公开(公告)号：US20110090495A1

公开(公告)日：2011-04-21

申请号：US12935786

申请日：2009-03-27

申请人： Anastasius Jacobus Anicetus Bruinsma ,  Johannes Hubertus Josephina Moors ,  Lucas Henricus Johannes Stevens ,  Abraham Veefkind ,  Peter Gerhardus Wilhelmu Bussink ,  Egbert Anne Martijn Brouwer

发明人： Anastasius Jacobus Anicetus Bruinsma ,  Johannes Hubertus Josephina Moors ,  Lucas Henricus Johannes Stevens ,  Abraham Veefkind ,  Peter Gerhardus Wilhelmu Bussink ,  Egbert Anne Martijn Brouwer

IPC分类号： G01N21/17

CPC分类号： G03F7/70916 ,  G01N21/94 ,  G03F7/70525 ,  G03F7/70566 ,  G03F7/70591 ,  G03F7/70808 ,  G03F7/7085 ,  G03F7/70941

摘要： A lithographic apparatus includes a vessel that encloses a component with a test surface to be probed for contamination control; and an optical probe configured to transmit and receive an optical probing beam. The vessel includes a first optical port configured to transfer the optical probing beam towards the test surface, and a second optical port configured to receive a reflected optical probing beam. The optical probe includes a light source configured to provide the optical probing beam, a polarization conditioner configured to provide a predefined polarization state to the probing beam, and a spectral analyzer. The polarization conditioner is preset to provide a minimal transmission for a minimal transmission wavelength, and the spectral analyzer is arranged to detect a wavelength shift of the minimal transmission wavelength in response to a polarization change due to the presence of contamination.

摘要翻译： 光刻设备包括：容器，其包围具有待探测以用于污染控制的测试表面的部件; 以及被配置为发送和接收光学探测光束的光学探针。 该容器包括被配置为将光学探测光束传送到测试表面的第一光学端口和被配置为接收反射光学探测光束的第二光学端口。 光探头包括被配置为提供光学探测光束的光源，被配置为向探测光束提供预定极化状态的偏振光学调节器和光谱分析器。 偏振调节器被预设为为最小传输波长提供最小的传输，并且频谱分析仪布置成响应于由于污染的存在而导致的偏振变化来检测最小传输波长的波长偏移。