METHOD FOR THE TEMPERATURE MEASUREMENT OF SUBSTRATES, AND VACUUM PROCESSING APPARATUS
    1.
    发明申请
    METHOD FOR THE TEMPERATURE MEASUREMENT OF SUBSTRATES, AND VACUUM PROCESSING APPARATUS 失效
    基板温度测量方法和真空加工设备

    公开(公告)号:US20090168837A1

    公开(公告)日:2009-07-02

    申请号:US12339261

    申请日:2008-12-19

    IPC分类号: G01J5/00 C23C14/34

    CPC分类号: G01K13/00 C23C14/541

    摘要: A method for measuring the temperature of substrates to be coated is disclosed. The substrates have an opening or a cavity, and the substrates are successively moved past a source of coating material. At least one substrate's temperature is measured during coating by at least one temperature sensor and the measured temperature value is transmitted to a measuring device. The temperature sensor is disposed inside the substrate's opening or cavity so as to prevent coating of the temperature sensor.

    摘要翻译: 公开了一种用于测量待涂覆的基底的温度的方法。 衬底具有开口或空腔,并且衬底连续地移动经过涂层材料源。 在至少一个温度传感器的涂覆期间测量至少一个基板的温度,并将测量的温度值传输到测量装置。 温度传感器设置在基板的开口或腔内,以防止温度传感器的涂覆。

    TRANSPORT DEVICE, LOADING DEVICE AND METHOD FOR LOADING AND UNLOADING THE TRANSPORT DEVICE
    2.
    发明申请
    TRANSPORT DEVICE, LOADING DEVICE AND METHOD FOR LOADING AND UNLOADING THE TRANSPORT DEVICE 失效
    运输装置,装载装置和装载和卸载运输装置的方法

    公开(公告)号:US20080083370A1

    公开(公告)日:2008-04-10

    申请号:US11870014

    申请日:2007-10-10

    IPC分类号: B05C13/00

    CPC分类号: C23C14/56 Y10S414/123

    摘要: A transport device for transporting elongated substrates through a vacuum coating system comprises an essentially rectangular frame and two groups of holding elements, which are rotatably mounted on opposite sides of the frame in such a manner that any pair of opposite holding elements can be connected to both ends of a substrate. Furthermore, at least one retainer bar is provided that is operatively connected to a group of holding elements in such a manner that the holding elements of this group are moveable in order to increase or decrease by choice their distance from the holding elements of the other group. Also provided are a loading and unloading device for loading and unloading the transport device, and a method for loading and unloading the transport device.

    摘要翻译: 用于通过真空涂覆系统传送细长基材的输送装置包括基本上矩形的框架和两组保持元件,这些保持元件可旋转地安装在框架的相对侧上,使得任何一对相对的保持元件可以连接到两个 底物的末端。 此外,提供了至少一个保持杆,其以这样的方式可操作地连接到一组保持元件,使得该组的保持元件可移动,以便通过选择它们与另一组的保持元件的距离来增加或减少 。 还提供了用于装载和卸载运输装置的装载和卸载装置,以及用于装载和卸载运输装置的方法。

    METHOD FOR LOADING AND UNLOADING A TRANSPORT DEVICE
    3.
    发明申请
    METHOD FOR LOADING AND UNLOADING A TRANSPORT DEVICE 失效
    装载和卸载运输装置的方法

    公开(公告)号:US20100178151A1

    公开(公告)日:2010-07-15

    申请号:US12730683

    申请日:2010-03-24

    IPC分类号: B65G65/02

    CPC分类号: C23C14/56 Y10S414/123

    摘要: A transport device for transporting elongated substrates through a vacuum coating system comprises an essentially rectangular frame and two groups of holding elements, which are rotatably mounted on opposite sides of the frame in such a manner that any pair of opposite holding elements can be connected to both ends of a substrate. Furthermore, at least one retainer bar is provided that is operatively connected to a group of holding elements in such a manner that the holding elements of this group are moveable in order to increase or decrease by choice their distance from the holding elements of the other group. Also provided are a loading and unloading device for loading and unloading the transport device, and a method for loading and unloading the transport device.

    摘要翻译: 用于通过真空涂覆系统传送细长基材的输送装置包括基本上矩形的框架和两组保持元件,这些保持元件可旋转地安装在框架的相对侧上,使得任何一对相对的保持元件可以连接到两个 底物的末端。 此外,提供了至少一个保持杆,其以这样的方式可操作地连接到一组保持元件,使得该组的保持元件可移动,以便通过选择它们与另一组的保持元件的距离来增加或减少 。 还提供了用于装载和卸载运输装置的装载和卸载装置,以及用于装载和卸载运输装置的方法。