公开(公告)号：US20210079971A1

公开(公告)日：2021-03-18

申请号：US16772406

申请日：2018-11-15

Applicant: ASML Netherlands B.V.

Inventor： Derk TEN HOOPEN ,  Francois-Xavier DEBIESME ,  Eric Pierre-Yves VENNAT

IPC: F16F9/30 ,  F16F9/32 ,  G03F7/20

Abstract: The invention relates a method for manufacturing a damper device including a first part and a second part, said method comprising the following steps: a) providing a damping material in a space in between the first part and the second part, such that the damping material is in a compressed state in the space; and b) heating the device to a predetermined temperature in order to adhere the damping material to the first part and the second part.

公开(公告)号：US20200049203A1

公开(公告)日：2020-02-13

申请号：US16494200

申请日：2018-02-15

Applicant: ASML NETHERLANDS B.V.

Inventor： Maarten Hartger KIMMAN ,  Hans BUTLER ,  Olof Martinus Josephus FISCHER ,  Christiaan Alexander HOOGENDAM ,  Theodorus Mattheus Joannus Maria HUIZINGA ,  Johannes Marinus Maria ROVERS ,  Eric Pierre-Yves VENNAT ,  Maurice Willem Jozef Etiënne WIJCKMANS

IPC: F16C39/06 ,  G03F7/20

Abstract: The invention relates to a bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, comprising a magnetic gravity compensator. The magnetic gravity compensator comprises:a first permanent magnet assembly mounted to one of the first part and the second part and comprising at least a first column of permanent magnets, the first column extending in the vertical direction, wherein the permanent magnets have a polarization direction in a first horizontal direction or in a second horizontal direction opposite to the first horizontal direction, wherein vertically adjacent permanent magnets have opposite polarization directions,a second permanent magnet assembly mounted to the other of the first part and the second part and comprising at least one other column of permanent magnets, the at least one other column extending in the vertical direction, wherein vertically adjacent permanent magnets of the at least one other column have opposite polarization directions in the first horizontal direction or the second horizontal direction,wherein the first permanent magnet assembly at least partially encloses the second permanent magnet assembly.