公开(公告)号：US08207499B2

公开(公告)日：2012-06-26

申请号：US12237364

申请日：2008-09-24

Applicant: Amir Shoham ,  Benzion Sender ,  Alon Litman

Inventor： Amir Shoham ,  Benzion Sender ,  Alon Litman

IPC: H01J37/26

CPC classification number: H01J37/28 ,  G01N23/2208 ,  G01N23/2251 ,  H01J37/222 ,  H01J2237/221 ,  H01J2237/24495 ,  H01J2237/2809 ,  H01J2237/2823

Abstract: A method for imaging a surface, including scanning a first region of the surface with a primary charged particle beam at a first scan rate so as to generate a first secondary charged particle beam from the first region, and scanning a second region of the surface with the primary charged particle beam at a second scan rate faster than the first scan rate so as to generate a second secondary charged particle beam from the second region. The method also includes receiving the first secondary charged particle beam and the second secondary charged particle beam at a detector configured to generate a signal in response to the beams, and forming an image of the first and the second regions in response to the signal.

Abstract translation: 一种用于对表面进行成像的方法，包括以第一扫描速率用初级带电粒子束扫描表面的第一区域，以便产生来自第一区域的第一次级带电粒子束，以及扫描表面的第二区域， 所述初级带电粒子束以比所述第一扫描速率快的第二扫描速率，以便从所述第二区域产生第二次级带电粒子束。 该方法还包括在被配置为响应于光束产生信号的检测器处接收第一次级带电粒子束和第二次级带电粒子束，并且响应于该信号形成第一和第二区域的图像。

公开(公告)号：US20100072365A1

公开(公告)日：2010-03-25

申请号：US12237364

申请日：2008-09-24

Applicant: Amir Shoham ,  Benzion Sender ,  Alon Litman

Inventor： Amir Shoham ,  Benzion Sender ,  Alon Litman

IPC: G01N23/00

CPC classification number: H01J37/28 ,  G01N23/2208 ,  G01N23/2251 ,  H01J37/222 ,  H01J2237/221 ,  H01J2237/24495 ,  H01J2237/2809 ,  H01J2237/2823

Abstract: A method for imaging a surface, including scanning a first region of the surface with a primary charged particle beam at a first scan rate so as to generate a first secondary charged particle beam from the first region, and scanning a second region of the surface with the primary charged particle beam at a second scan rate faster than the first scan rate so as to generate a second secondary charged particle beam from the second region. The method also includes receiving the first secondary charged particle beam and the second secondary charged particle beam at a detector configured to generate a signal in response to the beams, and forming an image of the first and the second regions in response to the signal.

Abstract translation: 一种用于对表面进行成像的方法，包括以第一扫描速率用初级带电粒子束扫描表面的第一区域，以便产生来自第一区域的第一次级带电粒子束，以及扫描表面的第二区域， 所述初级带电粒子束以比所述第一扫描速率快的第二扫描速率，以便从所述第二区域产生第二次级带电粒子束。 该方法还包括在被配置为响应于光束产生信号的检测器处接收第一次级带电粒子束和第二次级带电粒子束，并且响应于该信号形成第一和第二区域的图像。

公开(公告)号：US09012875B2

公开(公告)日：2015-04-21

申请号：US14009869

申请日：2011-04-07

Applicant: Amir Shoham ,  Haim Feldman ,  Doron Shoham

Inventor： Amir Shoham ,  Haim Feldman ,  Doron Shoham

IPC: G01N21/88 ,  G01N21/33

CPC classification number: G01N21/8806 ,  G01N21/33 ,  G01N2021/8822 ,  G01N2201/0697

Abstract: A method and an inspection system that exhibiting speckle reduction characteristics includes a light source arranged to generate input light pulses, and diffuser-free speckle reduction optics that include a beam splitter, for splitting an input light pulse from the light source into multiple light pulses that are oriented at angles in relation to each other when exiting the beam splitter, and at least one optical element for directing the multiple light pulses to impinge on an inspected object at different angles.

Abstract translation: 具有斑点减少特性的方法和检查系统包括布置成产生输入光脉冲的光源和包括分束器的无漫射器散斑光学器件，用于将来自光源的输入光脉冲分成多个光脉冲， 在离开分束器时相对于彼此的角度定向，并且至少一个光学元件用于引导多个光脉冲以不同的角度撞击在被检查物体上。

公开(公告)号：US07764426B2

公开(公告)日：2010-07-27

申请号：US10552047

申请日：2004-04-04

Applicant: Stephen Geoffrey Lipson ,  Amir Shoham

Inventor： Stephen Geoffrey Lipson ,  Amir Shoham

IPC: G02B5/30

CPC classification number: G02B27/286 ,  Y10S359/90

Abstract: An apparatus for providing a light beam with spatially varying polarization. The apparatus includes: two circumferentially curved reflectors positioned substantially opposite each other, a polarizer positioned in an optical path between the two reflectors, for polarizing light reflected from one reflector before it reaches the other. A non-polarized light beam incident along a given axis on one of the reflectors is radially reflected off that reflector, acquires predetermined polarization from the polarizer and is then reflected off the second reflector to a light beam of spatially varying polarization.

Abstract translation: 一种用于提供具有空间变化的偏振的光束的装置。 该装置包括：两个周向弯曲的反射器，其基本上彼此相对地定位，位于两个反射器之间的光路中的偏振器，用于在从一个反射器到达另一个之前反射的光偏振。 沿着一个反射器上的给定轴入射的非偏振光束从该反射器径向反射，从偏振器获取预定的偏振，然后从第二反射器反射到具有空间变化的偏振光束。

公开(公告)号：US20140299790A1

公开(公告)日：2014-10-09

申请号：US14009869

申请日：2011-04-07

Applicant: Amir Shoham ,  Haim Feldman ,  Doron Shoham

Inventor： Amir Shoham ,  Haim Feldman ,  Doron Shoham

IPC: G01N21/88

CPC classification number: G01N21/8806 ,  G01N21/33 ,  G01N2021/8822 ,  G01N2201/0697

Abstract: A method and an inspection system that exhibiting speckle reduction characteristics includes a light source arranged to generate input light pulses, and diffuser-free speckle reduction optics that include a beam splitter, for splitting an input light pulse from the light source into multiple light pulses that are oriented at angles in relation to each other when exiting the beam splitter, and at least one optical element for directing the multiple light pulses to impinge on an inspected object at different angles.

Abstract translation: 具有斑点减少特性的方法和检查系统包括布置成产生输入光脉冲的光源和包括分束器的无漫射器散斑光学器件，用于将来自光源的输入光脉冲分成多个光脉冲， 在离开分束器时相对于彼此的角度定向，并且至少一个光学元件用于引导多个光脉冲以不同的角度撞击在被检查物体上。

公开(公告)号：US20070183036A1

公开(公告)日：2007-08-09

申请号：US10552047

申请日：2004-04-04

Applicant: Stephen Lipson ,  Amir Shoham

Inventor： Stephen Lipson ,  Amir Shoham

IPC: G02B27/28

CPC classification number: G02B27/286 ,  Y10S359/90

Abstract: An apparatus for providing a light beam with spatially varying polarization. The apparatus comprises: two circumferentially curved reflectors positioned substantially opposite each other, a polarizer positioned in an optical path between the two reflectors, for polarizing light reflected from one reflector before it reaches the other. A non-polarized light beam incident along a given axis on one of the reflectors is radially reflected off that reflector, acquires predetermined polarization from the polarizer and is then reflected off the second reflector to a light beam of spatially varying polarization.

Abstract translation: 一种用于提供具有空间变化的偏振的光束的装置。 该装置包括：两个周向弯曲的反射器，基本上彼此相对地定位，偏振器位于两个反射器之间的光路中，用于在从一个反射器到达另一个之前反射的光偏振。 沿着一个反射器上的给定轴入射的非偏振光束从该反射器径向反射，从偏振器获取预定的偏振，然后从第二反射器反射到具有空间变化的偏振光束。