公开(公告)号：US20230204352A1

公开(公告)日：2023-06-29

申请号：US17923535

申请日：2021-03-29

Applicant: ASML Netherlands B.V.

Inventor： Arjan GIJSBERTSEN ,  Viktor TROGRLIC ,  Peter Fernand William Jos DENDAS ,  Mihaita POPINCIUC ,  Andrey Valerievich ROGACHEVSKIY

IPC: G01B11/30 ,  G01B11/16 ,  G01B11/24 ,  G03F7/00

CPC classification number: G01B11/30 ,  G01B11/16 ,  G01B11/24 ,  G03F7/0005 ,  G01B2210/56

Abstract: Systems, apparatuses, and methods are provided for generating level data. An example method can include receiving first level data for a first region of a substrate. The first region can include a first subregion having a first surface level, and a second subregion having a second surface level. The example method can further include generating, based on the first level data, measurement control map data. The example method can further include generating, based on the measurement control map data, second level data for a second region of the substrate. The second region can include a plurality of third subregions each having a third surface level equal to about the first surface level, and, optionally, no region having a surface level equal to about the second surface level.