公开(公告)号：US07604353B2

公开(公告)日：2009-10-20

申请号：US11958725

申请日：2007-12-18

申请人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

发明人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

IPC分类号： A61B3/10 ,  G02B7/188 ,  G02B26/00

CPC分类号： A61B3/12 ,  G02B26/0825

摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.

摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的第一绝缘膜; 设置在所述支撑构件的第二面上的第二绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相对的面上具有反射部分，并且支撑部件设置在基板上，夹着电极膜，第一绝缘膜和间隔物。

公开(公告)号：US20080204661A1

公开(公告)日：2008-08-28

申请号：US11955044

申请日：2007-12-12

申请人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

发明人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

IPC分类号： A61B3/10 ,  G02B7/188

CPC分类号： A61B3/12 ,  A61B3/0091 ,  A61B3/1015 ,  A61B3/152 ,  G02B26/0841

摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided around the opening on the first face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite to the electrodes.

摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的所述开口周围的第一绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相反的面上具有反射部。

公开(公告)号：US20080180634A1

公开(公告)日：2008-07-31

申请号：US11958725

申请日：2007-12-18

申请人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

发明人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

IPC分类号： A61B3/10 ,  G02B7/188

CPC分类号： A61B3/12 ,  G02B26/0825

摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.

摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的第一绝缘膜; 设置在所述支撑构件的第二面上的第二绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相对的面上具有反射部分，并且支撑部件设置在基板上，夹着电极膜，第一绝缘膜和间隔物。

公开(公告)号：US20080239528A1

公开(公告)日：2008-10-02

申请号：US12032871

申请日：2008-02-18

申请人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Tetsuya Kugimiya ,  Akio Kobayashi ,  Hiroyuki Kawashima

发明人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Tetsuya Kugimiya ,  Akio Kobayashi ,  Hiroyuki Kawashima

IPC分类号： G02B26/00

CPC分类号： G02B26/0825

摘要： It is made possible to provide a deformable mirror apparatus which is deformable to a complicated shape (high-order shape). A deformable mirror apparatus includes: a substrate; a plurality of electrodes provided on the substrate; a spacer fixed above the substrate, having a first opening passing through from a first face of the spacer facing to the substrate to a second face of the spacer facing opposite from the first face, surrounding the electrodes, and having a step on the second face; a drive part including a membrane part disposed so as to cover the step of the spacer and so as to be opposed to the electrodes, a casing part having an opening at a bottom face of which the membrane part is exposed and supporting the membrane part, and a reflection film provided on the membrane part; and a voltage generator configured to generate predetermined voltage patterns on the electrodes, respectively.

摘要翻译： 可以提供可变形为复杂形状（高阶形状）的可变形反射镜装置。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 固定在所述基板上方的间隔件，具有第一开口，所述第一开口从所述间隔件的面向所述基板的第一面穿过所述间隔件的与所述第一面相反的第二面，所述第二面围绕所述电极，并且在所述第二面上具有台阶 ; 驱动部，其具有设置成覆盖所述间隔件的台阶并且与所述电极相对的膜部;壳体部，其在所述膜部露出并支撑所述膜部的底面具有开口部， 以及设置在所述膜部上的反射膜; 以及电压发生器，其被配置为分别在所述电极上产生预定的电压图案。

公开(公告)号：US07682030B2

公开(公告)日：2010-03-23

申请号：US12032871

申请日：2008-02-18

申请人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Tetsuya Kugimiya ,  Akio Kobayashi ,  Hiroyuki Kawashima

发明人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Tetsuya Kugimiya ,  Akio Kobayashi ,  Hiroyuki Kawashima

IPC分类号： G02B7/188 ,  G02B26/00 ,  G02B26/08

CPC分类号： G02B26/0825

摘要： It is made possible to provide a deformable mirror apparatus which is deformable to a complicated shape (high-order shape). A deformable mirror apparatus includes: a substrate; a plurality of electrodes provided on the substrate; a spacer fixed above the substrate, having a first opening passing through from a first face of the spacer facing to the substrate to a second face of the spacer facing opposite from the first face, surrounding the electrodes, and having a step on the second face; a drive part including a membrane part disposed so as to cover the step of the spacer and so as to be opposed to the electrodes, a casing part having an opening at a bottom face of which the membrane part is exposed and supporting the membrane part, and a reflection film provided on the membrane part; and a voltage generator configured to generate predetermined voltage patterns on the electrodes, respectively.

摘要翻译： 可以提供可变形为复杂形状（高阶形状）的可变形反射镜装置。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 固定在所述基板上方的间隔件，具有第一开口，所述第一开口从所述间隔件的面向所述基板的第一面穿过所述间隔件的与所述第一面相反的第二面，所述第二面围绕所述电极，并且在所述第二面上具有台阶 ; 驱动部，其具有设置成覆盖所述间隔件的台阶并且与所述电极相对的膜部;壳体部，其在所述膜部露出并支撑所述膜部的底面具有开口部， 以及设置在所述膜部上的反射膜; 以及电压发生器，其被配置为分别在所述电极上产生预定的电压图案。

公开(公告)号：US20090051874A1

公开(公告)日：2009-02-26

申请号：US12188018

申请日：2008-08-07

申请人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

发明人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

IPC分类号： A61B3/10 ,  G02B7/188

CPC分类号： A61B3/12 ,  G02B26/06

摘要： A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening; and a plurality of through holes passing through the reflection film and the deformable electrode film and disposed so as to overlap the opening.

摘要翻译： 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，设置在所述间隔件上方，并且具有从所述支撑构件的面向所述基板的第一面穿过到与所述第一面相对的所述支撑构件的第二面的开口; 可变电极膜，形成在所述支撑构件的所述第一面的下方，以与所述电极相对并且覆盖所述开口; 设置在所述可变形电极膜和所述支撑构件之间的绝缘膜; 反射膜，设置在与电极相对的可变形电极膜的表面上以与开口重叠; 以及穿过反射膜和可变形电极膜并且设置成与开口重叠的多个通孔。

公开(公告)号：US07744220B2

公开(公告)日：2010-06-29

申请号：US12186142

申请日：2008-08-05

申请人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

发明人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

IPC分类号： A61B3/10 ,  G02B26/00 ,  G02B5/08

CPC分类号： G02B26/0825 ,  A61B3/10

摘要： A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; and a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening. The electrodes are electrically insulated each other by a plurality of grooves radially extending from a region which includes a position corresponding to a center of the opening.

摘要翻译： 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，设置在所述间隔件上方，并且具有从所述支撑构件的面向所述基板的第一面穿过到与所述第一面相对的所述支撑构件的第二面的开口; 可变电极膜，形成在所述支撑构件的所述第一面的下方，以与所述电极相对并且覆盖所述开口; 设置在所述可变形电极膜和所述支撑构件之间的绝缘膜; 以及反射膜，设置在与电极相对的可变形电极膜的表面上以与开口重叠。 电极通过从包括与开口的中心对应的位置的区域径向延伸的多个槽电绝缘。

公开(公告)号：US07740357B2

公开(公告)日：2010-06-22

申请号：US12188018

申请日：2008-08-07

申请人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

发明人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

IPC分类号： A61B3/10 ,  G02B5/08

CPC分类号： A61B3/12 ,  G02B26/06

摘要： A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening; and a plurality of through holes passing through the reflection film and the deformable electrode film and disposed so as to overlap the opening.

摘要翻译： 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，设置在所述间隔件上方，并且具有从所述支撑构件的面向所述基板的第一面穿过到与所述第一面相对的所述支撑构件的第二面的开口; 可变电极膜，形成在所述支撑构件的所述第一面的下方，以与所述电极相对并且覆盖所述开口; 设置在所述可变形电极膜和所述支撑构件之间的绝缘膜; 反射膜，设置在与电极相对的可变形电极膜的表面上以与开口重叠; 以及穿过反射膜和可变形电极膜并且设置成与开口重叠的多个通孔。

公开(公告)号：US20090161119A1

公开(公告)日：2009-06-25

申请号：US12065872

申请日：2006-09-01

申请人： Hiroyuki Kawashima ,  Makoto Fujino ,  Yoshiaki Goto ,  Michiko Nakanishi ,  Hirotake Maruyama ,  Akio Kobayashi

发明人： Hiroyuki Kawashima ,  Makoto Fujino ,  Yoshiaki Goto ,  Michiko Nakanishi ,  Hirotake Maruyama ,  Akio Kobayashi

IPC分类号： G01B11/14 ,  G02B26/08 ,  G02B5/18

CPC分类号： G02B27/0977 ,  G01S7/4818 ,  G01S17/325 ,  G02B6/3516 ,  G02B6/3558 ,  G02B6/357 ,  G02B6/3594 ,  G02B26/0841 ,  G02B27/0933 ,  G02B27/0944

摘要： For the purpose of mixing laser light (P0) from a laser light source (18), the laser light (P0) is made incident on a first end surface of an optical fiber (24), and is emitted from a second end surface of the optical fiber (24). Subsequently, laser light (P1) emitted from the second end surface of the optical fiber (24) is made incident on a first end surface of an optical fiber (28), and is emitted from a second end surface of the optical fiber (28). A swinging micro-electromechanical system (27) having a mirror plate (27a) is interposed between the second end surface of the optical fiber (24) and the first end surface of the optical fiber (28). Thus, the mirror plate (27a) is swung, and a laser beam (P4) is thereby shifted and mixed.

摘要翻译： 为了将来自激光光源（18）的激光（P0）混合，使激光（P0）入射到光纤（24）的第一端面上，并从第二端面 光纤（24）。 随后，从光纤（24）的第二端面发射的激光（P1）入射到光纤（28）的第一端面上，并从光纤（28）的第二端面发射 ）。 在光纤（24）的第二端面与光纤（28）的第一端面之间插入具有镜板（27a）的摆动微机电系统（27）。 因此，镜板（27a）摆动，并且激光束（P4）由此移位并混合。

公开(公告)号：US07537341B2

公开(公告)日：2009-05-26

申请号：US12048095

申请日：2008-03-13

申请人： Noriko Saito ,  Akio Kobayashi ,  Hiroyuki Kawashima

发明人： Noriko Saito ,  Akio Kobayashi ,  Hiroyuki Kawashima

IPC分类号： A61B3/10 ,  A61B3/14 ,  A61B3/00

CPC分类号： G02B26/06 ,  A61B3/1015 ,  A61B3/14 ,  G02B26/0825

摘要： A wavefront aberration compensating apparatus, which includes: a deformable mirror having electrodes and a thin-film mirror; an optical system provided with the deformable mirror and including an object; a wavefront sensor which measures a wavefront aberration of a light flux; and a controller configured to: calculate a first voltage value applied to each of the electrodes, on the basis of differences between application points on the thin-film mirror and target points both corresponding to the electrodes respectively; determine a superposition amplitude value of each expansion mode according to a polynomial of wavefront aberration, and calculate a second voltage value applied to each of the electrodes by using voltage templates previously stored, such that the wavefront aberration obtained by the wavefront sensor becomes a desired aberration; determine the voltage value applied to each of the electrodes, by mainly using the second voltage value in an initial stage of compensation of the configuration of the thin-film mirror and by mainly using the first voltage value in an end stage of the compensation; and repeat the compensation on the basis of the determined voltage value, such that the wavefront aberration of the light flux is suppressed.

摘要翻译： 一种波前像差补偿装置，包括：具有电极和薄膜反射镜的可变形反射镜; 设置有可变形反射镜并包括物体的光学系统; 测量光通量的波前像差的波前传感器; 以及控制器，其被配置为：基于薄膜反射镜上的应用点和分别对应于电极的目标点​​之间的差异来计算施加到每个电极的第一电压值; 根据波前像差的多项式确定每个扩展模式的叠加振幅值，并且通过使用预先存储的电压模板来计算施加到每个电极的第二电压值，使得由波前传感器获得的波前像差成为期望的像差 ; 通过在补偿薄膜反射镜的构造的初始阶段主要使用第二电压值，并且主要在补偿的最后阶段使用第一电压值来确定施加到每个电极的电压值; 并根据确定的电压值重复补偿，从而抑制光通量的波前像差。