公开(公告)号：US20130135600A1

公开(公告)日：2013-05-30

申请号：US13667174

申请日：2012-11-02

Applicant: ASML Netherlands B.V.

Inventor： Scott Anderson MIDDLEBROOKS ,  Rene Andreas Maria Pluijms ,  Martyn John Coogans ,  Marc Johannes Noot

IPC: G03B27/54

CPC classification number: G03F7/70625 ,  G03F7/70525 ,  G03F7/70641

Abstract: An inspection method, and corresponding apparatus, enables classification of pupil images according to a process variable. The method comprises acquiring diffraction pupil images of a plurality of structures formed on a substrate during a lithographic process. A process variable of the lithographic process varies between formation of the structures, the variation of the process variable resulting in a variation in the diffraction pupil images. The method further comprises determining at least one discriminant function for the diffraction pupil images, the discriminant function being able to classify the pupil images in terms of the process variable.

Abstract translation: 检查方法和相应的装置能够根据过程变量分类瞳孔图像。 该方法包括在光刻工艺期间获取在基板上形成的多个结构的衍射光瞳图像。 光刻过程的过程变量在结构的形成之间变化，过程变量的变化导致衍射光瞳图像的变化。 该方法还包括确定用于衍射光瞳图像的至少一个判别函数，判别函数能够根据过程变量对瞳孔图像进行分类。

公开(公告)号：US10295913B2

公开(公告)日：2019-05-21

申请号：US13667174

申请日：2012-11-02

Applicant: ASML Netherlands B.V.

Inventor： Scott Anderson Middlebrooks ,  Rene Andreas Maria Pluijms ,  Martyn John Coogans ,  Marc Johannes Noot

IPC: G03F7/20

Abstract: An inspection method, and corresponding apparatus, enables classification of pupil images according to a process variable. The method comprises acquiring diffraction pupil images of a plurality of structures formed on a substrate during a lithographic process. A process variable of the lithographic process varies between formation of the structures, the variation of the process variable resulting in a variation in the diffraction pupil images. The method further comprises determining at least one discriminant function for the diffraction pupil images, the discriminant function being able to classify the pupil images in terms of the process variable.