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1.发明授权公开(公告)号：US09958793B2
公开(公告)日：2018-05-01
申请号：US14897503
申请日：2014-06-26
发明人： Roan Marinus Westerhof , Hubertus Luberta Hagenaars , Ulrich Schönhoff , Adrianus Josephus Petrus Van Engelen
CPC分类号： G03F7/70775 , G03F7/70141 , G03F7/70258 , G03F7/70766 , G03F7/709
摘要： A lithographic apparatus having a reference body and a positioning system, the positioning system including a main body; a reaction body; an actuator; and a controller. The main body is moveable relative to the reference body along a path in a first direction and a second opposite direction. The reaction body is moveable relative to the main body along a further path in the first and second directions and is moveably connected to the reference body to be moveable relative to the reference body in the first and second directions. The controller provides a first and a second signal to the actuator. The actuator is arranged between the main body and the reaction body to accelerate the main body in the first direction and to accelerate the reaction body in the second direction under control of the first signal, and to accelerate the main body in the second direction and to accelerate the reaction body in the first direction under control of the second signal. The controller determines when the reaction body moves in the second direction and to provide the second signal after the first signal to the actuator when the reaction body moves in the second direction along the further path.
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