Interferometry for determining characteristics of an object surface, with spatially coherent illumination
    2.
    发明授权
    Interferometry for determining characteristics of an object surface, with spatially coherent illumination 有权
    用于确定物体表面特征的干涉测量,具有空间相干照明

    公开(公告)号:US07884947B2

    公开(公告)日:2011-02-08

    申请号:US11758252

    申请日:2007-06-05

    IPC分类号: G01B11/02

    摘要: Disclosed is an apparatus which includes: an interferometer configured to direct broadband spatially coherent test light to a test surface of a test object over a range of illumination angles and subsequently combine it with reference light to form an interference pattern, the test and reference light being derived from a common source; and multi-element detector; and one or more optics configured to direct at least a portion of the combined light to the detector so that different elements of the detector correspond to different illumination angles of a region of the test surface illuminated by the test light.

    摘要翻译: 公开了一种装置,其包括:干涉仪,其被配置为在宽度范围的照射角度下将宽带空间相干测试光引导到测试对象的测试表面,并随后将其与参考光组合以形成干涉图案,所述测试和参考光为 源自一个共同的来源; 多元素检测器; 以及一个或多个光学器件,被配置为将组合的光的至少一部分引导到检测器,使得检测器的不同元件对应于由测试光照射的测试表面的区域的不同照明角度。

    CALIBRATION JIG FOR OPTICAL TOMOGRAPHIC IMAGING APPARATUS AND METHOD FOR GENERATING A CALIBRATION CONVERSION TABLE
    3.
    发明申请
    CALIBRATION JIG FOR OPTICAL TOMOGRAPHIC IMAGING APPARATUS AND METHOD FOR GENERATING A CALIBRATION CONVERSION TABLE 有权
    用于光学图像成像装置的校准夹和用于产生校准转换表的方法

    公开(公告)号:US20090261240A1

    公开(公告)日:2009-10-22

    申请号:US12496273

    申请日:2009-07-01

    IPC分类号: G01D18/00 G01B9/02

    摘要: A calibration jig allowing simple and repeatable calibration of a probe optical tomographic apparatus is disclosed. The jig includes a holding member removably attachable to an attachment section of the apparatus and a reflective surface held by the holding member. The reflective surface reflects measurement light emitted from an emitting section of the attachment section and directs reflected light back to the emitting section. If a probe of the apparatus is covered with a sheath, the jig may include a light transmitting member, which generates the same dispersion as dispersion at the sheath, between the emitting section and the reflective surface. The reflective surface may be a single reflective surface disposed within an area corresponding to twice a coherence length of the laser light with a zero path position of the reflective surface being the center of the area.

    摘要翻译: 公开了一种允许探针光学断层摄影装置的简单且可重复校准的校准夹具。 夹具包括可移除地附接到装置的附接部分的保持构件和由保持构件保持的反射表面。 反射表面反射从附接部分的发射部分发射的测量光并将反射光引导回发射部分。 如果装置的探针被护套覆盖,则夹具可以包括透光构件,其在发射部分和反射表面之间产生与护套处的分散体相同的色散。 反射表面可以是设置在对应于激光的相干长度的两倍的区域内的单个反射表面,反射表面的零路径位置是该区域的中心。

    Compensation for effects of beam misalignments in interferometer metrology systems
    4.
    发明授权
    Compensation for effects of beam misalignments in interferometer metrology systems 失效
    干涉仪计量系统中光束不对准效应的补偿

    公开(公告)号:US07327465B2

    公开(公告)日:2008-02-05

    申请号:US11250116

    申请日:2005-10-13

    申请人: Henry A. Hill

    发明人: Henry A. Hill

    IPC分类号: G01B11/02

    摘要: In general, in a first aspect, the invention features methods that include deriving a first beam and a second beam from an input beam and directing the first and second beams along different paths, where the path of the first beam contacts a measurement object, producing an output beam comprising a phase related to an optical path difference between the different beam paths, determining a position of the measurement object with respect to at least one degree of freedom based on information derived from the output beam, monitoring variations in a direction of the input beam, and using the monitored variations in the direction of the input beam to reduce errors in the determined position associated with deviations of the path of the input beam from a nominal input beam path.

    摘要翻译: 通常,在第一方面,本发明的特征在于,方法包括从输入光束导出第一光束和第二光束,并将第一和第二光束沿着不同的路径引导,其中第一光束的路径接触测量对象,产生 输出光束,其包括与不同光束路径之间的光程差有关的相位,基于从输出光束导出的信息确定测量对象相对于至少一个自由度的位置,监测所述测量对象的方向上的变化 并且使用在输入光束的方向上监视的变化来减少与输入光束与标称输入光束路径的路径的偏差相关联的确定位置中的误差。

    Method for self-calibrated sub-aperture stitching for surface figure measurement
    5.
    发明授权
    Method for self-calibrated sub-aperture stitching for surface figure measurement 有权
    用于表面图形测量的自校准子孔缝合方法

    公开(公告)号:US06956657B2

    公开(公告)日:2005-10-18

    申请号:US10303236

    申请日:2002-11-25

    摘要: A method for accurately synthesizing a full-aperture data map from a series of overlapped sub-aperture data maps. In addition to conventional alignment uncertainties, a generalized compensation framework corrects a variety of errors, including compensators that are independent in each sub-aperture. Another class of compensators (interlocked) include coefficients that are the same across all the sub-apertures. A constrained least-squares optimization routine maximizes data consistency in sub-aperture overlap regions. The stitching algorithm includes constraints representative of the accuracies of the hardware to ensure that the results are within meaningful bounds. The constraints also enable the computation of estimates of uncertainties in the final results. The method therefore automatically calibrates the system, provides a full-aperture surface map, and an estimate of residual uncertainties. Therefore, larger surfaces can be tested with greater departures from a best-fit sphere to greater accuracy than was possible in the prior art.

    摘要翻译: 一种用于从一系列重叠子孔径数据图精确地合成全孔径数据图的方法。 除了传统的对准不确定性之外,广义补偿框架可以纠正各种错误,包括在每个子孔径中独立的补偿器。 另一类补偿器(互锁)包括在所有子孔径上相同的系数。 受限最小二乘优化程序使子孔重叠区域的数据一致性最大化。 拼接算法包括代表硬件准确性的约束,以确保结果在有意义的界限之内。 这些约束也使计算最终结果中不确定性的估计值。 因此,该方法可以自动校准系统,提供全孔径曲面图和剩余不确定度估计值。 因此,与现有技术相比,更大的表面可以与最佳拟合球体的更大偏离更大的精度进行测试。

    Method of calibrating an interferometer and reducing its systematic noise
    6.
    发明授权
    Method of calibrating an interferometer and reducing its systematic noise 失效
    校准干涉仪并降低其系统噪声的方法

    公开(公告)号:US5675513A

    公开(公告)日:1997-10-07

    申请号:US605348

    申请日:1996-02-16

    申请人: Philip D. Hammer

    发明人: Philip D. Hammer

    IPC分类号: G01B9/02 G01J9/02

    摘要: Methods of operation and data analysis for an interferometer so as to eliminate the errors contributed by non-responsive or unstable pixels, interpixel gain variations that drift over time, and spurious noise that would otherwise degrade the operation of the interferometer are disclosed. The methods provide for either online or post-processing calibration. The methods apply prescribed reversible transformations that exploit the physical properties of interferograms obtained from said interferometer to derive a calibration reference signal for subsequent treatment of said interferograms for interpixel gain variations. A self-consistent approach for treating bad pixels is incorporated into the methods.

    摘要翻译: 公开了干涉仪的操作和数据分析方法,以消除由非响应或不稳定像素造成的误差,随时间漂移的像素间增益变化以及原本会降低干涉仪操作的杂散噪声。 该方法提供在线或后处理校准。 所述方法应用规定的可逆变换,其利用从所述干涉仪获得的干涉图的物理性质来导出用于后续处理所述干涉图用于像素间增益变化的校准参考信号。 用于处理不良像素的自我一致的方法被并入到方法中。

    System and method for calibrated spectral domain optical coherence tomography and low coherence interferometry
    7.
    发明授权
    System and method for calibrated spectral domain optical coherence tomography and low coherence interferometry 有权
    校准频域光学相干断层扫描和低相干干涉测量的系统和方法

    公开(公告)号:US09506740B2

    公开(公告)日:2016-11-29

    申请号:US13513052

    申请日:2010-12-01

    摘要: Systems and methods for enhancing spectral domain optical coherence tomography (OCT] are provided. In particular, a system and method for calibration of spectral interference signals using an acquired calibration signal are provided. The calibration signal may be logarithmically amplified to further improve the accuracy of the calibration. From the calibration signal, a series of more accurate calibration data are calculated. An acquired spectral interference signal is calibrated using these calibration data. Moreover, systems that include logarithmic amplification of the spectral interference signal and variable band-pass filtering of the spectral interference signal are provided. Such systems increase the dynamic range and visualization capabilities relative to conventional spectral domain OCT systems.

    摘要翻译: 提供了增强频域光学相干断层扫描(OCT)的系统和方法,特别提供了一种使用采集的校准信号校准光谱干扰信号的系统和方法,校准信号可以对数放大,以进一步提高 校准,从校准信号中计算出一系列更准确的校准数据,采用这些校准数据对采集到的光谱干涉信号进行校准,而且包括频谱干扰信号的对数放大和可变带通滤波的系统 提供了光谱干扰信号,相对于常规光谱域OCT系统,这种系统增加了动态范围和可视化能力。

    Intensity noise reduction methods and apparatus for interferometric sensing and imaging systems
    9.
    发明授权
    Intensity noise reduction methods and apparatus for interferometric sensing and imaging systems 有权
    用于干涉测量和成像系统的强度降噪方法和装置

    公开(公告)号:US08948613B2

    公开(公告)日:2015-02-03

    申请号:US13050410

    申请日:2011-03-17

    摘要: In part, aspects of the invention relate to methods, apparatus, and systems for intensity and/or pattern line noise reduction in a data collection system such as an optical coherence tomography system that uses an electromagnetic radiation source and interferometric principles. In one embodiment, the noise is intensity noise or line pattern noise and the source is a laser such as a swept laser. One or more attenuators responsive to one or more control signals can be used in conjunction with an analog or digital feedback network in one embodiment.

    摘要翻译: 部分地,本发明的方面涉及数据采集系统中的强度和/或图案线噪声降低的方法,装置和系统,例如使用电磁辐射源和干涉原理的光学相干断层摄影系统。 在一个实施例中,噪声是强度噪声或线图案噪声,并且源是诸如扫描激光器的激光器。 在一个实施例中,响应于一个或多个控制信号的一个或多个衰减器可以与模拟或数字反馈网络结合使用。

    SWEPT SOURCE OPTICAL COHERENCE TOMOGRAPHY (SS-OCT) SYSTEM AND METHOD FOR PROCESSING OPTICAL IMAGING DATA
    10.
    发明申请
    SWEPT SOURCE OPTICAL COHERENCE TOMOGRAPHY (SS-OCT) SYSTEM AND METHOD FOR PROCESSING OPTICAL IMAGING DATA 审中-公开
    SWEPT源光学相干光谱(SS-OCT)系统和处理光学成像数据的方法

    公开(公告)号:US20110157597A1

    公开(公告)日:2011-06-30

    申请号:US12649338

    申请日:2009-12-30

    IPC分类号: G01B9/02

    摘要: A method for processing optical imaging data is provided. The method includes performing a phase error calibration procedure, performing a data acquisition procedure, and performing an imaging computation & analysis procedure. A reference clock signal and an A-scan signal are both received by a data acquisition unit during the phase error calibration procedure while only the A-scan signal is received by the data acquisition unit during the data acquisition procedure. A SS-OCT system for performing the above-mentioned method is provided also. Furthermore, a SS-OCT system having synchronization processing unit therein is provided.

    摘要翻译: 提供了一种处理光学成像数据的方法。 该方法包括执行相位误差校准程序,执行数据采集程序,以及执行成像计算和分析程序。 在相位误差校准过程期间,参考时钟信号和A扫描信号都被数据采集单元接收,而数据采集单元在数据采集过程中仅接收到A扫描信号。 还提供了用于执行上述方法的SS-OCT系统。 此外,提供其中具有同步处理单元的SS-OCT系统。