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公开(公告)号：US09239269B1
公开(公告)日：2016-01-19
申请号：US14330526
申请日：2014-07-14
Applicant: ASML Netherlands B.V.
Inventor： Rong Liu , Robert J. Rafac , David Wayne Myers , Robert A. Bergstedt , Paul Alexander McKenzie
CPC classification number: G01J11/00 , G01J1/0228 , G01J1/0295 , G01J1/4257 , G01J1/429 , G01J2001/4238 , G02B27/0025 , H01S5/042 , H05G2/008
Abstract: In a laser-produced plasma (LPP) extreme ultraviolet (EUV) system, laser pulses are used to produce EUV light. To determine the energy of individual laser pulses, a photoelectromagnetic (PEM) detector is calibrated to a power meter using a calibration coefficient. When measuring a unitary laser beam comprising pulses of a single wavelength, the calibration coefficient is calculated based on a burst of the pulses. A combined laser beam has main pulses of a first wavelength alternating with pre-pulses pulses of a second wavelength. To calculate the energy of the main pulses in the combined laser beam, the calibration coefficient calculated for a unitary laser beam of the main pulses is used. To calculate the energy of the pre-pulses in the combined laser beam, a new calibration coefficient is calculated. When the calculated energy values drift beyond a pre-defined threshold, the calibration coefficients are recalculated.
Abstract translation: 在激光产生的等离子体（LPP）极紫外（EUV）系统中，使用激光脉冲来产生EUV光。 为了确定单个激光脉冲的能量，使用校准系数将光电（PEM）检测器校准到功率计。 当测量包括单个波长的脉冲的单一激光束时，基于脉冲的脉冲串来计算校准系数。 组合的激光束具有与第二波长的预脉冲脉冲交替的第一波长的主脉冲。 为了计算组合激光束中主脉冲的能量，使用为主脉冲的单一激光束计算的校准系数。 为了计算组合激光束中预脉冲的能量，计算出新的校准系数。 当计算出的能量值漂移超过预先定义的阈值时，重新计算校准系数。
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公开(公告)号：US09239268B1
公开(公告)日：2016-01-19
申请号：US14330488
申请日：2014-07-14
Applicant: ASML Netherlands B.V.
Inventor： Rong Liu , Robert J. Rafac , David Wayne Myers , Robert A. Bergstedt , Paul Alexander McKenzie
CPC classification number: G01J11/00 , G01J1/0228 , G01J1/0295 , G01J1/429 , G01J2001/4238 , G01J2001/4247 , H01S3/0014 , H01S3/2232 , H01S5/042 , H05G2/008
Abstract: In a laser-produced plasma (LPP) extreme ultraviolet (EUV) system, laser pulses are used to produce EUV light. To determine the energy of individual laser pulses, a photoelectromagnetic (PEM) detector is calibrated to a power meter using a calibration coefficient. When measuring a unitary laser beam comprising pulses of a single wavelength, the calibration coefficient is calculated based on a burst of the pulses. A combined laser beam has main pulses of a first wavelength alternating with pre-pulses pulses of a second wavelength. To calculate the energy of the main pulses in the combined laser beam, the calibration coefficient calculated for a unitary laser beam of the main pulses is used. To calculate the energy of the pre-pulses in the combined laser beam, a new calibration coefficient is calculated. When the calculated energy values drift beyond a pre-defined threshold, the calibration coefficients are recalculated.
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公开(公告)号：US20160011057A1
公开(公告)日：2016-01-14
申请号：US14330526
申请日：2014-07-14
Applicant: ASML Netherlands B.V.
Inventor： Rong Liu , Robert J. Rafac , David Wayne Myers , Robert A. Bergstedt , Paul Alexander McKenzie
CPC classification number: G01J11/00 , G01J1/0228 , G01J1/0295 , G01J1/4257 , G01J1/429 , G01J2001/4238 , G02B27/0025 , H01S5/042 , H05G2/008
Abstract: In a laser-produced plasma (LPP) extreme ultraviolet (EUV) system, laser pulses are used to produce EUV light. To determine the energy of individual laser pulses, a photoelectromagnetic (PEM) detector is calibrated to a power meter using a calibration coefficient. When measuring a unitary laser beam comprising pulses of a single wavelength, the calibration coefficient is calculated based on a burst of the pulses. A combined laser beam has main pulses of a first wavelength alternating with pre-pulses pulses of a second wavelength. To calculate the energy of the main pulses in the combined laser beam, the calibration coefficient calculated for a unitary laser beam of the main pulses is used. To calculate the energy of the pre-pulses in the combined laser beam, a new calibration coefficient is calculated. When the calculated energy values drift beyond a pre-defined threshold, the calibration coefficients are recalculated.
Abstract translation: 在激光产生的等离子体（LPP）极紫外（EUV）系统中，使用激光脉冲来产生EUV光。 为了确定单个激光脉冲的能量，使用校准系数将光电（PEM）检测器校准到功率计。 当测量包括单个波长的脉冲的单一激光束时，基于脉冲的脉冲串来计算校准系数。 组合的激光束具有与第二波长的预脉冲脉冲交替的第一波长的主脉冲。 为了计算组合激光束中主脉冲的能量，使用为主脉冲的单一激光束计算的校准系数。 为了计算组合激光束中预脉冲的能量，计算出新的校准系数。 当计算出的能量值漂移超过预先定义的阈值时，重新计算校准系数。
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公开(公告)号：US20160011056A1
公开(公告)日：2016-01-14
申请号：US14330488
申请日：2014-07-14
Applicant: ASML Netherlands B.V.
Inventor： Rong Liu , Robert J. Rafac , David Wayne Myers , Robert A. Bergstedt , Paul Alexander McKenzie
CPC classification number: G01J11/00 , G01J1/0228 , G01J1/0295 , G01J1/429 , G01J2001/4238 , G01J2001/4247 , H01S3/0014 , H01S3/2232 , H01S5/042 , H05G2/008
Abstract: In a laser-produced plasma (LPP) extreme ultraviolet (EUV) system, laser pulses are used to produce EUV light. To determine the energy of individual laser pulses, a photoelectromagnetic (PEM) detector is calibrated to a power meter using a calibration coefficient. When measuring a unitary laser beam comprising pulses of a single wavelength, the calibration coefficient is calculated based on a burst of the pulses. A combined laser beam has main pulses of a first wavelength alternating with pre-pulses pulses of a second wavelength. To calculate the energy of the main pulses in the combined laser beam, the calibration coefficient calculated for a unitary laser beam of the main pulses is used. To calculate the energy of the pre-pulses in the combined laser beam, a new calibration coefficient is calculated. When the calculated energy values drift beyond a pre-defined threshold, the calibration coefficients are recalculated.
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