公开(公告)号：US20240361702A1

公开(公告)日：2024-10-31

申请号：US18621218

申请日：2024-03-29

申请人： ASML NETHERLANDS B.V.

发明人： Anagnostis TSIATMAS ,  Paul Christiaan Hinnen ,  Elliott Gerard MC NAMARA ,  Thomas Theeuwes ,  Maria Isabel DE LA FUENTE VALENTIN ,  Mir Homayoun SHAHRJERDY ,  Arie Jeffrey DEN BOEF ,  Shu-jin WANG

IPC分类号： G03F7/00 ,  G03F7/20 ,  G06T7/00

CPC分类号： G03F7/70633 ,  G03F7/70625 ,  G03F7/70683 ,  G06T7/0006 ,  G03F7/20 ,  G06T2207/30148

摘要： A method including: obtaining a detected representation of radiation redirected by each of a plurality of structures from a substrate additionally having a device pattern thereon, wherein each structure has an intentional different physical configuration of the respective structure than the respective nominal physical configuration of the respective structure, wherein each structure has geometric symmetry at the respective nominal physical configuration, wherein the intentional different physical configuration of the structure causes an asymmetric optical characteristic distribution and wherein a patterning process parameter measures change in the physical configuration; and determining a value, based on the detected representations and based on the intentional different physical configurations, to setup, monitor or correct a measurement recipe for determining the patterning process parameter.

公开(公告)号：US20190171116A1

公开(公告)日：2019-06-06

申请号：US16323849

申请日：2017-07-21

申请人： ASML NETHERLANDS B.V.

发明人： Hans VAN DER LAAN ,  Mir Homayoun SHAHRJERDY

IPC分类号： G03F7/20

CPC分类号： G03F7/70675 ,  G03F7/705 ,  G03F7/70625

摘要： A method including computing, in accordance with one or more parameters of a substrate measurement recipe, measurement with a latent image of a target and measurement with a post- development image corresponding to the latent image, to evaluate a characteristic determined from the computed measurement with the latent image of the target and determined from the computed measurement with the post-development image corresponding to the latent image; and adjusting the one or more parameters of the substrate measurement recipe and re-performing the computing, until a certain termination condition is satisfied with respect to the characteristic,