公开(公告)号：US20040244692A1

公开(公告)日：2004-12-09

申请号：US10454428

申请日：2003-06-04

Applicant: Advanced Ion Beam Technology, Inc.

Inventor： Jiong Chen ,  Simeon K. S. Ma

IPC: C23C016/00

CPC classification number: H01J37/3023 ,  C23C14/48 ,  C23C14/54 ,  H01J37/3171

Abstract: An ion implantation method is disclosed that includes a step of carrying out a built-in early check to ensure accurate and correct operation parameters are employed when the setup operation is started. By applying built-in check processes, the repeatability of ion beam setup processes can be enhanced. The ion beam setup method includes a formula-based searching algorithm to accurately and rapidly determines the atomic mass unit (AMU) using a feedback data other than the beam current. The same formula is used to check for subsystems consistency and reliability to ensure accuracy of the ion beam being set up. The searching algorithm further implements a peaking algorithm to avoid the common pitfalls of misinterpretation of data and achieve an accurate, reliable, and fast tuning with the help of nullTrusty Recipesnull as initial conditions and nullLimits Parametersnull as constraints. In order to enhance and facilitate the human-system interactions, graphic user interface (GUI) is used to minimize human errors and to monitor and to rapidly react to abnormal operation conditions. By reducing the ion beam setup time, it is feasible to shutoff the ion source generation and deflection subsystem during a wafer exchange period. The shutoff operation enables the cost reductions by reducing wastes of materials; manpower and other system resources while increase the overall system productivities.

Abstract translation: 公开了一种离子注入方法，其包括执行内置的早期检查以确保在开始设置操作时采用准确和正确的操作参数的步骤。 通过应用内置的检查过程，可以提高离子束设置过程的重复性。 离子束设置方法包括基于公式的搜索算法，以使用除束电流之外的反馈数据来准确且快速地确定原子质量单位（AMU）。 使用相同的公式来检查子系统的一致性和可靠性，以确保设置离子束的准确性。 搜索算法进一步实现了峰值算法，避免了数据误解的常见缺陷，借助“信任配方”作为初始条件和“限制参数”作为约束，实现了准确，可靠，快速的调优。 为了增强和促进人机系统的相互作用，使用图形用户界面（GUI）来最小化人为错误，并监视和对异常操作条件作出快速反应。 通过减少离子束建立时间，可以在晶片交换期间切断离子源产生和偏转子系统。 关闭操作可以通过减少材料的浪费来降低成本; 人力等系统资源，同时提高整体系统生产力。