公开(公告)号：US08207499B2

公开(公告)日：2012-06-26

申请号：US12237364

申请日：2008-09-24

Applicant: Amir Shoham ,  Benzion Sender ,  Alon Litman

Inventor： Amir Shoham ,  Benzion Sender ,  Alon Litman

IPC: H01J37/26

CPC classification number: H01J37/28 ,  G01N23/2208 ,  G01N23/2251 ,  H01J37/222 ,  H01J2237/221 ,  H01J2237/24495 ,  H01J2237/2809 ,  H01J2237/2823

Abstract: A method for imaging a surface, including scanning a first region of the surface with a primary charged particle beam at a first scan rate so as to generate a first secondary charged particle beam from the first region, and scanning a second region of the surface with the primary charged particle beam at a second scan rate faster than the first scan rate so as to generate a second secondary charged particle beam from the second region. The method also includes receiving the first secondary charged particle beam and the second secondary charged particle beam at a detector configured to generate a signal in response to the beams, and forming an image of the first and the second regions in response to the signal.

Abstract translation: 一种用于对表面进行成像的方法，包括以第一扫描速率用初级带电粒子束扫描表面的第一区域，以便产生来自第一区域的第一次级带电粒子束，以及扫描表面的第二区域， 所述初级带电粒子束以比所述第一扫描速率快的第二扫描速率，以便从所述第二区域产生第二次级带电粒子束。 该方法还包括在被配置为响应于光束产生信号的检测器处接收第一次级带电粒子束和第二次级带电粒子束，并且响应于该信号形成第一和第二区域的图像。

公开(公告)号：US20100072365A1

公开(公告)日：2010-03-25

申请号：US12237364

申请日：2008-09-24

Applicant: Amir Shoham ,  Benzion Sender ,  Alon Litman

Inventor： Amir Shoham ,  Benzion Sender ,  Alon Litman

IPC: G01N23/00

CPC classification number: H01J37/28 ,  G01N23/2208 ,  G01N23/2251 ,  H01J37/222 ,  H01J2237/221 ,  H01J2237/24495 ,  H01J2237/2809 ,  H01J2237/2823

Abstract: A method for imaging a surface, including scanning a first region of the surface with a primary charged particle beam at a first scan rate so as to generate a first secondary charged particle beam from the first region, and scanning a second region of the surface with the primary charged particle beam at a second scan rate faster than the first scan rate so as to generate a second secondary charged particle beam from the second region. The method also includes receiving the first secondary charged particle beam and the second secondary charged particle beam at a detector configured to generate a signal in response to the beams, and forming an image of the first and the second regions in response to the signal.

Abstract translation: 一种用于对表面进行成像的方法，包括以第一扫描速率用初级带电粒子束扫描表面的第一区域，以便产生来自第一区域的第一次级带电粒子束，以及扫描表面的第二区域， 所述初级带电粒子束以比所述第一扫描速率快的第二扫描速率，以便从所述第二区域产生第二次级带电粒子束。 该方法还包括在被配置为响应于光束产生信号的检测器处接收第一次级带电粒子束和第二次级带电粒子束，并且响应于该信号形成第一和第二区域的图像。

公开(公告)号：US07285779B2

公开(公告)日：2007-10-23

申请号：US11076483

申请日：2005-03-09

Applicant: Alon Litman ,  Benzion Sender

Inventor： Alon Litman ,  Benzion Sender

IPC: G01N23/00 ,  G21K7/00

CPC classification number: H01J37/28 ,  G01N23/225 ,  H01J2237/2817

Abstract: A multi beam inspection method and system. The inspection system includes: (i) a beam array generator adapted to generate an array of beams characterized by a beam array axis; and (ii) at least one mechanism adapted to position the object under the array of beams such that at least two beams that are positioned along a beam array axis scan substantially simultaneously at least two regions of interest of the object, wherein the first axis is oriented in relation to the beam array axis.

Abstract translation: 一种多光束检测方法和系统。 所述检查系统包括：（i）光束阵列发生器，适于产生以束阵列轴为特征的光束阵列; 以及（ii）至少一个机构，其适于将所述物体定位在所述梁阵列的下方，使得沿着光束阵列轴定位的至少两个光束基本上同时扫描所述物体的至少两个感兴趣区域，其中所述第一轴线 相对于光束阵列轴定向。

公开(公告)号：US20050279936A1

公开(公告)日：2005-12-22

申请号：US11076483

申请日：2005-03-09

Applicant: Alon Litman ,  Benzion Sender

Inventor： Alon Litman ,  Benzion Sender

IPC: G01N23/225 ,  H01J37/28

CPC classification number: H01J37/28 ,  G01N23/225 ,  H01J2237/2817

Abstract: A multi beam inspection method and system. The inspection system includes: (i) a beam array generator adapted to generate an array of beams characterized by a beam array axis; and (ii) at least one mechanism adapted to position the object under the array of beams such that at least two beams that are positioned along a beam array axis scan substantially simultaneously at least two regions of interest of the object, wherein the first axis is oriented in relation to the beam array axis.

Abstract translation: 一种多光束检测方法和系统。 所述检查系统包括：（i）光束阵列发生器，适于产生以束阵列轴为特征的光束阵列; 以及（ii）至少一个机构，其适于将所述物体定位在所述梁阵列的下方，使得沿着光束阵列轴定位的至少两个光束基本上同时扫描所述物体的至少两个感兴趣区域，其中所述第一轴线 相对于光束阵列轴定向。

公开(公告)号：US20050067582A1

公开(公告)日：2005-03-31

申请号：US10893614

申请日：2004-07-16

Applicant: Benzion Sender ,  Ophir Dror ,  Guy Eytan

Inventor： Benzion Sender ,  Ophir Dror ,  Guy Eytan

IPC: G01N23/22 ,  H01J37/28 ,  H01J3/26

CPC classification number: H01J37/28 ,  G01N23/22 ,  H01J2237/2817

Abstract: An apparatus and method for scanning a pattern. The method includes: (i) directing a charged particle beam such as to interact with the pattern along a first scan path, and (ii) directing a beam such as to interact with the pattern along a second scan path. The pattern changes one of its characteristics as a result of an interaction with the beam. The distance between the first and the second scan paths may be bigger than the diameter of the charged electron beam. Each of the first and second scan paths may include a plurality of consecutive samples and the distance between the first and second scan paths may be bigger than a distance between adjacent samples. The location of scan paths may be changed between measurements and especially between measurement sessions. The charged particle beam may have an ellipsoid cross section.

Abstract translation: 一种用于扫描图案的装置和方法。 该方法包括：（i）引导带电粒子束，例如沿着第一扫描路径与图案相互作用，以及（ii）引导诸如沿着第二扫描路径与图案相互作用的束。 由于与光束的相互作用，该图案改变了其特征之一。 第一和第二扫描路径之间的距离可以大于带电电子束的直径。 第一和第二扫描路径中的每一个可以包括多个连续样本，并且第一和第二扫描路径之间的距离可以大于相邻样本之间的距离。 扫描路径的位置可以在测量之间进行更改，特别是在测量会话之间。 带电粒子束可具有椭圆形截面。

公开(公告)号：US20060049364A1

公开(公告)日：2006-03-09

申请号：US11155044

申请日：2005-06-17

Applicant: Benzion Sender

Inventor： Benzion Sender

IPC: G01K1/08

CPC classification number: H01J37/21 ,  H01J37/28 ,  H01J2237/216

Abstract: A method for focusing a charged particle beam, the method includes: (a) altering a focal point of a charged particle beam according to a first focal pattern while scanning a first area of a sample and collecting a first set of detection signals; (b) altering a focal point of a charged particle beam according to a second focal pattern while scanning a second area that is ideally identical to the first area and collecting a second set of detection signals; and (c) processing the first and second set of detection signals to determine a focal characteristic; whereas the first focal pattern and the second focal pattern differ by the location of an optimal focal point.

Abstract translation: 一种用于聚焦带电粒子束的方法，所述方法包括：（a）在扫描样品的第一区域并收集第一组检测信号时，根据第一焦点图案改变带电粒子束的焦点; （b）在扫描理想地与第一区域相同的第二区域并收集第二组检测信号时，根据第二焦点图案改变带电粒子束的焦点; 和（c）处理第一和第二组检测信号以确定焦点特性; 而第一焦点图案和第二焦点图案与最佳焦点的位置不同。

公开(公告)号：US07235794B2

公开(公告)日：2007-06-26

申请号：US10893614

申请日：2004-07-16

Applicant: Benzion Sender ,  Ophir Dror ,  Guy Eytan

Inventor： Benzion Sender ,  Ophir Dror ,  Guy Eytan

IPC: A61N5/00 ,  G21G5/00 ,  G21K5/10 ,  H01J37/08 ,  G01N23/00

CPC classification number: H01J37/28 ,  G01N23/22 ,  H01J2237/2817

Abstract: An apparatus and method for scanning a pattern. The method includes: (i) directing a charged particle beam such as to interact with the pattern along a first scan path, and (ii) directing a beam such as to interact with the pattern along a second scan path. The pattern changes one of its characteristics as a result of an interaction with the beam. The distance between the first and the second scan paths may be bigger than the diameter of the charged electron beam. Each of the first and second scan paths may include a plurality of consecutive samples and the distance between the first and second scan paths may be bigger than a distance between adjacent samples. The location of scan paths may be changed between measurements and especially between measurement sessions. The charged particle beam may have an ellipsoid cross section.

Abstract translation: 一种用于扫描图案的装置和方法。 该方法包括：（i）引导带电粒子束，例如沿着第一扫描路径与图案相互作用，以及（ii）引导光束，例如沿着第二扫描路径与图案相互作用。 由于与光束的相互作用，该图案改变了其特征之一。 第一和第二扫描路径之间的距离可以大于带电电子束的直径。 第一和第二扫描路径中的每一个可以包括多个连续样本，并且第一和第二扫描路径之间的距离可以大于相邻样本之间的距离。 扫描路径的位置可以在测量之间进行更改，特别是在测量会话之间。 带电粒子束可具有椭圆形截面。

公开(公告)号：US07536431B2

公开(公告)日：2009-05-19

申请号：US10488581

申请日：2002-09-03

Applicant: Avner Goren ,  Aviram Sariel ,  Shimon Levit ,  Yosefa Asaf ,  Sergio Liberman ,  Benzion Sender ,  Tzvi Tzelnick ,  Yaron Hefetz ,  Eyal Moses ,  Vered Machal

Inventor： Avner Goren ,  Aviram Sariel ,  Shimon Levit ,  Yosefa Asaf ,  Sergio Liberman ,  Benzion Sender ,  Tzvi Tzelnick ,  Yaron Hefetz ,  Eyal Moses ,  Vered Machal

IPC: G06E3/00 ,  G06E1/04

CPC classification number: G06E1/045 ,  G06T1/0007

Abstract: An integrated VMM (vector-matrix multiplier) module, including an electro-optical VMM component that multiplies an input vector by a matrix to produce an output vector; and an electronic VPU (vector processing unit) that processes at least one of the input and output vectors. Various error reducing mechanisms are also discussed.

Abstract translation: 一个集成的VMM（矢量矩阵乘法器）模块，包括一个电光VMM分量，将一个输入矢量乘以一个矩阵，产生一个输出矢量; 以及处理输入和输出向量中的至少一个的电子VPU（向量处理单元）。 还讨论了各种错误减少机制。

公开(公告)号：US07535001B2

公开(公告)日：2009-05-19

申请号：US11861163

申请日：2007-09-25

Applicant: Benzion Sender

Inventor： Benzion Sender

IPC: G01N23/00 ,  G21K7/00

CPC classification number: H01J37/21 ,  H01J37/28 ,  H01J2237/216

Abstract: A method for focusing a charged particle beam, the method includes: (a) altering a focal point of a charged particle beam according to a first focal pattern while scanning a first area of a sample and collecting a first set of detection signals; (b) altering a focal point of a charged particle bean according to a second focal pattern while scanning a second area that is ideally identical to the first area and collecting a second set of detection signals; and (c) processing the first and second set of detection signals to determine a focal characteristic; whereas the first focal pattern and the second focal pattern differ by the location of an optimal focal point.

Abstract translation: 一种用于聚焦带电粒子束的方法，所述方法包括：（a）在扫描样品的第一区域并收集第一组检测信号时，根据第一焦点图案改变带电粒子束的焦点; （b）在扫描理想地与第一区域相同的第二区域并收集第二组检测信号时，根据第二焦点图案改变带电粒子豆的焦点; 和（c）处理第一和第二组检测信号以确定焦点特性; 而第一焦点图案和第二焦点图案与最佳焦点的位置不同。

公开(公告)号：US07375326B2

公开(公告)日：2008-05-20

申请号：US11155044

申请日：2005-06-17

Applicant: Benzion Sender

Inventor： Benzion Sender

IPC: G01N23/00 ,  G21K7/00

CPC classification number: H01J37/21 ,  H01J37/28 ,  H01J2237/216

Abstract: A method for focusing a charged particle beam, the method including: (a) altering a focal point of a charged particle beam according to a first focal pattern while scanning a first area of a sample and collecting a first set of detection signals; (b) altering a focal point of a charged particle beam according to a second focal pattern while scanning a second area that is ideally identical to the first area and collecting a second set of detection signals; and (c) processing the first and second set of detection signals to determine a focal characteristic; wherein the first focal pattern and the second focal pattern differ by the location of an optimal focal point.

Abstract translation: 一种用于聚焦带电粒子束的方法，所述方法包括：（a）在扫描样品的第一区域并收集第一组检测信号时，根据第一焦点图案改变带电粒子束的焦点; （b）在扫描理想地与第一区域相同的第二区域并收集第二组检测信号时，根据第二焦点图案改变带电粒子束的焦点; 和（c）处理第一和第二组检测信号以确定焦点特性; 其中所述第一焦点图案和所述第二焦点图案与最佳焦点的位置不同。