公开(公告)号：US20240175479A1

公开(公告)日：2024-05-30

申请号：US18284580

申请日：2022-04-11

Applicant: ASML Netherlands B.V. ,  Carl Zeiss SMT GmbH

Inventor： Maarten Hartger KIMMAN ,  Hans BUTLER ,  Johannes,Petrus,Martinus,Bernardus VERMEULEN ,  Stefan TROGER ,  Michael ERATH ,  Philipp GAIDA

IPC: F16F15/08 ,  G03F7/00

CPC classification number: F16F15/08 ,  G03F7/70825 ,  G03F7/709

Abstract: A positioning system for moving or positioning a moveable object, the system including: a dynamic support system including a reaction mass, a first support, a first spring system to support the reaction mass from the first support, a second support, a second spring system to support the first support from the second support, and a damping system to provide damping to the dynamic support system; and an actuator for generating a driving force between the moveable object and the reaction mass for moving or position the object, wherein a first eigenfrequency and a second eigenfrequency of the dynamic support system are substantially the same.

公开(公告)号：US20210041793A1

公开(公告)日：2021-02-11

申请号：US16976326

申请日：2019-02-14

Applicant: ASML Netherlands B.V. ,  Carl Zeiss SMT GmbH

Inventor： Maarten Hartger KIMMAN ,  Jasper WESSELINGH

IPC: G03F7/20 ,  H02K11/21 ,  H02K41/035

Abstract: A positioning system to position a structure comprises an actuator and a control unit to control the actuator in response to a position setpoint received by the control unit. The actuator comprises a magnet assembly comprises a magnet configured to provide a magnetic flux, and a coil assembly, wherein the coil assembly and the magnet assembly are movable relative to each other, the coil assembly comprising a coil, an actuation of the coil by a drive current providing for a force between the magnet assembly and the coil assembly. The magnet assembly comprises a further electric conductor, the further electric conductor comprising a non-ferromagnetic electrically conductive material, wherein the further electric conductor is magnetically coupled to the coil of the coil assembly and forms a short circuit path for an inductive electrical current induced in the further electric conductor as a result of an actuator current in the coil.

公开(公告)号：US20200373118A1

公开(公告)日：2020-11-26

申请号：US16992058

申请日：2020-08-12

Applicant: ASML Netherlands B.V.

Inventor： Marcel Koenraad Marie BAGGEN ,  Peter Paul HEMPENIUS ,  Maarten Frans Janus KREMERS ,  Robertus Jacobus Theodorus VAN KEMPEN ,  Sven Antoin Johan HOL ,  Henricus Martinus Johannes VAN DE GROES ,  Johannes Hubertus Antonius VAN DE RIJDT ,  Niels Johannes Maria BOSCH ,  Maarten Hartger KIMMAN

IPC: H01J37/20 ,  H01L21/66 ,  H01J37/28

Abstract: An electron beam apparatus is provided. The apparatus comprises an e-beam source configured to generate an electron beam, a first part configured to support a substrate, the first part comprising an object table for supporting the substrate, the first part further comprising a short stroke actuator system for actuating the object table relative to the e-beam source, the short stroke actuator system comprising a short stroke forcer. The apparatus further comprises a second part configured to movably support the first part and a long stroke actuator system configured to actuate movement of the first part with respect to the second part, the long stroke actuator system comprising a long stroke forcer, wherein the short stroke forcer and/or the long stroke forcer is configured to be switched off while the electron beam is projected onto the substrate.

公开(公告)号：US20210080840A1

公开(公告)日：2021-03-18

申请号：US17050240

申请日：2019-03-21

Applicant: ASML Netherlands B.V.

Inventor： Peter Michel Silvester Maria HEIJMANS ,  Olof Martinus Josephus FISCHER ,  Maarten Hartger KIMMAN ,  Edwin VAN HORNE ,  Antonie Hendrik VERWEIJ

IPC: G03F7/20 ,  H02K41/03

Abstract: The present invention provides a tubular linear actuator, comprising: a tubular coil assembly comprising multiple tubular coils arranged next to each other in longitudinal direction of the tubular linear actuator and concentric with respect to a longitudinal axis of the tubular linear actuator, and a magnet assembly comprising a series of permanent magnets with alternating polarization direction extending in the longitudinal direction, wherein the magnet assembly is at least partially arranged in the coil assembly and movably with respect to the coil assembly, wherein the tubular coils comprise edge windings.

公开(公告)号：US20200049203A1

公开(公告)日：2020-02-13

申请号：US16494200

申请日：2018-02-15

Applicant: ASML NETHERLANDS B.V.

Inventor： Maarten Hartger KIMMAN ,  Hans BUTLER ,  Olof Martinus Josephus FISCHER ,  Christiaan Alexander HOOGENDAM ,  Theodorus Mattheus Joannus Maria HUIZINGA ,  Johannes Marinus Maria ROVERS ,  Eric Pierre-Yves VENNAT ,  Maurice Willem Jozef Etiënne WIJCKMANS

IPC: F16C39/06 ,  G03F7/20

Abstract: The invention relates to a bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, comprising a magnetic gravity compensator. The magnetic gravity compensator comprises:a first permanent magnet assembly mounted to one of the first part and the second part and comprising at least a first column of permanent magnets, the first column extending in the vertical direction, wherein the permanent magnets have a polarization direction in a first horizontal direction or in a second horizontal direction opposite to the first horizontal direction, wherein vertically adjacent permanent magnets have opposite polarization directions,a second permanent magnet assembly mounted to the other of the first part and the second part and comprising at least one other column of permanent magnets, the at least one other column extending in the vertical direction, wherein vertically adjacent permanent magnets of the at least one other column have opposite polarization directions in the first horizontal direction or the second horizontal direction,wherein the first permanent magnet assembly at least partially encloses the second permanent magnet assembly.