公开(公告)号：US20230243030A1

公开(公告)日：2023-08-03

申请号：US18012412

申请日：2021-06-28

Applicant: Agency for Science, Technology and Research

Inventor： Henry Medina Silva ,  Dongzhi Chi ,  Shi Wun Tong ,  Jianwei Chai ,  Shijie Wang

IPC: C23C16/02 ,  C23C14/18 ,  C23C14/08 ,  C23C16/448 ,  C23C16/30 ,  C23C16/455 ,  C23C16/46 ,  C23C14/58 ,  C23C28/00 ,  H01L21/02

CPC classification number: C23C16/0281 ,  C23C14/083 ,  C23C14/185 ,  C23C14/5866 ,  C23C16/46 ,  C23C16/305 ,  C23C16/4482 ,  C23C16/45523 ,  C23C28/322 ,  C23C28/3455 ,  H01L21/0242 ,  H01L21/02568 ,  H01L21/02614

Abstract: A method for forming a transition metal dichalcogenide monolayer, which includes depositing a transition metal, a transition metal oxide, or a mixture thereof, on a substrate, introducing a chalcogen precursor to the transition metal, the transition metal oxide, or the mixture thereof, in the presence of an etching gas and a carrier gas at a first temperature, to form a transition metal dichalcogenide on the substrate from the transition metal, the transition metal oxide, or the mixture thereof, and subliming the transition metal dichalcogenide on the substrate in the presence of a pulsating supply of a vapor of the chalcogen precursor to form the transition metal dichalcogenide monolayer at a second temperature, wherein the vapor of the chalcogen precursor comprises a chalcogen vapor.

公开(公告)号：US12245531B2

公开(公告)日：2025-03-04

申请号：US17636833

申请日：2020-09-18

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

Inventor： Henry Medina Silva ,  Dongzhi Chi ,  Jianwei Chai ,  Ming Yang ,  Shijie Wang ,  Shi Wun Tong ,  Carlos Manzano

IPC: H10N70/00 ,  C01B19/00 ,  H10N70/20

Abstract: Herein provided is a multilayered structure including one or more nanocrystalline layers each comprising a transition metal dichalcogenide, one or more substantially amorphous electrically insulating layers each comprising a transition metal oxide, wherein the transition metal oxide comprises a transition metal which is identical to the transition metal of the transition metal dichalcogenide, wherein the one or more nanocrystalline layers and the one or more substantially amorphous electrically insulating layers are formed in an alternating manner, and wherein each of the one or more nanocrystalline layers is formed adjacent to the substantially amorphous insulating layer. A resistive memory device comprising the multilayered structure and a process of fabricating the multilayered structure are also disclosed herein.

公开(公告)号：US11257663B2

公开(公告)日：2022-02-22

申请号：US16645512

申请日：2018-09-11

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

Inventor： Jianwei Chai ,  Shijie Wang ,  Dongzhi Chi ,  Ming Yang

IPC: H01J37/34 ,  C23C14/34 ,  C23C14/35 ,  H01J37/32

Abstract: A sputtering system and a sputtering method are provided. The sputtering system includes a first electrode, a magnet and a second electrode. The first electrode is an elongated tube having a first end and a second end downstream of the first end. The first end is configured to receive a gas flow and the second end is placed next to a substrate. The magnet surrounds at least a portion of the elongated tube and is configured to generate a magnetic field in a space within the elongated tube. The second electrode is disposed within the elongated tube. A voltage is configured to be applied between the first and second electrodes to generate an electric field between the first and second electrodes.

公开(公告)号：US20200279723A1

公开(公告)日：2020-09-03

申请号：US16645512

申请日：2018-09-11

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

Inventor： Jianwei Chai ,  Shijie Wang ,  Dongzhi Chi ,  Ming Yang

IPC: H01J37/34 ,  H01J37/32 ,  C23C14/34 ,  C23C14/35

Abstract: A sputtering system and a sputtering method are provided. The sputtering system includes a first electrode, a magnet and a second electrode. The first electrode is an elongated tube having a first end and a second end downstream of the first end. The first end is configured to receive a gas flow and the second end is placed next to a substrate. The magnet surrounds at least a portion of the elongated tube and is configured to generate a magnetic field in a space within the elongated tube. The second electrode is disposed within the elongated tube. A voltage is configured to be applied between the first and second electrodes to generate an electric field between the first and second electrodes.