公开(公告)号：US11929232B2

公开(公告)日：2024-03-12

申请号：US17026044

申请日：2020-09-18

Applicant: ASML Netherlands B.V.

Inventor： Frank Nan Zhang ,  Zhongwei Chen ,  Yixiang Wang ,  Ying Crystal Shen

IPC: H01J37/26 ,  H01J37/04 ,  H01J37/28

CPC classification number: H01J37/265 ,  H01J37/045 ,  H01J37/266 ,  H01J37/28 ,  H01J2237/0044 ,  H01J2237/0048 ,  H01J2237/0453 ,  H01J2237/0455 ,  H01J2237/0458 ,  H01J2237/049 ,  H01J2237/28 ,  H01J2237/2817

Abstract: Systems and methods for implementing charged particle flooding in a charged particle beam apparatus are disclosed. According to certain embodiments, a charged particle beam system includes a charged particle source and a controller which controls the charged particle beam system to emit a charged particle beam in a first mode where the beam is defocused and a second mode where the beam is focused on a surface of a sample.

公开(公告)号：US10784077B2

公开(公告)日：2020-09-22

申请号：US16053636

申请日：2018-08-02

Applicant: ASML Netherlands B.V.

Inventor： Frank Nan Zhang ,  Zhongwei Chen ,  Yixiang Wang ,  Ying Crystal Shen

IPC: H01J37/26 ,  H01J37/04 ,  H01J37/28

Abstract: Systems and methods for implementing charged particle flooding in a charged particle beam apparatus are disclosed. According to certain embodiments, a charged particle beam system includes a charged particle source and a controller which controls the charged particle beam system to emit a charged particle beam in a first mode where the beam is defocused and a second mode where the beam is focused on a surface of a sample.