公开(公告)号：US20180329316A1

公开(公告)日：2018-11-15

申请号：US15756057

申请日：2016-08-23

Applicant: ASML Netherlands B.V. ,  ASML Holding N.V.

Inventor： Alessandro POLO ,  Simon Gijsbert Josephus MATHIJSSEN ,  Patricius Aloysius Jacobus TINNEMANS ,  Scott Douglas COSTON ,  Ronan James HAVELIN

IPC: G03F9/00 ,  G02B27/14 ,  G02B27/10 ,  G02B6/293

Abstract: A lithographic apparatus includes an alignment sensor configured to determine the position of an alignment target having a periodic structure. The alignment sensor includes a demultiplexer to demultiplex a number of intensity channels. The demultiplexer includes a number of stages arranged in series and a number of demultiplexing components, each demultiplexing component operable to divide an input radiation beam into two radiation beam portions. The first stage has a first demultiplexing component that is arranged to receive as an input radiation beam an incident radiation beam. Each successive stage is arranged such that it has twice the number of demultiplexing components as a preceding stage, each demultiplexing component of each stage after the first stage receiving as an input one of the radiation beam portions output from a demultiplexing component of the preceding stage.

公开(公告)号：US20210033779A1

公开(公告)日：2021-02-04

申请号：US17066524

申请日：2020-10-09

Applicant: ASML HOLDING N.V.

Inventor： King Pui LEUNG ,  Tao CHEN ,  Ronan James HAVELIN ,  Igor Matheus Petronella AARTS ,  Adel JOOBEUR ,  Joseph CARBONE

IPC: G02B6/02 ,  G02F1/365 ,  G03F9/00 ,  G01B11/02 ,  G02B6/122 ,  G02B6/27 ,  G02B6/293

Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.