在室的高度方向上布置有多个槽的前表面的室， 并且其分成多个隔室，分别从多个槽延伸到用于装载和卸载基板的室的后端; 以及用于将腔室连接到加工工具的连接框架。 多个隔室通过分隔板彼此分离，并设置有用于加热多个隔室的加热器，并且每个隔间具有气体注入口，用于将热惰性气体吹向放置在其中的基板上。