公开(公告)号：US12197139B2

公开(公告)日：2025-01-14

申请号：US17802841

申请日：2021-02-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Bastiaan Lambertus Wilhelmus Marinus Van De Ven ,  Johannes Bernardus Charles Engelen ,  Arnoud Willem Notenboom ,  Jim Vincent Overkamp ,  Kjeld Gertrudus Hendrikus Janssen ,  Johannes Adrianus Cornelis Maria Pijnenburg ,  Jeroen Van Duivenbode ,  Erik Johannes Nieuwenhuis ,  Koos Van Berkel

IPC: G03F7/00

Abstract: An object holder configured to support an object, the object holder including: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; and an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers, wherein the electrostatic sheet is bonded to the core body by a bonding material having a thickness of at least 100 nm.

公开(公告)号：US12235592B2

公开(公告)日：2025-02-25

申请号：US18008283

申请日：2021-06-09

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Bastiaan Lambertus Wilhelmus Marinus Van De Ven ,  Koos Van Berkel ,  Marcus Adrianus Van De Kerkhof ,  Roger Franciscus Mattheus Maria Hamelinck ,  Shahab Shervin ,  Marinus Augustinus Christiaan Verschuren ,  Johannes Bernardus Charles Engelen ,  Matthias Kruizinga ,  Tammo Uitterdijk ,  Oleksiy Sergiyovich Galaktionov ,  Kjeld Gertrudus Hendrikus Janssen ,  Johannes Adrianus Cornelis Maria Pijnenburg ,  Peter Van Delft

IPC: G03F7/00

Abstract: An object holder configured to support an object, the object holder comprising: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers; and a circumferential barrier for reducing outflow of gas escaping from space between the object and the core body.