公开(公告)号：US11994806B2

公开(公告)日：2024-05-28

申请号：US17436947

申请日：2020-02-26

Applicant: ASML NETHERLANDS B.V.

Inventor： Alexandru Onose ,  Remco Dirks ,  Roger Hubertus Elisabeth Clementine Bosch ,  Sander Silvester Adelgondus Marie Jacobs ,  Frank Jaco Buijnsters ,  Siebe Tjerk De Zwart ,  Artur Palha Da Silva Clerigo ,  Nick Verheul

IPC: G03F7/00

CPC classification number: G03F7/705 ,  G03F7/70625 ,  G03F7/70633 ,  G03F7/706841 ,  G03F7/70616

Abstract: A method, computer program and associated apparatuses for metrology. The method includes determining a reconstruction recipe describing at least nominal values for use in a reconstruction of a parameterization describing a target. The method includes obtaining first measurement data relating to measurements of a plurality of targets on at least one substrate, the measurement data relating to one or more acquisition settings and performing an optimization by minimizing a cost function which minimizes differences between the first measurement data and simulated measurement data based on a reconstructed parameterization for each of the plurality of targets. A constraint on the cost function is imposed based on a hierarchical prior. Also disclosed is a hybrid model method comprising obtaining a coarse model operable to provide simulated coarse data; and training a data driven model to correct the simulated coarse data so as to determine simulated data for use in reconstruction.