公开(公告)号：US20150078685A1

公开(公告)日：2015-03-19

申请号：US14550401

申请日：2014-11-21

Applicant: Advanced Technology Materials, Inc.

Inventor： Glenn M. TOM ,  John R. KINGERY ,  Kevin T. O'DOUGHERTY ,  Kirk MIKKELSEN ,  Michele J. ALBERG ,  Patrick M. OLSON ,  Timothy HOYT

IPC: B65D33/00 ,  B65D83/00 ,  B65B31/00

CPC classification number: B65D33/00 ,  B65B31/003 ,  B65D83/0061 ,  B65D83/62 ,  Y10T428/249981 ,  Y10T428/31757

Abstract: Packages and methods for storage and dispensing of materials, e.g., high purity liquid reagents and chemical mechanical polishing compositions used in the manufacture of microelectronic device products, including containment structures and methods adapted for pressure-dispensing of high-purity liquids. Liner packaging of liquid or liquid-containing media is described, in which zero or near-zero head space conformations are employed to minimize adverse effects of particle generation, formation of bubbles and degradation of contained material.

公开(公告)号：US20150298891A1

公开(公告)日：2015-10-22

申请号：US14688778

申请日：2015-04-16

Applicant: Advanced Technology Materials, Inc.

Inventor： Minna HOVINEN ,  John R. KINGERY ,  Glenn M. TOM ,  Kevin T. O'DOUGHERTY ,  Kirk MIKKELSEN ,  Donald D. WARE ,  Peter C. VAN BUSKIRK

IPC: B65D83/00 ,  G01F23/18

CPC classification number: B65D83/0061 ,  B01J4/02 ,  B01J2219/00065 ,  B01J2219/00067 ,  B01J2219/00069 ,  B01J2219/00164 ,  G01F23/18

Abstract: Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.