公开(公告)号：US20110101503A1

公开(公告)日：2011-05-05

申请号：US12521438

申请日：2007-12-20

申请人： Akinori Uno ,  Yoshiyasu Kubo ,  Yusuke Sasaki ,  Mineko Horibe ,  Yukihiro Kaneko ,  Minoru Tamura ,  Shinichiro Kabashima ,  Yuko Tanaka ,  Kaoru Suzuki

发明人： Akinori Uno ,  Yoshiyasu Kubo ,  Yusuke Sasaki ,  Mineko Horibe ,  Yukihiro Kaneko ,  Minoru Tamura ,  Shinichiro Kabashima ,  Yuko Tanaka ,  Kaoru Suzuki

IPC分类号： H01L29/06 ,  C08F8/00 ,  C08F2/04 ,  H01L21/30

CPC分类号： G03F7/0392 ,  C08F6/02 ,  C08F12/18 ,  C08F12/22 ,  C08F212/14 ,  C08F220/06 ,  C08F293/005 ,  C08F2220/1825 ,  C08F2438/01 ,  C08G83/005

摘要： A hyperbranched polymer synthesizing method employs living radical polymerization of a monomer in the presence of a metal catalyst. The method includes forming a shell portion by introducing an acid-decomposable group to a core portion formed of a hyperbranched polymer synthesized by living radical polymerization; forming an acid group by partially decomposing the acid-decomposable group by an acid catalyst; precipitating a core-shell hyperbranched polymer contained in a first solution and having the acid group, by mixing the first solution with ultrapure water; and extracting, from a mixed solution into an organic solvent by liquid-liquid extraction, the core-shell hyperbranched polymer having the acid group, wherein the mixed solution contains a second solution containing the core-shell hyperbranched polymer precipitated at the precipitating and dissolved into the organic solvent, and the ultrapure water of an amount yielding a prescribed ratio of the ultrapure water relative to the organic solvent in the second solution.

摘要翻译： 超支化聚合物合成方法在金属催化剂的存在下使用单体的活性自由基聚合。 该方法包括：通过将酸可分解基团引入由通过活性自由基聚合合成的超支化聚合物形成的芯部分来形成壳部分; 通过酸催化剂部分分解酸分解基团而形成酸基; 通过将第一溶液与超纯水混合，使包含在第一溶液中并具有酸基的核 - 壳超支化聚合物沉淀; 并通过液 - 液萃取从混合溶液中提取具有酸基团的核 - 壳超支化聚合物，其中所述混合溶液含有含有所述核 - 壳超支化聚合物的第二溶液沉淀并溶解于 有机溶剂和超纯水的量相对于第二溶液中的超纯水相对于有机溶剂的规定比率。

公开(公告)号：US20110198730A1

公开(公告)日：2011-08-18

申请号：US12521384

申请日：2007-12-20

申请人： Yuko Tanaka ,  Akinori Uno ,  Shinichiro Kabashima ,  Minoru Tamura ,  Yoshiyasu Kubo ,  Yusuke Sasaki ,  Mineko Horibe ,  Yukihiro Kaneko ,  Kaoru Suzuki

发明人： Yuko Tanaka ,  Akinori Uno ,  Shinichiro Kabashima ,  Minoru Tamura ,  Yoshiyasu Kubo ,  Yusuke Sasaki ,  Mineko Horibe ,  Yukihiro Kaneko ,  Kaoru Suzuki

IPC分类号： H01L29/02 ,  C08F12/18 ,  C08F257/02 ,  H01L21/302

CPC分类号： G03F7/0392 ,  C08G83/005

摘要： A method of synthesizing a hyperbranched polymer by living radical polymerization of a monomer in the presence of a metal catalyst includes at least adding a compound or setting the amount of the monomer in the living radical polymerization. The compound added is at least a compound represented by R1-A or a compound represented by R2—B—R3, where R1 denotes hydrogen, an alkyl group (1-10 carbons), aryl group (1-10 carbons), or aralkyl group (7-10 carbons), A denotes a cyano group, hydroxyl group, or nitro group, R2 and R3 denote hydrogen, alkyl groups (1-10 carbons), aryl groups (6-10 carbons), aralkyl groups (7-10 carbons), or dialkylamino groups (2-10 carbons), and B denotes a carbonyl group or sulfonyl group. Setting of the monomer amount includes setting the amount of monomer to be mixed into a reaction system at one mixing to be less than the total monomer to be mixed with the reaction system.

摘要翻译： 在金属催化剂的存在下，通过单体的活性自由基聚合合成超支化聚合物的方法包括在活性自由基聚合中至少添加化合物或设定单体的量。 所加入的化合物至少是由R1-A表示的化合物或由R2-B-R3表示的化合物，其中R1表示氢，烷基（1-10个碳），芳基（1-10个碳）或芳烷基 （7-10个碳），A表示氰基，羟基或硝基，R2和R3表示氢，烷基（1-10个碳），芳基（6-10个碳），芳烷基（7- 10个碳原子）或二烷基氨基（2-10个碳），B表示羰基或磺酰基。 单体量的设定包括在一次混合下将混合的单体的量设定为反应体系，使其小于与反应体系混合的总单体。

公开(公告)号：US20080160449A1

公开(公告)日：2008-07-03

申请号：US12069979

申请日：2008-02-12

申请人： Yoshiyasu Kubo ,  Yukihiro Kaneko ,  Kaoru Suzuki ,  Minoru Tamura ,  Mineko Horibe ,  Akinori Uno ,  Hiroo Kinoshita ,  Takeo Watanabe

发明人： Yoshiyasu Kubo ,  Yukihiro Kaneko ,  Kaoru Suzuki ,  Minoru Tamura ,  Mineko Horibe ,  Akinori Uno ,  Hiroo Kinoshita ,  Takeo Watanabe

IPC分类号： G03F7/004

CPC分类号： C08F297/00 ,  C08G83/005 ,  G03F7/0392

摘要： The present invention provides a hyperbranched polymer that is capable of being used as a polymer material for nanofabrication including lithography, has enhanced dry etching resistance, sensitivity and surface smoothness, has a core shell structure and has an acid degradable repeating unit of tert-butyl vinylbenzoate ester in a shell portion, and a resist composition containing the hyperbranched polymer.

摘要翻译： 本发明提供一种能够用作纳米加工的聚合物材料的超支化聚合物，包括光刻，具有增强的耐干蚀刻性，灵敏度和表面平滑性，具有核壳结构，并具有乙酸苯甲酸叔丁基酯的酸可降解重复单元 酯，和含有超支化聚合物的抗蚀剂组合物。