公开(公告)号：US20210033779A1

公开(公告)日：2021-02-04

申请号：US17066524

申请日：2020-10-09

Applicant: ASML HOLDING N.V.

Inventor： King Pui LEUNG ,  Tao CHEN ,  Ronan James HAVELIN ,  Igor Matheus Petronella AARTS ,  Adel JOOBEUR ,  Joseph CARBONE

IPC: G02B6/02 ,  G02F1/365 ,  G03F9/00 ,  G01B11/02 ,  G02B6/122 ,  G02B6/27 ,  G02B6/293

Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.

公开(公告)号：US20190154910A1

公开(公告)日：2019-05-23

申请号：US16094244

申请日：2017-03-17

Applicant: ASML HOLDING N.V.

Inventor： King Pui LEUNG ,  Tao CHEN ,  James Ronan HAVELIN ,  Igor Matheus Petronella AARTS ,  Adel JOOBEUR ,  Joseph CARBONE

IPC: G02B6/02 ,  G02F1/365 ,  G02B6/27 ,  G02B6/293 ,  G02B6/122

CPC classification number: G02B6/02004 ,  G01B11/02 ,  G01B2210/56 ,  G02B6/1228 ,  G02B6/2746 ,  G02B6/29377 ,  G02F1/365 ,  G02F2001/3528 ,  G03F9/7065

Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.