公开(公告)号：US20250132122A1

公开(公告)日：2025-04-24

申请号：US18990157

申请日：2024-12-20

Applicant: ASML Netherlands B.V.

Inventor： Thomas Izaak Fred HAARTSEN ,  Niels Johannes Maria BOSCH ,  Jasper Hendrik GRASMAN ,  Martin Frans Pierre SMEETS ,  Erwin SLOT ,  Wouter Onno PRIL ,  Peter Paul HEMPENIUS ,  Te-Yu CHEN

IPC: H01J37/21 ,  G01B7/02 ,  H01J37/20

Abstract: The present disclosure relates to apparatus and methods for assessing samples using a plurality of charged particle beams. In one arrangement, at least a subset of a beam grid of a plurality of charged particle beams and respective target portions of a sample surface are scanned relative to each other to process the target portions. Signal charged particles from the sample are detected to generate detection signals. A sample surface topographical map is generated that represents a topography of the sample surface by analyzing the detection signals.