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公开(公告)号：US20230123152A1
公开(公告)日：2023-04-20
申请号：US17970469
申请日：2022-10-20
发明人： Yongxin WANG , Zhonghua DONG , Rui-Ling LAI , Kenichi KANAI
IPC分类号： H01J37/244 , G01T1/24 , H01J37/28 , H01J37/285 , H01L31/08
摘要： A detector may be provided with an array of sensing elements. The detector may include a semiconductor substrate including the array, and a circuit configured to count a number of charged particles incident on the detector. The circuit of the detector may be configured to process outputs from the plurality of sensing elements and increment a counter in response to a charged particle arrival event on a sensing element of the array. Various counting modes may be used. Counting may be based on energy ranges. Numbers of charged particles may be counted at a certain energy range and an overflow flag may be set when overflow is encountered in a sensing element. The circuit may be configured to determine a time stamp of respective charged particle arrival events occurring at each sensing element. Size of the sensing element may be determined based on criteria for enabling charged particle counting.
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公开(公告)号：US20200273664A1
公开(公告)日：2020-08-27
申请号：US16800946
申请日：2020-02-25
发明人： Yongxin WANG , Rui-Ling LAI
IPC分类号： H01J37/244 , H01L31/115 , H01L31/18 , H01L27/144
摘要： A detector may be provided with a sensing element or an array of sensing elements, each of the sensing elements may have a corresponding gain element. A substrate may be provided having a sensing element and a gain element integrated together. The gain element may include a section in which, along a direction perpendicular to an incidence direction of an electron beam, a region of first conductivity is provided adjacent to a region of second conductivity, and a region of third conductivity may be provided adjacent to the region of second conductivity. The sensing element may include a section in which, along the incidence direction, a region of fourth conductivity is provided adjacent to an intrinsic region of the substrate, and the region of second conductivity may be provided adjacent to the intrinsic region.
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公开(公告)号：US20200219696A1
公开(公告)日：2020-07-09
申请号：US16648288
申请日：2018-09-14
发明人： Yongxin WANG , Zhonghua DONG , Rui-Ling LAI
IPC分类号： H01J37/244 , H01L27/146
摘要： Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.
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公开(公告)号：US20230005707A1
公开(公告)日：2023-01-05
申请号：US17944121
申请日：2022-09-13
发明人： Yongxin WANG , Zhonghua DONG , Rui-Ling LAI
IPC分类号： H01J37/244 , H01L27/146
摘要： Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.
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公开(公告)号：US20220415608A1
公开(公告)日：2022-12-29
申请号：US17856848
申请日：2022-07-01
发明人： Yongxin WANG , Zhonghua DONG , Rui-Ling LAI
IPC分类号： H01J37/244 , H01L27/146
摘要： Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element, and a switching region therebetween configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.
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公开(公告)号：US20200317504A1
公开(公告)日：2020-10-08
申请号：US16841044
申请日：2020-04-06
发明人： Yongxin WANG , Rui-Ling LAI , Qian ZHANG
摘要： The present disclosure describes an image forming element having a semiconductor chip with micro-electro-mechanical-system (MEMS) devices and voltage generators, each voltage generator being configured to generate a voltage used by one or more of the MEMS devices. A floating ground may be used to add a voltage to the voltage generated by the voltage generators. The semiconductor chip may include electrical connections, where each voltage generator is configured to provide the voltage to the one or more MEMS devices through the electrical connections. The MEMS devices may define a boundary in the semiconductor chip within which the MEMS devices, the voltage generators, and the electrical connections are located. Each MEMS device may generate an electrostatic field to manipulate an electron beamlet of a multi-beam charged particle microscope. The MEMS devices may be organized into groups based on a distance to a reference location (e.g., optical axis) in the semiconductor chip.
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公开(公告)号：US20220059311A1
公开(公告)日：2022-02-24
申请号：US17408267
申请日：2021-08-20
发明人： Yongxin WANG , Rui-Ling LAI , Nickolay STEPANENKO , Jan BEX , Ronny HENDRIX , Lidewij Elisa CORNELISSEN , Robert Anton BROOKHUIS
摘要： Detector modules, systems and methods for detecting signal beams are disclosed using a detector module and a support comprising a feedthrough.
Furthermore, apparatuses, systems, and methods for sealing a vacuum system configured to provide an atmospheric environment and a vacuum chamber environment are disclosed. In some embodiments, a printed circuit board (PCB) comprising a first side for exposing to the atmospheric environment and a second side for exposing to the vacuum chamber environment and for covering an aperture in the vacuum chamber environment, wherein the second side is opposite to the first side. The apparatuses, systems, and methods may include a rigid body on the first side of the PCB and a device connected to the second side of the PCB and positioned on a portion of the PCB that covers the aperture. The PCB may be configured to provide an interface between the device and the rigid body.-
公开(公告)号：US20210134557A1
公开(公告)日：2021-05-06
申请号：US17044840
申请日：2019-03-14
发明人： Yongxin WANG , Zhonghua DONG , Rui-Ling LAI
IPC分类号： H01J37/244 , H01L27/146
摘要： Detectors and detection systems are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first plurality of the sensing elements and a second plurality of the sensing elements, and a plurality of sections configured to connect the first plurality to an output, and connect the second plurality to an output. Switching regions may be provided between the sensing elements that are configured to connect two or more sensing elements. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy and/or beam intensity.
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公开(公告)号：US20200227229A1
公开(公告)日：2020-07-16
申请号：US16648385
申请日：2018-09-14
发明人： Yongxin WANG , Zhonghua DONG , Rui-Ling LAI
IPC分类号： H01J37/244 , H01L27/146
摘要： Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.
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