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公开(公告)号：US07604353B2
公开(公告)日：2009-10-20
申请号：US11958725
申请日：2007-12-18
申请人： Akihiro Koga , Masayuki Sekimura , Kei Masunishi , Akio Kobayashi , Hiroyuki Kawashima , Hirotake Maruyama
发明人： Akihiro Koga , Masayuki Sekimura , Kei Masunishi , Akio Kobayashi , Hiroyuki Kawashima , Hirotake Maruyama
CPC分类号： A61B3/12 , G02B26/0825
摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.
摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的第一绝缘膜; 设置在所述支撑构件的第二面上的第二绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相对的面上具有反射部分，并且支撑部件设置在基板上，夹着电极膜，第一绝缘膜和间隔物。
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公开(公告)号：US20080204661A1
公开(公告)日：2008-08-28
申请号：US11955044
申请日：2007-12-12
申请人： Akihiro Koga , Masayuki Sekimura , Kei Masunishi , Akio Kobayashi , Hiroyuki Kawashima , Hirotake Maruyama
发明人： Akihiro Koga , Masayuki Sekimura , Kei Masunishi , Akio Kobayashi , Hiroyuki Kawashima , Hirotake Maruyama
CPC分类号： A61B3/12 , A61B3/0091 , A61B3/1015 , A61B3/152 , G02B26/0841
摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided around the opening on the first face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite to the electrodes.
摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的所述开口周围的第一绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相反的面上具有反射部。
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公开(公告)号：US20080180634A1
公开(公告)日：2008-07-31
申请号：US11958725
申请日：2007-12-18
申请人： Akihiro Koga , Masayuki Sekimura , Kei Masunishi , Akio Kobayashi , Hiroyuki Kawashima , Hirotake Maruyama
发明人： Akihiro Koga , Masayuki Sekimura , Kei Masunishi , Akio Kobayashi , Hiroyuki Kawashima , Hirotake Maruyama
CPC分类号： A61B3/12 , G02B26/0825
摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.
摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的第一绝缘膜; 设置在所述支撑构件的第二面上的第二绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相对的面上具有反射部分，并且支撑部件设置在基板上，夹着电极膜，第一绝缘膜和间隔物。
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4.发明授权Electrostatic actuator including a switching circuit which selectively sets one of a moving mode and first and second holding modes and driving method therefor 失效该静电致动器包括选择性地设置移动模式和第一和第二保持模式之一的开关电路及其驱动方法公开(公告)号：US07482728B2
公开(公告)日：2009-01-27
申请号：US11233091
申请日：2005-09-23
CPC分类号： H02N1/004 , H04N5/23287
摘要： The present invention provides an electrostatic actuator having a small power consumption and also provides a driving method thereof. The electrostatic actuator comprises first and second substrates having first and second stator electrodes formed thereon, respectively, and a movable section arranged between the first and second stator electrodes. The movable section has first and second surfaces that are positioned to face the first and second stator electrodes, respectively. In first and second moving modes, the movable section is slightly moved between the first and second substrates in response to the signal voltage from the driving circuit. Also, in the holding mode, the movable section is held by one of the first and second stator electrodes and, under this condition, at least one of the stator electrode holding the movable section and the movable section held by the stator electrode is left electrically floating.
摘要翻译： 本发明提供了具有小功耗的静电致动器，并且还提供了其驱动方法。 静电致动器包括分别形成有第一和第二定子电极的第一和第二基板以及布置在第一和第二定子电极之间的可动部分。 可移动部分具有分别定位成面对第一和第二定子电极的第一和第二表面。 在第一和第二移动模式中，响应于来自驱动电路的信号电压，可移动部分在第一和第二基板之间稍微移动。 此外，在保持模式中，可移动部分由第一和第二定子电极中的一个保持，并且在该状态下，将保持可动部分的定子电极和由定子电极保持的可动部分中的至少一个保持电 浮动
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公开(公告)号：US06806661B2
公开(公告)日：2004-10-19
申请号：US10619500
申请日：2003-07-16
IPC分类号： H02N100
CPC分类号： H02N1/004
摘要： A first stator is provided with stator electrodes sequentially arranged in a predetermined direction. An extended electrode is mounted on a second stator arranged to face the first stator. A slider is movably arranged between the first and second stators. The slider is provided with a large number of slider electrodes arranged to face the stator electrodes and a second slider electrode facing the extended electrode. The slider electrodes are maintained at the ground potential. A first and second driving voltage are periodically applied to the stator electrodes and to the extended electrode, respectively, which are opposite to each other in phase and are periodically switched between the ground potential and the positive driving voltage. Thus, the slider is moved in a direction while being vibrated.
摘要翻译： 第一定子设置有沿预定方向依次布置的定子电极。 延伸电极安装在布置成面对第一定子的第二定子上。 滑动件可移动地布置在第一和第二定子之间。 滑块设置有大量与定子电极相对布置的滑块电极和面向延伸电极的第二滑块电极。 滑块电极保持接地电位。 周期性地将第一和第二驱动电压施加到相位相对的定子电极和延伸电极，并且在接地电位和正驱动电压之间周期性地切换。 因此，滑块在被振动的同时移动。
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公开(公告)号：US06784594B2
公开(公告)日：2004-08-31
申请号：US10619569
申请日：2003-07-16
IPC分类号： H02N100
CPC分类号： H02N1/004
摘要： A first stator is provided with stator electrodes sequentially arranged in a predetermined direction. An extended electrode is mounted on a second stator arranged to face the first stator. A slider is movably arranged between the first and second stators. The slider is provided with a large number of slider electrodes arranged to face the stator electrodes and a second slider electrode facing the extended electrode. The slider electrodes are maintained at the ground potential. A first and second driving voltage are periodically applied to the stator electrodes and to the extended electrode, respectively, which are opposite to each other in phase and are periodically switched between the ground potential and the positive driving voltage. Thus, the slider is moved in a direction while being vibrated.
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公开(公告)号：US20060097672A1
公开(公告)日：2006-05-11
申请号：US11233091
申请日：2005-09-23
IPC分类号： H01L41/04
CPC分类号： H02N1/004 , H04N5/23287
摘要： The present invention provides an electrostatic actuator having a small power consumption and also provides a driving method thereof. The electrostatic actuator comprises first and second substrates having first and second stator electrodes formed thereon, respectively, and a movable section arranged between the first and second stator electrodes. The movable section has first and second surfaces that are positioned to face the first and second stator electrodes, respectively. In first and second moving modes, the movable section is slightly moved between the first and second substrates in response to the signal voltage from the driving circuit. Also, in the holding mode, the movable section is held by one of the first and second stator electrodes and, under this condition, at least one of the stator electrode holding the movable section and the movable section held by the stator electrode is left electrically floating.
摘要翻译： 本发明提供了具有小功耗的静电致动器，并且还提供了其驱动方法。 静电致动器包括分别形成有第一和第二定子电极的第一和第二基板以及布置在第一和第二定子电极之间的可动部分。 可移动部分具有分别定位成面对第一和第二定子电极的第一和第二表面。 在第一和第二移动模式中，响应于来自驱动电路的信号电压，可移动部分在第一和第二基板之间稍微移动。 此外，在保持模式中，可移动部分由第一和第二定子电极中的一个保持，并且在该状态下，将保持可动部分的定子电极和由定子电极保持的可动部分中的至少一个保持电 浮动
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公开(公告)号：US06670738B2
公开(公告)日：2003-12-30
申请号：US09818840
申请日：2001-03-28
IPC分类号： H02N100
CPC分类号： H02N1/004
摘要： A first stator is provided with stator electrodes sequentially arranged in a predetermined direction. An extended electrode is mounted on a second stator arranged to face the first stator. A slider is movably arranged between the first and second stators. The slider is provided with a large number of slider electrodes arranged to face the stator electrodes and a second slider electrode facing the extended electrode. The slider electrodes are maintained at the ground potential. A first and second driving voltage are periodically applied to the stator electrodes and to the extended electrode, respectively, which are opposite to each other in phase and are periodically switched between the ground potential and the positive driving voltage. Thus, the slider is moved in a direction while being vibrated.
摘要翻译： 第一定子设置有沿预定方向依次布置的定子电极。 延伸电极安装在布置成面对第一定子的第二定子上。 滑动件可移动地布置在第一和第二定子之间。 滑块设置有大量与定子电极相对布置的滑块电极和面向延伸电极的第二滑块电极。 滑块电极保持接地电位。 周期性地将第一和第二驱动电压施加到相位相对的定子电极和延伸电极，并在接地电位和正驱动电压之间周期性地切换。 因此，滑块在被振动的同时移动。
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公开(公告)号：US06633531B1
公开(公告)日：2003-10-14
申请号：US09635682
申请日：2000-08-10
申请人： Mastoshi Hirono , Masayuki Sekimura , Makoto Asakura , Yoriyuki Ishibashi , Takao Ohmi , Yasuo Motegi , Minoru Yonezawa
发明人： Mastoshi Hirono , Masayuki Sekimura , Makoto Asakura , Yoriyuki Ishibashi , Takao Ohmi , Yasuo Motegi , Minoru Yonezawa
IPC分类号： G11B700
CPC分类号： G11B7/1387 , G11B7/08 , G11B7/08576 , G11B7/1374 , G11B2007/13725
摘要： An optical disk drive having an optical disk that permits transmission of a laser beam, an optical disk holding mechanism configured to rotatably support the optical disk, a first laser beam irradiation mechanism disposed on one side of the optical disk, causing the first laser beam to be vertically incident on one surface of the optical disk, and a first evanescent optical system disposed on the other side of the optical disk. The first evanescent optical system is configured to receive the first laser beam which emanates from the laser beam irradiation mechanism and passes through the optical disk, and radiate the first evanescent wave to the other surface of the optical disk having at least one recording surface.
摘要翻译： 一种光盘驱动器，具有允许激光束传输的光盘，配置为可旋转地支撑光盘的光盘保持机构，设置在光盘一侧的第一激光束照射机构，使第一激光束 垂直入射在光盘的一个表面上，并且第一瞬逝光学系统设置在光盘的另一侧。 第一瞬逝光学系统被配置为接收从激光束照射机构发出并穿过光盘的第一激光束，并且将第一瞬逝波辐射到具有至少一个记录表面的光盘的另一个表面。 / PTEXT>
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公开(公告)号：US5956194A
公开(公告)日：1999-09-21
申请号：US933866
申请日：1997-09-19
IPC分类号： G11B20/10 , G06F1/00 , G06F21/02 , G11B5/54 , G11B19/04 , G11B19/10 , G11B20/00 , G11B23/03 , G11B23/28 , G11B25/04 , G11B33/08 , G11B15/04
CPC分类号： G11B19/04 , G11B23/286 , G11B23/287 , G11B25/043 , G11B33/08 , G11B20/00086 , G11B23/0303 , G11B5/54
摘要： A data storage apparatus (HDD unit) having a cartridge, attachable to and detachable from a personal computer, incorporating a recording disk, comprises a switch circuit for inhibiting data reading and writing with respect to a magnetic disk and a locking mechanism for detecting that the cartridge is detached from the personal computer and causing a data reading and writing inhibiting device to operate in response to the detection.
摘要翻译： 一种数据存储装置（HDD单元），其具有可附接到个人计算机并且可拆卸的盒式磁带，包括记录盘，包括用于禁止关于磁盘的数据读取和写入的开关电路和用于检测 墨盒与个人计算机分离，并导致数据读写禁止装置响应于检测而操作。
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