公开(公告)号：US20080083370A1

公开(公告)日：2008-04-10

申请号：US11870014

申请日：2007-10-10

申请人： Johannes STRUEMPFEL ,  Reinhardt BAUER ,  Andreas HEISIG ,  Hans-Christian HECHT ,  Hartmut FREITAG ,  Heiko RICHTER ,  Andre ULBRICHT ,  Falk SCHWERDTFEGER

发明人： Johannes STRUEMPFEL ,  Reinhardt BAUER ,  Andreas HEISIG ,  Hans-Christian HECHT ,  Hartmut FREITAG ,  Heiko RICHTER ,  Andre ULBRICHT ,  Falk SCHWERDTFEGER

IPC分类号： B05C13/00

CPC分类号： C23C14/56 ,  Y10S414/123

摘要： A transport device for transporting elongated substrates through a vacuum coating system comprises an essentially rectangular frame and two groups of holding elements, which are rotatably mounted on opposite sides of the frame in such a manner that any pair of opposite holding elements can be connected to both ends of a substrate. Furthermore, at least one retainer bar is provided that is operatively connected to a group of holding elements in such a manner that the holding elements of this group are moveable in order to increase or decrease by choice their distance from the holding elements of the other group. Also provided are a loading and unloading device for loading and unloading the transport device, and a method for loading and unloading the transport device.

摘要翻译： 用于通过真空涂覆系统传送细长基材的输送装置包括基本上矩形的框架和两组保持元件，这些保持元件可旋转地安装在框架的相对侧上，使得任何一对相对的保持元件可以连接到两个 底物的末端。 此外，提供了至少一个保持杆，其以这样的方式可操作地连接到一组保持元件，使得该组的保持元件可移动，以便通过选择它们与另一组的保持元件的距离来增加或减少 。 还提供了用于装载和卸载运输装置的装载和卸载装置，以及用于装载和卸载运输装置的方法。

公开(公告)号：US20100178151A1

公开(公告)日：2010-07-15

申请号：US12730683

申请日：2010-03-24

申请人： Johannes STRUEMPFEL ,  Reinhardt BAUER ,  Andreas HEISIG ,  Hans-Christian HECHT ,  Hartmut FREITAG ,  Heiko RICHTER ,  André ULBRICHT ,  Falk SCHWERDTFEGER

发明人： Johannes STRUEMPFEL ,  Reinhardt BAUER ,  Andreas HEISIG ,  Hans-Christian HECHT ,  Hartmut FREITAG ,  Heiko RICHTER ,  André ULBRICHT ,  Falk SCHWERDTFEGER

IPC分类号： B65G65/02

CPC分类号： C23C14/56 ,  Y10S414/123

摘要： A transport device for transporting elongated substrates through a vacuum coating system comprises an essentially rectangular frame and two groups of holding elements, which are rotatably mounted on opposite sides of the frame in such a manner that any pair of opposite holding elements can be connected to both ends of a substrate. Furthermore, at least one retainer bar is provided that is operatively connected to a group of holding elements in such a manner that the holding elements of this group are moveable in order to increase or decrease by choice their distance from the holding elements of the other group. Also provided are a loading and unloading device for loading and unloading the transport device, and a method for loading and unloading the transport device.

摘要翻译： 用于通过真空涂覆系统传送细长基材的输送装置包括基本上矩形的框架和两组保持元件，这些保持元件可旋转地安装在框架的相对侧上，使得任何一对相对的保持元件可以连接到两个 底物的末端。 此外，提供了至少一个保持杆，其以这样的方式可操作地连接到一组保持元件，使得该组的保持元件可移动，以便通过选择它们与另一组的保持元件的距离来增加或减少 。 还提供了用于装载和卸载运输装置的装载和卸载装置，以及用于装载和卸载运输装置的方法。

公开(公告)号：US20090014285A1

公开(公告)日：2009-01-15

申请号：US12169966

申请日：2008-07-09

申请人： Reinhardt BAUER ,  Johannes Struempfel ,  Andreas Heisig ,  Matthias Smolke ,  Thomas Posseckardt ,  Frank Hupka

发明人： Reinhardt BAUER ,  Johannes Struempfel ,  Andreas Heisig ,  Matthias Smolke ,  Thomas Posseckardt ,  Frank Hupka

IPC分类号： B65G43/02

CPC分类号： B65G43/04

摘要： In a transport device, which comprises at least one endless conveyor guided around at least two guide rollers, a monitoring appliance for monitoring motion of a guide roller is positioned on at least one of the guide rollers. The monitoring appliance comprises a first contact element disposed on and electrically connected with the guide roller, and a second contact element disposed near the guide roller. The first and second contact elements are arranged relative to one another in such a way that an electrical contact between them occurs with every revolution of the guide roller, such that the electric potential of the guide roller is transmitted to the second contact element. Additionally, a substrate treatment apparatus comprising such transport device is disclosed.

摘要翻译： 在包括围绕至少两个引导辊引导的至少一个环形输送机的输送装置中，用于监测导辊运动的监控装置被定位在至少一个导辊上。 监控装置包括设置在引导辊上并与导向辊电连接的第一接触元件和设置在引导辊附近的第二接触元件。 第一和第二接触元件相对于彼此布置，使得它们之间的电接触发生在导辊的每转一圈，使得导向辊的电位传递到第二接触元件。 另外，公开了一种包括该输送装置的基板处理装置。

公开(公告)号：US20120292289A1

公开(公告)日：2012-11-22

申请号：US13473663

申请日：2012-05-17

申请人： Steffen MOSSHAMMER ,  Reinhardt BAUER ,  Thomas MEYER ,  Matthias SMOLKE ,  Michael HOFMANN ,  Torsten DSAAK

发明人： Steffen MOSSHAMMER ,  Reinhardt BAUER ,  Thomas MEYER ,  Matthias SMOLKE ,  Michael HOFMANN ,  Torsten DSAAK

IPC分类号： B65G39/02 ,  B44C1/22 ,  C23C16/44

CPC分类号： C23C14/562

摘要： A transport cylinder for the vacuum treatment of substrates includes a roll body and at least one spacer element arranged on the roll body and enveloping the roll body. The spacer element is made of a knitted tube containing metallic or/and metallic threads.

摘要翻译： 用于基板的真空处理的输送圆筒包括辊体和布置在辊体上并包封辊体的至少一个间隔元件。 间隔元件由包含金属或/和金属线的针织管制成。

公开(公告)号：US20110290181A1

公开(公告)日：2011-12-01

申请号：US13072909

申请日：2011-03-28

申请人： Damir Muchamedjarow ,  Hubertus Von Der Waydbrink ,  Michael HENTSCHEL ,  Marco KENNE ,  Reinhardt BAUER ,  Steffen LEßMANN ,  Thomas BOCK ,  Reinhard JAEGER

发明人： Damir Muchamedjarow ,  Hubertus Von Der Waydbrink ,  Michael HENTSCHEL ,  Marco KENNE ,  Reinhardt BAUER ,  Steffen LEßMANN ,  Thomas BOCK ,  Reinhard JAEGER

IPC分类号： B05C11/00 ,  B08B7/00 ,  B05C13/00 ,  G01B11/14

CPC分类号： C23C14/564 ,  C23C14/54

摘要： A method and device are provided for cleaning of an optical position measurement system in a coating installation. The optical position measurement system includes a cantilever, and a sensor head having a radiation inlet and/or outlet for the reception and/or emission of an optical signal, at a free end of the cantilever. For tempering of the sensor head, a local thermoregulation is applied using a heater and/or cooling device for heating and/or cooling of the sensor head depending on thermal conductivity of material of at least the sensor head and depending on secondary heat in the coating installation.

摘要翻译： 提供了一种用于在涂布设备中清洁光学位置测量系统的方法和装置。 光学位置测量系统包括在悬臂的自由端处的悬臂和具有用于接收和/或发射光信号的辐射入口和/或出口的传感器头。 为了回火传感器头，使用加热器和/或冷却装置施加局部温度调节，以根据至少传感器头的材料的导热性并依赖于涂层中的二次热来传感头的加热和/或冷却 安装。