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公开(公告)号：US20170247778A1
公开(公告)日：2017-08-31
申请号：US15057086
申请日：2016-02-29
Applicant: ASML Netherlands B.V.
Inventor： Georgiy Vaschenko , Peter Baumgart , Chirag Rajyaguru , Benjamin Sams , Armin Ridinger , Janine Kardokus
Abstract: A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.
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公开(公告)号：US11317501B2
公开(公告)日：2022-04-26
申请号：US16572131
申请日：2019-09-16
Applicant: ASML Netherlands B.V.
Inventor： Georgiy Vaschenko , Peter Baumgart , Chirag Rajyaguru , Benjamin Sams , Armin Ridinger , Janine Kardokus
Abstract: A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.
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公开(公告)号：US10455680B2
公开(公告)日：2019-10-22
申请号：US15057086
申请日：2016-02-29
Applicant: ASML Netherlands B.V.
Inventor： Georgiy Vaschenko , Peter Baumgart , Chirag Rajyaguru , Benjamin Sams , Armin Ridinger , Janine Kardokus
Abstract: A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.
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公开(公告)号：US09699876B2
公开(公告)日：2017-07-04
申请号：US14151600
申请日：2014-01-09
Applicant: ASML NETHERLANDS B.V.
Inventor： Georgiy Vaschenko , Peter Baumgart , Jeffrey Gacutan , Martin Algots , Theodosios Syrpis , Chirag Rajyaguru , Sanjeev Seshagiri
CPC classification number: H05G2/006 , H05G2/005 , H05G2/008 , Y10T137/6416
Abstract: An EUV light source target material handling system is disclosed which may comprise a droplet generator having a target material reservoir in which the target material may be replenished while a nozzle portion of the droplet generator is maintained at temperature. Also disclosed is a system for selectively draining spent target material.
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