公开(公告)号：US20240183655A1

公开(公告)日：2024-06-06

申请号：US18279030

申请日：2022-03-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Alexander VON FINCK ,  Simon HALM ,  Ingo Juergen MARKEL ,  Maciej NEUMANN-RÖBISCH

IPC: G01B11/30 ,  G01N21/47 ,  G01N21/88 ,  G01N21/94

CPC classification number: G01B11/303 ,  G01N21/474 ,  G01N21/8806 ,  G01N21/94 ,  G01N2021/4742 ,  G01N2021/4783 ,  G01N2021/8835 ,  G01N2021/8845 ,  G01N2021/8848 ,  G01N2201/0612 ,  G01N2201/062 ,  G01N2201/08

Abstract: A measuring apparatus has at least two radiation sources arranged to illuminate a measuring region of a surface of a sample, the at least two sources configured to illuminate the measuring region along at least two illumination beam paths at different angles of incidence relative to a surface normal of the surface, a detector device configured to detect at least two scattered radiation images of surface sections in the illuminated measuring region at a predetermined viewing angle relative to the surface normal of the surface, portions of the scattered radiation received by the detector device, which portions are formed in each case by the illumination in one of the illumination beam paths, in each case having a common spatial frequency, and an evaluation device configured to determine at least one roughness feature of the surface sections from the at least two scattered radiation images.