公开(公告)号：US20190074756A1

公开(公告)日：2019-03-07

申请号：US15767199

申请日：2016-10-04

Applicant: ASML Netherlands B.V.

Inventor： Johannes Marinus Maria ROVERS

IPC: H02K41/03 ,  G03F7/20 ,  H02K1/02

Abstract: A magnet array for a displacement device for a displacement system, the magnet array comprising a two dimensional pattern of magnets of a first type and magnets of a second type, whereby magnets of the first type and magnets of the second type have parallel but opposing magnetizing direction and are alternatingly arranged at regular intervals in both a first and a second direction, wherein the first and second directions are not perpendicular to each other; a distance between two adjacent magnets of the same type in a third direction is unequal to a distance between two adjacent magnets of the same type in a fourth direction; and, the third and fourth direction are perpendicular to each other.

公开(公告)号：US20200049203A1

公开(公告)日：2020-02-13

申请号：US16494200

申请日：2018-02-15

Applicant: ASML NETHERLANDS B.V.

Inventor： Maarten Hartger KIMMAN ,  Hans BUTLER ,  Olof Martinus Josephus FISCHER ,  Christiaan Alexander HOOGENDAM ,  Theodorus Mattheus Joannus Maria HUIZINGA ,  Johannes Marinus Maria ROVERS ,  Eric Pierre-Yves VENNAT ,  Maurice Willem Jozef Etiënne WIJCKMANS

IPC: F16C39/06 ,  G03F7/20

Abstract: The invention relates to a bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, comprising a magnetic gravity compensator. The magnetic gravity compensator comprises:a first permanent magnet assembly mounted to one of the first part and the second part and comprising at least a first column of permanent magnets, the first column extending in the vertical direction, wherein the permanent magnets have a polarization direction in a first horizontal direction or in a second horizontal direction opposite to the first horizontal direction, wherein vertically adjacent permanent magnets have opposite polarization directions,a second permanent magnet assembly mounted to the other of the first part and the second part and comprising at least one other column of permanent magnets, the at least one other column extending in the vertical direction, wherein vertically adjacent permanent magnets of the at least one other column have opposite polarization directions in the first horizontal direction or the second horizontal direction,wherein the first permanent magnet assembly at least partially encloses the second permanent magnet assembly.