公开(公告)号：US20040169837A1

公开(公告)日：2004-09-02

申请号：US10719067

申请日：2003-11-24

Applicant: ASML NETHERLANDS B.V.

Inventor： Wouter Onno Pril ,  Engelbertus Antonius F. Van De Pasch ,  Robert F. Dillon ,  Philip Dennis Henshaw

IPC: G03B027/52

CPC classification number: G03F7/70958 ,  G01B9/02007 ,  G01B9/02014 ,  G01B9/02027 ,  G01B9/0207 ,  G01B9/02074 ,  G01B2290/45 ,  G01B2290/60 ,  G01B2290/70 ,  G03F7/70775 ,  G03F7/70883

Abstract: Measurements of an interferometric measurement system are corrected for variations of atmospheric conditions such as pressure, temperature, and turbulence using measurements from a second harmonic interferometer (SHI). A ramp, representing the dependence of the SHI data on path length, is removed before utilizing the SHI data. The SHI may include a passive Q-switched laser as a light source and Brewster prisms in the receiver module. Optical fibers may be used to conduct light to the detectors. A mirror reflecting the measurement beams has a coating of a thickness selected to minimize the sensitivity of the SHI data to changes in coating thickness.

Abstract translation: 使用来自二次谐波干涉仪（SHI）的测量，对诸如压力，温度和湍流的大气条件的变化校正干涉测量系统的测量。 在使用SHI数据之前，除去表示SHI数据对路径长度的依赖性的斜坡。 SHI可以包括作为光源的无源Q开关激光器和接收器模块中的布鲁斯特棱镜。 光纤可以用于向检测器传导光。 反映测量光束的反射镜具有选择的厚度的涂层，以使SHI数据对涂层厚度变化的敏感性最小化。