Sensor and system for sensing an electron beam
    1.
    发明申请
    Sensor and system for sensing an electron beam 有权
    用于感应电子束的传感器和系统

    公开(公告)号:US20070114433A1

    公开(公告)日:2007-05-24

    申请号:US11542232

    申请日:2006-10-04

    IPC分类号: G01K1/08

    摘要: The present invention refers to a sensor (10) for sensing an intensity of an electron beam generated by an electron beam generator along a path, the electron beam being exited from the generator through an exit window (24). The invention is characterized in that the sensor (10) comprises a conductor (26) located within the path and exposed to the exit window (24), and an insulating housing (28) for shielding the conductor (26), said housing (28) being engaged with the exit window (24) forming a chamber (30) with said exit window (24), and that the conductor (26) is positioned within said chamber (30). The invention also refers to a system for sensing an intensity of an electron beam.

    摘要翻译: 本发明涉及用于感测沿着路径由电子束发生器产生的电子束强度的传感器(10),电子束通过出射窗(24)从发生器排出。 本发明的特征在于,传感器(10)包括位于路径内并暴露于出射窗(24)的导体(26)和用于屏蔽导体(26)的绝缘壳体(28),所述壳体(28) )与与所述出射窗(24)形成腔室(30)的出射窗(24)接合,并且导体(26)位于所述腔室(30)内。 本发明还涉及用于感测电子束强度的系统。

    Exposed conductor system and method for sensing an electron beam
    2.
    发明授权
    Exposed conductor system and method for sensing an electron beam 有权
    暴露的导体系统和感应电子束的方法

    公开(公告)号:US07375345B2

    公开(公告)日:2008-05-20

    申请号:US11258212

    申请日:2005-10-26

    IPC分类号: H01J33/04

    摘要: A detector is disclosed for sensing an intensity of an electron beam generated along a path. An exemplary detector includes an exposed conductor attached to a support which is configured to locate the exposed conductor within a path of an electron beam; a grounded conductor isolated from the exposed conductor, the grounded conductor partly surrounding the exposed conductor to form a plasma shield having a window positioned at least in a direction of the electron beam path.

    摘要翻译: 公开了一种用于感测沿着路径产生的电子束的强度的检测器。 示例性检测器包括附接到支撑件的暴露导体,其被配置为将暴露的导体定位在电子束的路径内; 与暴露的导体隔离的接地导体,接地导体部分围绕暴露的导体以形成具有至少位于电子束路径的方向上的窗口的等离子体屏蔽。

    Multilayer detector and method for sensing an electron beam
    3.
    发明授权
    Multilayer detector and method for sensing an electron beam 有权
    多层检测器和感应电子束的方法

    公开(公告)号:US07368739B2

    公开(公告)日:2008-05-06

    申请号:US11258215

    申请日:2005-10-26

    IPC分类号: H01J37/244

    CPC分类号: G01R19/0061

    摘要: A detector and method are disclosed for sensing an intensity of an electron beam. An exemplary detector includes a multilayer composite structure having a conductive core, an insulating layer formed on the conductive core, and an outer conductive layer electrically connected to a voltage potential and formed on the insulating layer. A support is configured to locate the conductive core in alignment with an electron beam generator, between an electron beam generator and a target area, and within a direct path of an electron beam to be generated by the electron beam generator.

    摘要翻译: 公开了用于感测电子束强度的检测器和方法。 一种示例性检测器包括具有导电芯的多层复合结构,形成在导电芯上的绝缘层,以及电连接到电压电位并形成在绝缘层上的外导电层。 支撑件被配置成将导电芯与电子束发生器,电子束发生器和目标区域之间以及由电子束发生器产生的电子束的直接路径内的定位。

    Sensor and system for sensing an electron beam
    4.
    发明授权
    Sensor and system for sensing an electron beam 有权
    用于感应电子束的传感器和系统

    公开(公告)号:US07592613B2

    公开(公告)日:2009-09-22

    申请号:US11812050

    申请日:2007-06-14

    CPC分类号: B65B55/08 H01J2237/24507

    摘要: A sensor is adapted to sense the intensity of an electron beam generated by an electron beam generator and exited from the generator through an exit window along a path towards a target within a target area. The sensor comprises at least one area of at least one conductive layer located within the path and connected to a current detector. The area, or areas, of the at least one conductive layer are shielded from the surrounding environment and from the exit window (and from one another when there are more than one area) by a shield. The shield is formed on the exit window. The sensor forms a part of a sensing system.

    摘要翻译: 传感器适于感测由电子束发生器产生的电子束的强度,并且通过出口窗口沿着朝向目标区域内的目标的路径从发生器离开。 传感器包括至少一个导电层的至少一个区域,位于路径内并连接到电流检测器。 所述至少一个导电层的面积或区域被屏蔽物与周围的环境和出口窗口(以及当存在多于一个区域时)相隔离。 屏蔽形成在出口窗口上。 传感器构成感测系统的一部分。

    Sensor and system for sensing an electron beam
    5.
    发明授权
    Sensor and system for sensing an electron beam 有权
    用于感应电子束的传感器和系统

    公开(公告)号:US07560714B2

    公开(公告)日:2009-07-14

    申请号:US11542232

    申请日:2006-10-04

    摘要: The present invention refers to a sensor (10) for sensing an intensity of an electron beam generated by an electron beam generator along a path, the electron beam being exited from the generator through an exit window (24). The invention is characterized in that the sensor (10) comprises a conductor (26) located within the path and exposed to the exit window (24), and an insulating housing (28) for shielding the conductor (26), said housing (28) being engaged with the exit window (24) forming a chamber (30) with said exit window (24), and that the conductor (26) is positioned within said chamber (30). The invention also refers to a system for sensing an intensity of an electron beam.

    摘要翻译: 本发明涉及用于感测沿着路径由电子束发生器产生的电子束的强度的传感器(10),电子束通过出射窗(24)从发生器排出。 本发明的特征在于,传感器(10)包括位于路径内并暴露于出射窗(24)的导体(26)和用于屏蔽导体(26)的绝缘壳体(28),所述壳体(28) )与与所述出射窗(24)形成腔室(30)的出射窗(24)接合,并且导体(26)位于所述腔室(30)内。 本发明还涉及用于感测电子束强度的系统。

    Exposed conductor system and method for sensing an electron beam
    6.
    发明申请
    Exposed conductor system and method for sensing an electron beam 有权
    暴露的导体系统和感应电子束的方法

    公开(公告)号:US20070114432A1

    公开(公告)日:2007-05-24

    申请号:US11258212

    申请日:2005-10-26

    IPC分类号: H01J3/14

    摘要: A detector is disclosed for sensing an intensity of an electron beam generated along a path. An exemplary detector includes an exposed conductor attached to a support which is configured to locate the exposed conductor within a path of an electron beam; a grounded conductor isolated from the exposed conductor, the grounded conductor partly surrounding the exposed conductor to form a plasma shield having a window positioned at least in a direction of the electron beam path.

    摘要翻译: 公开了一种用于感测沿着路径产生的电子束的强度的检测器。 示例性检测器包括附接到支撑件的暴露导体,其被配置为将暴露的导体定位在电子束的路径内; 与暴露的导体隔离的接地导体,接地导体部分围绕暴露的导体以形成具有至少位于电子束路径的方向上的窗口的等离子体屏蔽。

    Multilayer detector and method for sensing an electron beam
    7.
    发明申请
    Multilayer detector and method for sensing an electron beam 有权
    多层检测器和感应电子束的方法

    公开(公告)号:US20070090303A1

    公开(公告)日:2007-04-26

    申请号:US11258215

    申请日:2005-10-26

    IPC分类号: H01J33/02 H01J37/244

    CPC分类号: G01R19/0061

    摘要: A detector and method are disclosed for sensing an intensity of an electron beam. An exemplary detector includes a multilayer composite structure having a conductive core, an insulating layer formed on the conductive core, and an outer conductive layer electrically connected to a voltage potential and formed on the insulating layer. A support is configured to locate the conductive core in alignment with an electron beam generator, between an electron beam generator and a target area, and within a direct path of an electron beam to be generated by the electron beam generator.

    摘要翻译: 公开了用于感测电子束强度的检测器和方法。 一种示例性检测器包括具有导电芯的多层复合结构,形成在导电芯上的绝缘层,以及电连接到电压电位并形成在绝缘层上的外导电层。 支撑件被配置成将导电芯与电子束发生器,电子束发生器和目标区域之间以及由电子束发生器产生的电子束的直接路径内的定位。

    Sensor and sytem for sensing an electron beam
    8.
    发明申请
    Sensor and sytem for sensing an electron beam 有权
    用于感应电子束的传感器和系统

    公开(公告)号:US20070290148A1

    公开(公告)日:2007-12-20

    申请号:US11812050

    申请日:2007-06-14

    IPC分类号: A61N5/00 G21G5/00

    CPC分类号: B65B55/08 H01J2237/24507

    摘要: A sensor is adapted to sense the intensity of an electron beam generated by an electron beam generator and exited from the generator through an exit window along a path towards a target within a target area. The sensor comprises at least one area of at least one conductive layer located within the path and connected to a current detector. The area, or areas, of the at least one conductive layer are shielded from the surrounding environment and from the exit window (and from one another when there are more than one area) by a shield. The shield is formed on the exit window. The sensor forms a part of a sensing system.

    摘要翻译: 传感器适于感测由电子束发生器产生的电子束的强度,并且通过出口窗口沿着朝向目标区域内的目标的路径从发生器离开。 传感器包括至少一个导电层的至少一个区域,位于路径内并连接到电流检测器。 所述至少一个导电层的面积或区域被屏蔽物与周围环境和出口窗口(以及当存在多于一个区域时)相隔离。 屏蔽形成在出口窗口上。 传感器构成感测系统的一部分。

    Flow sensor and method for measuring a flow rate component of a fluid containing electrically charged elements
    10.
    发明授权
    Flow sensor and method for measuring a flow rate component of a fluid containing electrically charged elements 有权
    用于测量含有带电元件的流体的流量分量的流量传感器和方法

    公开(公告)号:US07246530B2

    公开(公告)日:2007-07-24

    申请号:US10544671

    申请日:2004-01-26

    IPC分类号: G01F1/56

    摘要: The invention relates to measurement of a fluid flow, wherein a flow rate component of the fluid is measured along a selected direction. A magnetic field whose polarity varies over time is applied to the fluid, which presumed to contain electrically charged elements. First and second sensor electrodes (120, 121) are arranged to be wetted by the flowing fluid. The electrodes (120, 121) are spaced apart from one another along a line being substantially perpendicular both to the selected flow direction and a magnetic axis of the magnetic field. A DC-level drift of the sensor electrodes (120, 121) is prevented by supplying a control current (Ictrl-0; Ictrl-1) to each of the sensor electrode (120, 121), which has such sign and magnitude that a direct-current voltage level at the sensor electrodes (120, 121) relative areference potential is controled towards a predetermined voltage (DCset).

    摘要翻译: 本发明涉及流体流动的测量,其中沿所选方向测量流体的流速分量。 极性随时间变化的磁场被施加到被认为包含带电元件的流体。 第一和第二传感器电极(120,121)布置成被流动的流体润湿。 电极(120,121)沿着基本上垂直于选定的流动方向和磁场的磁轴的线彼此间隔开。 传感器电极(120,121)的直流电平漂移通过向每一个的每一个提供控制电流(I ctrl-0; I ctrl-1< 传感器电极(120,121)具有这样的符号和大小,使得传感器电极(120,121)的相对相对电位的直流电压电平被控制到预定电压(DC SET) 。