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公开(公告)号：US11835870B2
公开(公告)日：2023-12-05
申请号：US17627720
申请日：2020-06-18
发明人： Güneş Nak{dot over (i)}boğlu , Nicholas Peter Waterson , Remco Van De Meerendonk , Steve Gregory Brust , Dirk Martinus Gerardus Petrus Wilhelmus Jakobs , Shravan Kottapalli
IPC分类号： G03F7/00
CPC分类号： G03F7/70891
摘要： A passive flow induced vibration reduction system for use in a temperature conditioning system that controls the temperature of at least one component within a lithographic apparatus. This FIV reduction system includes: a conduit that provides a flow path for a liquid through the system; a liquid filled cavity in fluid connection with the conduit, wherein the fluid connection is provided via one or more openings in the wall of the conduit; a membrane configured such that it separates the liquid in the liquid filled cavity from a gas at a substantially ambient pressure and the membrane is configured such that compliance of the membrane reduces at least low frequency flow induced vibrations in the liquid flowing through the conduit; and an end-stop located on the gas side of the membrane, wherein the end-stop is configured to limit an extent of deflection of the membrane.
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公开(公告)号：US11762304B2
公开(公告)日：2023-09-19
申请号：US15570934
申请日：2016-03-29
发明人： Güneş Nak{dot over (i)}boğlu , Maarten Holtrust , Martinus Van Duijnhoven , Francis Fahrni , Frank Johannes Jacobus Van Boxtel , Anne Willemijn Bertine Quist , Bart Dinand Paarhuis , Daan Daniel Johannes Antonius Van Sommeren
CPC分类号： G03F7/70858 , G03F7/709 , G03F7/70308 , G03F7/70883 , G03F7/70891
摘要： A lithographic apparatus has: a conduit through which a gas can flow; a gas mover configured to cause the gas to flow in the conduit; a wall in contact with the gas in the conduit and defining a membrane aperture therein; and an acoustic filter including a flexible membrane fixed in the membrane aperture. The acoustic filter reduces transmission of acoustic disturbances without adding any flow resistance.
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