专利检索 ap:("ASML Netherlands B.V.") AND inv:"Ruben Hendrik C DILISSEN" 第 1 页

1.

发明公开
A SEED LASER OPTICAL ISOLATOR, SEED ISOLATOR MODULE, EUV RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND OPTICAL ISOLATOR OPERATING METHOD 审中-公开

公开(公告)号：US20240275114A1

公开(公告)日：2024-08-15

申请号：US18568515

申请日：2022-05-16

申请人： ASML Netherlands B.V.

发明人： Karel Joop BOSSCHAART , Tomasz CZARNOTA , Heine Melle MULDER , Ruben Hendrik C DILISSEN

IPC分类号： H01S3/00 , G02F1/11 , G03F7/00 , H01S3/04 , H01S3/223 , H05G2/00

CPC分类号： H01S3/0064 , G02F1/11 , G03F7/70033 , G03F7/70891 , H01S3/0405 , G02F2203/21 , H01S3/2232 , H05G2/005 , H05G2/008

摘要： The present invention relates to an optical isolator for a seed laser, comprising: an acousto-optic modulator crystal configured to manipulate laser light incident thereto, and at least one cooling system configured to regulate a temperature of the crystal, said cooling system comprising: a cooling element including one or more channels for a fluidic cooling medium, a heat transfer assembly arranged between the crystal and the cooling element to transfer heat from the crystal to the cooling element, wherein the heat transfer assembly includes an active heat transfer element.