公开(公告)号：US10679879B2

公开(公告)日：2020-06-09

申请号：US16516499

申请日：2019-07-19

Applicant: ASM IP Holding B.V.

Inventor： Soo Hyun Kim ,  Dae Youn Kim ,  Izumi Arai

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/687

Abstract: Provided is a substrate processing apparatus including a load-lock chamber; a transfer chamber connected to the load-lock chamber; and one or more processing chambers connected to the transfer chamber. The transfer chamber includes a transfer arm that transfers a substrate between the load-lock chamber and the one or more processing chambers, the load-lock chamber includes a plurality of load-lock stations for accommodating a plurality of substrates as a matrix of m×n. According to the substrate processing apparatus, a time taken to transfer substrates may be reduced greatly, and productivity may be improved.

公开(公告)号：US10403523B2

公开(公告)日：2019-09-03

申请号：US15211538

申请日：2016-07-15

Applicant: ASM IP Holding B.V.

Inventor： Soo Hyun Kim ,  Dae Youn Kim ,  Izumi Arai

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/687

Abstract: Provided is a substrate processing apparatus including a load-lock chamber; a transfer chamber connected to the load-lock chamber; and one or more processing chambers connected to the transfer chamber. The transfer chamber includes a transfer arm that transfers a substrate between the load-lock chamber and the one or more processing chambers, the load-lock chamber includes a plurality of load-lock stations for accommodating a plurality of substrates as a matrix of m×n. According to the substrate processing apparatus, a time taken to transfer substrates may be reduced greatly, and productivity may be improved.