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公开(公告)号:US20150360929A1
公开(公告)日:2015-12-17
申请号:US14812651
申请日:2015-07-29
Applicant: Advanced Technology Materials. Inc
Inventor: Kevin T. O'DOUGHERTY , Glenn M. TOM
CPC classification number: B67D7/0288 , B67D7/0261 , B67D7/32 , B67D7/3227 , B67D7/3281 , B67D7/34 , B67D7/344 , F16K35/00 , F16K35/025 , F16L37/08 , Y10T29/49826 , Y10T29/53
Abstract: Fluid storage and dispensing systems and processes involving various structures methods for fluid storage and dispensing, including, pre-connect verification couplings that are usefully employed with fluid storage and dispensing packages to ensure proper coupling and avoid fluid contamination issues, empty detect systems (e.g., monitoring pressure of dispensed liquid medium to detect pressure droop conditions) useable with fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.
Abstract translation: 流体储存和分配系统和流程涉及用于流体储存和分配的各种结构方法,包括预先连接的验证联接件,其有效地用于流体储存和分配包装以确保适当的联接并避免流体污染问题,空的检测系统(例如, 监测分配的液体介质的压力以检测压力下降条件)可用于流体储存和分配包装,其包括在流体分配操作中被压缩的衬垫,符合人体工程学的增强结构,以便于从加盖的容器移除分配连接器, 用于防止容器盖的误用的系统,以及用于确保适当的分配组件和容器的联接的键盘系统。 流体储存和分配系统实现了零或接近零的顶空特性,并且防止或改善了液体从液体分配到外包装容器内的作用。
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公开(公告)号:US20150078685A1
公开(公告)日:2015-03-19
申请号:US14550401
申请日:2014-11-21
Applicant: Advanced Technology Materials, Inc.
Inventor: Glenn M. TOM , John R. KINGERY , Kevin T. O'DOUGHERTY , Kirk MIKKELSEN , Michele J. ALBERG , Patrick M. OLSON , Timothy HOYT
CPC classification number: B65D33/00 , B65B31/003 , B65D83/0061 , B65D83/62 , Y10T428/249981 , Y10T428/31757
Abstract: Packages and methods for storage and dispensing of materials, e.g., high purity liquid reagents and chemical mechanical polishing compositions used in the manufacture of microelectronic device products, including containment structures and methods adapted for pressure-dispensing of high-purity liquids. Liner packaging of liquid or liquid-containing media is described, in which zero or near-zero head space conformations are employed to minimize adverse effects of particle generation, formation of bubbles and degradation of contained material.
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公开(公告)号:US20150284236A1
公开(公告)日:2015-10-08
申请号:US14744202
申请日:2015-06-19
Applicant: Advanced Technology Materials. Inc
Inventor: Kevin T. O'DOUGHERTY , Glenn M. TOM
CPC classification number: B67D7/0288 , B67D7/0261 , B67D7/32 , B67D7/3227 , B67D7/3281 , B67D7/34 , B67D7/344 , F16K35/00 , F16K35/025 , F16L37/08 , Y10T29/49826 , Y10T29/53
Abstract: Fluid storage and dispensing systems and processes involving various structures methods for fluid storage and dispensing, including, pre-connect verification couplings that are usefully employed with fluid storage and dispensing packages to ensure proper coupling and avoid fluid contamination issues, empty detect systems (e.g., monitoring pressure of dispensed liquid medium to detect pressure droop conditions) useable with fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.
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公开(公告)号:US20160039659A1
公开(公告)日:2016-02-11
申请号:US14814155
申请日:2015-07-30
Applicant: Advanced Technology Materials, Inc.
Inventor: Donald D. WARE , Glenn M. TOM , Paul DATHE , Amy KOLAND , Jason GEROLD , Kirk MIKKELSEN , Kevin T. O'DOUGHERTY , Michael A. CISEWSKI
CPC classification number: B67D7/763 , B65D83/62 , B67D7/0261 , Y10T137/313
Abstract: Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.
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公开(公告)号:US20150298891A1
公开(公告)日:2015-10-22
申请号:US14688778
申请日:2015-04-16
Applicant: Advanced Technology Materials, Inc.
Inventor: Minna HOVINEN , John R. KINGERY , Glenn M. TOM , Kevin T. O'DOUGHERTY , Kirk MIKKELSEN , Donald D. WARE , Peter C. VAN BUSKIRK
CPC classification number: B65D83/0061 , B01J4/02 , B01J2219/00065 , B01J2219/00067 , B01J2219/00069 , B01J2219/00164 , G01F23/18
Abstract: Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.
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