公开(公告)号：US20150077729A1

公开(公告)日：2015-03-19

申请号：US14532897

申请日：2014-11-04

Applicant: ASML NETHERLANDS B.V.

Inventor： Tjarko Adriaan Rudolf VAN EMPEL ,  Vadim Yevgenyevich BANINE ,  Vladimir Vitalevich IVANOV ,  Erik Roelof LOOPSTRA ,  Johannes Hubertus Josephina MOORS ,  Jan Bernard Plechelmus VAN SCHOOT ,  Yuri Johannes Gabriël VAN DE VIJVER ,  Gerardus Hubertus Petrus Maria SWINKELS ,  Hendrikus Gijsbertus SCHIMMEL ,  Dzmitry LABETSKI

IPC: H05G2/00 ,  G03F7/20 ,  H05K7/20

CPC classification number: H05G2/008 ,  G03F7/70175 ,  G03F7/70891 ,  G03F7/70916 ,  G03F7/70983 ,  H05G2/003 ,  H05G2/006 ,  H05K7/2039

Abstract: A module for producing extreme ultraviolet radiation, including an extreme ultraviolet radiation-emitting source, the source being provided with a supply configured to supply a fluid of an ignition material to a predetermined target ignition position and a target-igniting mechanism constructed and arranged to produce a plasma from the ignition material at the target ignition position, the plasma emitting the extreme ultraviolet radiation; a collector mirror constructed and arranged to focus radiation emitted by the plasma at a focal point; and a heat sink having a thermal energy-diverting surface constructed and arranged to divert thermal energy away from the target ignition position, wherein the heat sink is located at a position proximate the target ignition position.

Abstract translation: 一种用于产生极紫外辐射源的模块，包括极紫外辐射发射源，该源提供有被配置为将点火材料的流体供应到预定的目标点火位置的供应，以及构造和布置以产生的点火机构 来自点火材料的等离子体在目标点火位置，等离子体发射极紫外线辐射; 收集器镜，构造和布置成将等离子体发射的辐射聚焦在焦点处; 以及散热器，其具有构造和布置成将热能转移离开目标点火位置的热能转向表面，其中散热器位于靠近目标点火位置的位置。