Liquid ejection head and manufacturing method thereof
    1.
    发明授权
    Liquid ejection head and manufacturing method thereof 有权
    液体喷射头及其制造方法

    公开(公告)号:US08191260B2

    公开(公告)日:2012-06-05

    申请号:US12400440

    申请日:2009-03-09

    IPC分类号: B21D53/76 B23P17/00 B41J2/135

    摘要: A manufacturing method of a liquid ejection head includes forming on a substrate a first flow passage wall forming member contacting a solid layer of equal height, exposing a first layer of a negative photosensitive resin material to form an ejection outlet forming member; exposing a second layer, on the first layer, of a negative photosensitive resin material to form a second flow passage wall forming member for forming another part of the wall of the flow passage; placing the exposed first and second layers on the solid layer and the first flow passage wall forming member so that a non-exposed portion of the second layer contacts the solid layer; forming parts of the flow passage and the ejection outlet by removing non-exposed portions of the first and second layers above the substrate; and forming the flow passage by removing the solid layer.

    摘要翻译: 液体喷射头的制造方法包括在基板上形成与等高的固体层接触的第一流路壁形成部件,暴露第一层的负型感光性树脂材料,形成喷出口形成部件; 在第一层上暴露第二层为负的感光性树脂材料,以形成用于形成流路的壁的另一部分的第二流路壁形成部件; 将暴露的第一和第二层放置在固体层和第一流动通道壁形成构件上,使得第二层的未暴露部分接触固体层; 通过去除衬底上方的第一和第二层的未暴露部分来形成流动通道和喷射出口的部分; 并通过去除固体层形成流动通道。

    MANUFACTURING METHOD OF LIQUID EJECTION HEAD
    2.
    发明申请
    MANUFACTURING METHOD OF LIQUID EJECTION HEAD 审中-公开
    液体喷射头的制造方法

    公开(公告)号:US20090136875A1

    公开(公告)日:2009-05-28

    申请号:US12268740

    申请日:2008-11-11

    IPC分类号: G03F7/20

    摘要: A manufacturing method of a liquid ejection head including an ejection outlet forming member provided with an ejection outlet for ejecting liquid and a flow passage communicating with the ejection outlet is constituted by the steps of: preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing a first layer, on the solid layer and the flow passage wall forming member, formed of a negative photosensitive resin material for forming another part of the wall of the flow passage; exposing to light a portion of the first layer correspondingly to the another part of the wall of the flow passage; providing a second layer, on the exposed first layer, formed of a negative photosensitive resin material to constitute the ejection outlet forming member; exposing to light a portion of the second layer correspondingly to the ejection outlet forming member; and forming the ejection outlet and another part of the flow passage by removing unexposed portions of the first layer and the second layer.

    摘要翻译: 一种液体喷射头的制造方法,包括:喷射出口形成部件,其设置有用于喷射液体的喷射出口和与喷射口连通的流动通道的步骤包括:准备基板,在该基板上形成流路壁形成部件, 形成流路的壁的一部分,并且具有所述流路的一部分形状的固体层彼此接触,其中所述流路壁形成构件具有与所述基板的表面基本相等的高度 的固体层; 在固体层和流路壁形成构件上形成由用于形成流路的壁的另一部分的负型感光性树脂材料形成的第一层; 相对于流动通道的壁的另一部分暴露于第一层的一部分; 在暴露的第一层上形成第二层,由负性感光树脂材料形成以构成喷射出口形成部件; 对应于喷射出口形成构件暴露第二层的一部分; 以及通过去除第一层和第二层的未曝光部分而形成喷射出口和流动通道的另一部分。

    Manufacturing method of liquid ejection head
    3.
    发明授权
    Manufacturing method of liquid ejection head 有权
    液体喷头的制造方法

    公开(公告)号:US08613141B2

    公开(公告)日:2013-12-24

    申请号:US12268760

    申请日:2008-11-11

    IPC分类号: B41J2/16 B21D53/76

    摘要: A manufacturing method of a liquid ejection head provided with a flow passage communicating with an ejection outlet for ejecting liquid includes steps of preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing on the solid layer a pattern having a shape of another part of the flow passage; providing a coating layer, for forming another part of the wall of the flow passage, so as to coat the pattern; providing the ejection outlet to the coating layer; and forming the flow passage by removing the solid layer and the pattern.

    摘要翻译: 具有与用于喷射液体的喷射口连通的流路的液体喷射头的制造方法包括准备基板的步骤,在基板上形成用于形成流路的壁的一部分的流路壁形成部件和固体层 具有所述流路的一部分的形状彼此接触,其中,所述流路壁形成部件具有与所述基板的表面大致相等的所述固体层的高度; 在所述固体层上提供具有所述流路的另一部分的形状的图案; 提供用于形成流路的壁的另一部分以涂覆图案的涂层; 向喷涂层提供喷射出口; 并通过去除固体层和图案形成流动通道。

    LIQUID EJECTION HEAD AND MANUFACTURING METHOD THEREOF
    4.
    发明申请
    LIQUID EJECTION HEAD AND MANUFACTURING METHOD THEREOF 有权
    液体喷射头及其制造方法

    公开(公告)号:US20090229125A1

    公开(公告)日:2009-09-17

    申请号:US12400440

    申请日:2009-03-09

    IPC分类号: B21D53/76

    摘要: A manufacturing method of a liquid ejection head including an ejection outlet forming member provided with an ejection outlet for ejecting liquid and including a flow passage communicating with the ejection outlet is provided. The manufacturing method includes preparing a substrate on which a first flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the first flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing a first layer formed of a negative photosensitive resin material; exposing to light a portion of the first layer for constituting the ejection outlet forming member; providing a second layer, on the first layer, formed of a negative photosensitive resin material; exposing to light a portion of the second layer for constituting a second flow passage wall forming member for forming another part of the wall of the flow passage; placing the exposed first layer and the exposed second layer on the solid layer and the first flow passage wall forming member so that a non-exposed portion of the second layer contacts the solid layer; forming a part of the flow passage and the ejection outlet by removing a non-exposed portion of the first layer and the non-exposed portion of the second layer above the substrate; and forming the flow passage by removing the solid layer.

    摘要翻译: 提供了一种液体喷射头的制造方法,该液体喷射头包括具有用于喷射液体的喷射出口并且包括与喷射口连通的流动通道的喷射出口形成部件。 该制造方法包括:准备基板,在基板上形成有形成流路的壁的一部分的第一流路壁形成部件和流路的一部分的形状的固体层彼此接触,其中,第一流路 壁形成构件具有与基底表面大致相等的固体层的高度; 提供由负性感光性树脂材料形成的第一层; 暴露于构成喷射出口形成构件的第一层的一部分; 在第一层上形成第二层,由负的感光性树脂材料形成; 暴露于第二层的一部分,用于构成用于形成流道的壁的另一部分的第二流动通道壁形成构件; 将暴露的第一层和暴露的第二层放置在固体层和第一流路壁形成构件上,使得第二层的未暴露部分接触固体层; 通过去除衬底上方的第一层的未暴露部分和第二层的未暴露部分来形成流动通道和喷射出口的一部分; 并通过去除固体层形成流动通道。

    MANUFACTURING METHOD OF LIQUID EJECTION HEAD
    5.
    发明申请
    MANUFACTURING METHOD OF LIQUID EJECTION HEAD 有权
    液体喷射头的制造方法

    公开(公告)号:US20090133256A1

    公开(公告)日:2009-05-28

    申请号:US12268760

    申请日:2008-11-11

    IPC分类号: B21D53/00

    摘要: A manufacturing method of a liquid ejection head provided with a flow passage communicating with an ejection outlet for ejecting liquid includes steps of preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing on the solid layer a pattern having a shape of another part of the flow passage; providing a coating layer, for forming another part of the wall of the flow passage, so as to coat the pattern; providing the ejection outlet to the coating layer; and forming the flow passage by removing the solid layer and the pattern.

    摘要翻译: 具有与用于喷射液体的喷射口连通的流路的液体喷射头的制造方法包括准备基板的步骤,在基板上形成用于形成流路的壁的一部分的流路壁形成部件和固体层 具有所述流路的一部分的形状彼此接触,其中,所述流路壁形成部件具有与所述基板的表面大致相等的所述固体层的高度; 在所述固体层上提供具有所述流路的另一部分的形状的图案; 提供用于形成流路的壁的另一部分以涂覆图案的涂层; 向喷涂层提供喷射出口; 并通过去除固体层和图案形成流动通道。

    Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
    8.
    发明申请
    Liquid discharge head manufacturing method, and liquid discharge head obtained using this method 有权
    液体排出头的制造方法以及使用该方法得到的排液头

    公开(公告)号:US20060277755A1

    公开(公告)日:2006-12-14

    申请号:US10565658

    申请日:2005-06-27

    IPC分类号: B21D53/76

    摘要: According to the present invention, a method for manufacturing a liquid discharge head includes the steps of: forming a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid; forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer; forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer deposited on the solid layer; and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer are formed contains a copolymer of methacrylic acid and methacrylate ester.

    摘要翻译: 根据本发明,液体排出头的制造方法包括以下步骤:在其上布置能量产生元件以产生用于排出液体的能量的基板上形成用于形成流路的固体层; 在固体固体层的基板上形成用于涂覆固体层的涂层; 形成用于通过光刻工艺在沉积在固体层上的涂层中排出液体的排出口; 并且除去固体层以形成与能量元件和排出口连通的流路,由此用于涂层的材料含有阳离子可聚合化合物,阳离子光聚合引发剂和阳离子光聚合抑制剂, 与形成涂层的排出口的部分形成边界的固体层包含甲基丙烯酸和甲基丙烯酸酯的共聚物。

    Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
    10.
    发明授权
    Liquid discharge head manufacturing method, and liquid discharge head obtained using this method 有权
    液体排出头的制造方法以及使用该方法得到的排液头

    公开(公告)号:US08227043B2

    公开(公告)日:2012-07-24

    申请号:US10565658

    申请日:2005-06-27

    IPC分类号: B05D1/36 B05D7/00

    摘要: A method for manufacturing a liquid discharge head includes the steps of: forming a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid; forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer; forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer deposited on the solid layer; and removing the solid layer to form a flow path that communicates with the energy element and the discharge port. A material used for the coating layer contains a cationically polymerizable chemical compound, a cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic acid and methacrylate ester.

    摘要翻译: 一种液体排出头的制造方法,其特征在于,包括以下步骤:在基板上形成固体层,所述基板上配置能量产生元件,以产生用于排出液体的能量; 在固体固体层的基板上形成用于涂覆固体层的涂层; 形成用于通过光刻工艺在沉积在固体层上的涂层中排出液体的排出口; 并且去除固体层以形成与能量元件和排出口连通的流路。 用于涂层的材料包含阳离子可聚合化合物,阳离子光聚合引发剂和阳离子光聚合抑制剂,并且与形成涂层的排出口的部分形成边界的固体层的材料包含 甲基丙烯酸和甲基丙烯酸酯的共聚物。