公开(公告)号：US12197001B2

公开(公告)日：2025-01-14

申请号：US18017059

申请日：2021-07-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Amir Abdolvand ,  Cristian Bogdan Craus ,  Sebastian Thomas Bauerschmidt

IPC: G02B6/032 ,  G02B6/02 ,  G02B6/25

Abstract: A method of processing an out-coupling end of a hollow core fiber including a plurality of anti-resonance elements surrounding a hollow core, and a hollow core fiber having been so processed. The method may include performing a tapering step to form a taper in the anti-resonance elements; performing a cleaving step at the taper to form at least one tapered out-coupling end of the hollow core fiber; and performing an end processing step including further heating the out-coupling end in a controlled manner to smoothen the out-coupling end.

公开(公告)号：US10222701B2

公开(公告)日：2019-03-05

申请号：US15024815

申请日：2014-09-18

Applicant: ASML Netherlands B.V.

Inventor： Chuangxin Zhao ,  Sander Baltussen ,  Pär Mårten Lukas Broman ,  Richard Joseph Bruls ,  Cristian Bogdan Craus ,  Jan Groenewold ,  Dzmitry Labetski ,  Kerim Nadir ,  Hendrikus Gijsbertus Schimmel ,  Christian Felix Wählisch

IPC: G03B27/42 ,  G03F7/20 ,  H05G2/00

Abstract: A radiation source for a lithographic apparatus, in particular a laser-produced plasma source includes a fan unit surrounding but not obstructing the collected radiation beam that is operated to generate a flow in a buffer gas away from the optical axis. The fan unit can include a plurality of flat or curved blades generally parallel to the optical axis and driven to rotate about the optical axis.