公开(公告)号：US20190066859A1

公开(公告)日：2019-02-28

申请号：US15770688

申请日：2016-11-03

申请人： ASML Netherlands B.V.

发明人： Pieter Willem Herman DE JAGER ,  Sipke Jacob BIJLSMA ,  Olav Waldemar Vladimir FRIJNS ,  Andrey Alexandrovich NIKIPELOV ,  Nicolaas TEN KATE ,  Antonius Theodorus Anna Maria DERKSEN ,  Jacobus Johannus Leonardus Hendricus VERSPAY ,  Robert Gabriël Maria LANSBERGEN ,  Aukje KASTELIJN

IPC分类号： G21G1/10 ,  G21G1/12

摘要： A radioisotope production apparatus (RI) comprising an electron source arranged to provide an electron beam (E). The electron source comprises an electron injector (10) and an electron accelerator (20). The radioisotope production apparatus (RI) further comprises a target support structure configured to hold a target (30) and a beam splitter (40) arranged to direct the a first portion of the electron beam along a first path towards a first side of the target (30) and to direct a second portion of the electron beam along a second path towards a second side of the target (30).