公开(公告)号：US07564888B2

公开(公告)日：2009-07-21

申请号：US11805583

申请日：2007-05-23

申请人： Alexander I. Ershov ,  James J. Ferrell ,  Thomas Hofmann ,  Daniel J. Reiley ,  Christopher R. Remen ,  Richard L. Sandstrom

发明人： Alexander I. Ershov ,  James J. Ferrell ,  Thomas Hofmann ,  Daniel J. Reiley ,  Christopher R. Remen ,  Richard L. Sandstrom

IPC分类号： H01S3/22 ,  H01S3/10

CPC分类号： H01S3/225 ,  H01S3/0057 ,  H01S3/03 ,  H01S3/034

摘要： An apparatus and method is disclosed which may comprise a high power excimer or molecular fluorine gas discharge laser DUV light source system which may comprise: a pulse stretcher which may comprise: an optical delay path mirror, an optical delay path mirror gas purging assembly which may comprise: a purging gas supply system directing purging gas across a face of the optical delay line mirror. The optical delay path mirror may comprise a plurality of optical delay path mirrors; the purging gas supply system may direct purging gas across a face of each of the plurality of optical delay line mirrors. The purging gas supply system may comprise: a purging gas supply line; a purging gas distributing and directing mechanism which may direct purging gas across the face of the respective optical delay path mirror.

摘要翻译： 公开了一种装置和方法，其可以包括高功率准分子或分子氟气体放电激光DUV光源系统，其可以包括：脉冲展宽器，其可以包括：光学延迟路径反射镜，光学延迟路径镜气体清洗组件，其可以 包括：吹扫气体供应系统，其引导净化气体穿过光学延迟线反射镜的表面。 光学延迟路径镜可以包括多个光学延迟路径镜; 净化气体供应系统可以引导净化气体穿过多个光学延迟线反射镜中的每一个的表面。 净化气体供应系统可以包括：净化气体供应管线; 吹扫气体分配和引导机构，其可以将吹扫气体引导通过相应的光学延迟路径反射镜的表面。