公开(公告)号：US20240186145A1

公开(公告)日：2024-06-06

申请号：US18286485

申请日：2022-04-04

Applicant: ASML Netherlands B.V.

Inventor： Monim AZIMI ,  Tjarco LINDEIJER ,  Michel DIJKSTRA ,  Siegfried Alexander TROMP ,  Ashwin SRIDHAR

IPC: H01L21/285 ,  H01L21/02 ,  H01L21/67 ,  H01L21/673

CPC classification number: H01L21/28556 ,  H01L21/02126 ,  H01L21/02529 ,  H01L21/67098 ,  H01L21/67383

Abstract: A surface treatment device for treating a surface of a substrate support, wherein the surface treatment device comprises a contacting surface that is configured to contact the surface of the substrate support. The contacting surface is configured with at least a first contour with a first centre of curvature and a second contour with a second centre of curvature, wherein the first centre of curvature and the second centre of curvature are non-coincident points.