公开(公告)号：US20170357166A1

公开(公告)日：2017-12-14

申请号：US15540595

申请日：2015-11-26

Applicant: ASML Holding N.V.

Inventor： Tao CHEN ,  King Pui LEUNG ,  Kevin J. VIOLETTE

IPC: G03F9/00 ,  G03F7/20

CPC classification number: G03F9/7065 ,  G03F7/70141 ,  G03F7/70575

Abstract: An alignment system having long term stability in illumination center wavelength is discussed. The alignment system includes a tunable radiation source and a feedback control system. The tunable radiation source includes a light source configured to provide a broadband radiation beam and a tunable multi-passband filter configured to filter the broadband radiation beam into narrow band radiation beam having a center wavelength value. The feedback control system is configured to measure the center wavelength value of the narrow band radiation beam and compare the measured center wavelength value with a desired center wavelength value. The feedback control system is further configured to generate a control signal based on the comparison in response to a difference being present between the measured center wavelength value and the desired center wavelength value and tune the tunable filter based on the control signal to eliminate or substantially reduce the difference.

公开(公告)号：US20170277046A1

公开(公告)日：2017-09-28

申请号：US15505874

申请日：2015-08-11

Applicant: ASML HOLDING N.V.

Inventor： King Pui LEUNG ,  Tao CHEN ,  Kevin J. VIOLETTE

IPC: G03F9/00 ,  G01B11/27 ,  G02B6/02

Abstract: A spectrally broadened radiation apparatus, including a laser configured to emit, through an output of the laser, radiation substantially only in the visible region of the electromagnetic spectrum, the radiation having a nominal wavelength, and an optical fiber optically coupled to the output of the laser, the optical fiber having an input to receive the radiation from the laser and having an output to provide spectrally broadened output radiation, the optical fiber configured to spectrally broaden the radiation from the laser to a spectral width of at least 0.5 nm around the nominal wavelength.

公开(公告)号：US20210033779A1

公开(公告)日：2021-02-04

申请号：US17066524

申请日：2020-10-09

Applicant: ASML HOLDING N.V.

Inventor： King Pui LEUNG ,  Tao CHEN ,  Ronan James HAVELIN ,  Igor Matheus Petronella AARTS ,  Adel JOOBEUR ,  Joseph CARBONE

IPC: G02B6/02 ,  G02F1/365 ,  G03F9/00 ,  G01B11/02 ,  G02B6/122 ,  G02B6/27 ,  G02B6/293

Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.

公开(公告)号：US20190154910A1

公开(公告)日：2019-05-23

申请号：US16094244

申请日：2017-03-17

Applicant: ASML HOLDING N.V.

Inventor： King Pui LEUNG ,  Tao CHEN ,  James Ronan HAVELIN ,  Igor Matheus Petronella AARTS ,  Adel JOOBEUR ,  Joseph CARBONE

IPC: G02B6/02 ,  G02F1/365 ,  G02B6/27 ,  G02B6/293 ,  G02B6/122

CPC classification number: G02B6/02004 ,  G01B11/02 ,  G01B2210/56 ,  G02B6/1228 ,  G02B6/2746 ,  G02B6/29377 ,  G02F1/365 ,  G02F2001/3528 ,  G03F9/7065

Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.