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1.发明授权Optical element for reflection of UV radiation, method for manufacturing the same and projection exposure apparatus comprising the same 有权用于UV辐射反射的光学元件，其制造方法和包括该光学元件的投影曝光设备公开(公告)号：US08488103B2
公开(公告)日：2013-07-16
申请号：US12780035
申请日：2010-05-14
CPC分类号： G02B5/0891 , G02B5/0833 , G03F7/70316 , G03F7/70958
摘要： An optical element (1a, 1b) for reflecting UV radiation at an operating wavelength below 250 nm, preferably at 193 nm, which has a substrate (2a, 2b), a reflective layer (3a, 3b) made of aluminum superimposed on the substrate (2a, 2b). The reflective aluminum layer (3a, 3b) is not transparent to UV radiation and is (111)-plane oriented. The reflective optical element (1a, 1b) has a reflectivity of more than 85%, preferably of more than 88%, and even more preferably of more than 92%, in a range of incident angles of at least 10°, preferably of at least 15°, at the operating wavelength. Also disclosed is an optical element having a reflective layer made from a material having a melting point higher than that of aluminum, as well as methods for producing such optical elements, and optical arrangements incorporating such optical elements.
摘要翻译： 一种用于在工作波长低于250nm（优选193nm）下反射UV辐射的光学元件（1a，1b），其具有衬底（2a，2b），叠加在衬底上的由铝制成的反射层（3a，3b） （2a，2b）。 反射铝层（3a，3b）对于紫外线辐射是不透明的，并且是（111）平面取向的。 反射光学元件（1a，1b）在入射角至少为10°的范围内具有大于85％，优选大于88％，甚至更优选大于92％的反射率，优选地为 至少15°，在工作波长。 还公开了具有由熔点高于铝的材料制成的反射层的光学元件，以及用于制造这种光学元件的方法，以及包括这种光学元件的光学装置。
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2.发明申请OPTICAL ELEMENT FOR REFLECTION OF UV RADIATION, METHOD FOR MANUFACTURING THE SAME AND PROJECTION EXPOSURE APPARATUS COMPRISING THE SAME 有权用于反射紫外线辐射的光学元件，其制造方法和包括其的投影曝光装置公开(公告)号：US20100290021A1
公开(公告)日：2010-11-18
申请号：US12780035
申请日：2010-05-14
CPC分类号： G02B5/0891 , G02B5/0833 , G03F7/70316 , G03F7/70958
摘要： An optical element (1a, 1b) for reflecting UV radiation at an operating wavelength below 250 nm, preferably at 193 nm, which has a substrate (2a, 2b), a reflective layer (3a, 3b) made of aluminum superimposed on the substrate (2a, 2b). The reflective aluminum layer (3a, 3b) is not transparent to UV radiation and is (111)-plane oriented. The reflective optical element (1a, 1b) has a reflectivity of more than 85%, preferably of more than 88%, and even more preferably of more than 92%, in a range of incident angles of at least 10°, preferably of at least 15°, at the operating wavelength. Also disclosed is an optical element having a reflective layer made from a material having a melting point higher than that of aluminum, as well as methods for producing such optical elements, and optical arrangements incorporating such optical elements.
摘要翻译： 一种用于在工作波长低于250nm（优选193nm）下反射UV辐射的光学元件（1a，1b），其具有衬底（2a，2b），叠加在衬底上的由铝制成的反射层（3a，3b） （2a，2b）。 反射铝层（3a，3b）对于紫外线辐射是不透明的，并且是（111）平面取向的。 反射光学元件（1a，1b）在入射角至少为10°的范围内具有大于85％，优选大于88％，甚至更优选大于92％的反射率，优选地为 至少15°，在工作波长。 还公开了具有由熔点高于铝的材料制成的反射层的光学元件，以及用于制造这种光学元件的方法，以及包括这种光学元件的光学装置。
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