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1.发明申请METHOD AND ARRANGEMENT FOR REDUNDANT ANODE SPUTTERING HAVING A DUAL ANODE ARRANGEMENT 有权具有双重阳极布置的冗余阳极溅射的方法和布置公开(公告)号：US20100230275A1
公开(公告)日：2010-09-16
申请号：US12679736
申请日：2008-09-25
CPC分类号： H01J37/34 , C23C14/3407 , C23C14/564 , H01J37/3438 , H01J37/3444
摘要： In a method in which two anodes are operated alternately opposite each other as plasma discharge anodes and as cathodes for self-cleaning, and the cathodes of the plasma discharge are recurrently briefly reversed in polarity, and an arrangement comprising a cathode and a first and a second anode supplied with voltage by an H-bridge circuit, pole reversal of cathode voltage is effected by a pulse current supply, at least one anode is maintained at positive potential at all times and the other anode intermittently at negative potential during an etching time, and the H-bridge circuit is operationally connected to the pulse current supply, such that at least one anode is at positive potential at all times.
摘要翻译： 在其中两个阳极彼此交替地相互作用的方法作为等离子体放电阳极和用于自清洁的阴极并且等离子体放电的阴极在极性上反复短暂地反转的方法中，并且包括阴极和第一和第二阴极 通过H桥电路提供电压的第二阳极，通过脉冲电流供应来实现阴极电压的极反转，在蚀刻时间期间，至少一个阳极总是保持在正电位，另一个阳极间断地处于负电位， 并且H桥电路可操作地连接到脉冲电流源，使得至少一个阳极始终处于正电位。
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2.发明授权Method and arrangement for redundant anode sputtering having a dual anode arrangement 有权具有双重阳极布置的冗余阳极溅射的方法和装置公开(公告)号：US08980072B2
公开(公告)日：2015-03-17
申请号：US12679736
申请日：2008-09-25
CPC分类号： H01J37/34 , C23C14/3407 , C23C14/564 , H01J37/3438 , H01J37/3444
摘要： In a method in which two anodes are operated alternately opposite each other as plasma discharge anodes and as cathodes for self-cleaning, and the cathodes of the plasma discharge are recurrently briefly reversed in polarity, and an arrangement comprising a cathode and a first and a second anode supplied with voltage by an H-bridge circuit, pole reversal of cathode voltage is effected by a pulse current supply, at least one anode is maintained at positive potential at all times and the other anode intermittently at negative potential during an etching time, and the H-bridge circuit is operationally connected to the pulse current supply, such that at least one anode is at positive potential at all times.
摘要翻译： 在其中两个阳极彼此交替地相互作用的方法作为等离子体放电阳极和用于自清洁的阴极并且等离子体放电的阴极在极性上反复短暂地反转的方法中，并且包括阴极和第一和第二阴极 通过H桥电路提供电压的第二阳极，通过脉冲电流供应来实现阴极电压的极反转，在蚀刻时间期间，至少一个阳极总是保持在正电位，另一个阳极间断地处于负电位， 并且H桥电路可操作地连接到脉冲电流源，使得至少一个阳极始终处于正电位。
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公开(公告)号：US20130139750A1
公开(公告)日：2013-06-06
申请号：US13700811
申请日：2011-06-14
IPC分类号： B05C9/08
CPC分类号： B05C9/08 , C23C14/56 , C23C14/568
摘要： A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay involved in supplying media, a functional chamber, as a first sub-module, is arranged in a first module and provided with an outer interface which is the same for at least a second module.
摘要翻译： 模块化建筑真空涂覆系统包括多个功能室，沿着纵向范围一个接一个地布置，其中基板通过基板传送区域中的室移动。 为了降低与供应媒体有关的与生产有关的和与安装相关的费用，作为第一子模块的功能室被布置在第一模块中并具有与至少第二模块相同的外部接口。
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4.发明授权公开(公告)号：US08069974B2
公开(公告)日：2011-12-06
申请号：US12169966
申请日：2008-07-09
申请人： Reinhardt Bauer , Johannes Struempfel , Andreas Heisig , Matthias Smolke , Thomas Posseckardt , Frank Hupka
发明人： Reinhardt Bauer , Johannes Struempfel , Andreas Heisig , Matthias Smolke , Thomas Posseckardt , Frank Hupka
IPC分类号： B65G43/00
CPC分类号： B65G43/04
摘要： In a transport device, which comprises at least one endless conveyor guided around at least two guide rollers, a monitoring appliance for monitoring motion of a guide roller is positioned on at least one of the guide rollers. The monitoring appliance comprises a first contact element disposed on and electrically connected with the guide roller, and a second contact element disposed near the guide roller. The first and second contact elements are arranged relative to one another in such a way that an electrical contact between them occurs with every revolution of the guide roller, such that the electric potential of the guide roller is transmitted to the second contact element. Additionally, a substrate treatment apparatus comprising such transport device is disclosed.
摘要翻译： 在包括围绕至少两个引导辊引导的至少一个环形输送机的输送装置中，用于监测导辊运动的监控装置被定位在至少一个导辊上。 监控装置包括设置在引导辊上并与导向辊电连接的第一接触元件和设置在引导辊附近的第二接触元件。 第一和第二接触元件相对于彼此布置，使得它们之间的电接触发生在导辊的每转一圈，使得导向辊的电位传递到第二接触元件。 另外，公开了一种包括该输送装置的基板处理装置。
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5.发明授权Vacuum coating system comprising a transport unit for transporting substrates 失效真空镀膜系统，包括用于输送基材的输送单元公开(公告)号：US08127712B2
公开(公告)日：2012-03-06
申请号：US12280931
申请日：2007-07-09
申请人： Reinhardt Bauer , Frank Hupka , Andreas Heisig , Johannes Struempfel , Hans-Christian Hecht , Wolfgang Erbkamm
发明人： Reinhardt Bauer , Frank Hupka , Andreas Heisig , Johannes Struempfel , Hans-Christian Hecht , Wolfgang Erbkamm
CPC分类号： B65G37/005 , B65G15/24 , C23C14/568
摘要： A vacuum coating unit having a pair of side by side transport devices for transporting substrates in a transport direction. Each transport device includes at least one first endless conveyor running in the transport direction and having a conveying element guided around at least two guide rollers or pulleys. The conveying element is located at a distance from a guide device extending in the transport direction parallel to the conveying element in such a way that the ends of the substrates can be introduced into the gap between the conveying element and the guide device of the transport devices and can be moved in the transport direction by the displacement of the conveying elements.
摘要翻译： 一种真空镀膜装置，具有一对并排运送装置，用于在输送方向上输送基材。 每个输送装置包括至少一个在输送方向上运行的第一环形输送机，并具有围绕至少两个导辊或滑轮引导的输送元件。 输送元件位于与沿输送方向平行于输送元件延伸的引导装置一定距离处，使得基板的端部能够被引入到输送元件和输送装置的引导装置之间的间隙中 并且可以通过输送元件的位移在输送方向上移动。
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公开(公告)号：US08033781B2
公开(公告)日：2011-10-11
申请号：US12730683
申请日：2010-03-24
申请人： Johannes Struempfel , Reinhardt Bauer , Andrewas Heisig , Hans-Christian Hecht , Hartmut Freitag , Heiko Richter , Andre Ulbricht , Falk Schwerdtfeger
发明人： Johannes Struempfel , Reinhardt Bauer , Andrewas Heisig , Hans-Christian Hecht , Hartmut Freitag , Heiko Richter , Andre Ulbricht , Falk Schwerdtfeger
IPC分类号： B65G47/34
CPC分类号： C23C14/56 , Y10S414/123
摘要： A transport device for transporting elongated substrates through a vacuum coating system comprises an essentially rectangular frame and two groups of holding elements, which are rotatably mounted on opposite sides of the frame in such a manner that any pair of opposite holding elements can be connected to both ends of a substrate. Furthermore, at least one retainer bar is provided that is operatively connected to a group of holding elements in such a manner that the holding elements of this group are moveable in order to increase or decrease by choice their distance from the holding elements of the other group. Also provided are a loading and unloading device for loading and unloading the transport device, and a method for loading and unloading the transport device.
摘要翻译： 用于通过真空涂覆系统传送细长基材的输送装置包括基本上矩形的框架和两组保持元件，这些保持元件可旋转地安装在框架的相对侧上，使得任何一对相对的保持元件可以连接到两个 底物的末端。 此外，提供了至少一个保持杆，其以这样的方式可操作地连接到一组保持元件，使得该组的保持元件可移动，以便通过选择它们与另一组的保持元件的距离来增加或减少 。 还提供了用于装载和卸载运输装置的装载和卸载装置，以及用于装载和卸载运输装置的方法。
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7.发明授权Transport device, loading device and method for loading and unloading the transport device 失效运输装置，装载装置和运输装置的装卸方法公开(公告)号：US08007223B2
公开(公告)日：2011-08-30
申请号：US11870014
申请日：2007-10-10
申请人： Johannes Struempfel , Reinhardt Bauer , Andreas Heisig , Hans-Christian Hecht , Hartmut Freitag , Heiko Richter , André Ulbricht , Falk Schwerdtfeger
发明人： Johannes Struempfel , Reinhardt Bauer , Andreas Heisig , Hans-Christian Hecht , Hartmut Freitag , Heiko Richter , André Ulbricht , Falk Schwerdtfeger
CPC分类号： C23C14/56 , Y10S414/123
摘要： A transport device for transporting elongated substrates through a vacuum coating system comprises an essentially rectangular frame and two groups of holding elements, which are rotatably mounted on opposite sides of the frame in such a manner that any pair of opposite holding elements can be connected to both ends of a substrate. Furthermore, at least one retainer bar is provided that is operatively connected to a group of holding elements in such a manner that the holding elements of this group are moveable in order to increase or decrease by choice their distance from the holding elements of the other group. Also provided are a loading and unloading device for loading and unloading the transport device, and a method for loading and unloading the transport device.
摘要翻译： 用于通过真空涂覆系统传送细长基材的输送装置包括基本上矩形的框架和两组保持元件，这些保持元件可旋转地安装在框架的相对侧上，使得任何一对相对的保持元件可以连接到两个 底物的末端。 此外，提供了至少一个保持杆，其以这样的方式可操作地连接到一组保持元件，使得该组的保持元件可移动，以便通过选择它们与另一组的保持元件的距离来增加或减少 。 还提供了用于装载和卸载运输装置的装载和卸载装置，以及用于装载和卸载运输装置的方法。
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公开(公告)号：US20100178151A1
公开(公告)日：2010-07-15
申请号：US12730683
申请日：2010-03-24
申请人： Johannes STRUEMPFEL , Reinhardt BAUER , Andreas HEISIG , Hans-Christian HECHT , Hartmut FREITAG , Heiko RICHTER , André ULBRICHT , Falk SCHWERDTFEGER
发明人： Johannes STRUEMPFEL , Reinhardt BAUER , Andreas HEISIG , Hans-Christian HECHT , Hartmut FREITAG , Heiko RICHTER , André ULBRICHT , Falk SCHWERDTFEGER
IPC分类号： B65G65/02
CPC分类号： C23C14/56 , Y10S414/123
摘要： A transport device for transporting elongated substrates through a vacuum coating system comprises an essentially rectangular frame and two groups of holding elements, which are rotatably mounted on opposite sides of the frame in such a manner that any pair of opposite holding elements can be connected to both ends of a substrate. Furthermore, at least one retainer bar is provided that is operatively connected to a group of holding elements in such a manner that the holding elements of this group are moveable in order to increase or decrease by choice their distance from the holding elements of the other group. Also provided are a loading and unloading device for loading and unloading the transport device, and a method for loading and unloading the transport device.
摘要翻译： 用于通过真空涂覆系统传送细长基材的输送装置包括基本上矩形的框架和两组保持元件，这些保持元件可旋转地安装在框架的相对侧上，使得任何一对相对的保持元件可以连接到两个 底物的末端。 此外，提供了至少一个保持杆，其以这样的方式可操作地连接到一组保持元件，使得该组的保持元件可移动，以便通过选择它们与另一组的保持元件的距离来增加或减少 。 还提供了用于装载和卸载运输装置的装载和卸载装置，以及用于装载和卸载运输装置的方法。
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9.发明申请TRANSPORTING MEANS AND VACUUM COATING INSTALLATION FOR SUBSTRATES OF DIFFERENT SIZES 失效不同尺寸基材的运输方式和真空涂料安装公开(公告)号：US20090114159A1
公开(公告)日：2009-05-07
申请号：US12262434
申请日：2008-10-31
IPC分类号： C23C16/458
CPC分类号： C23C16/4587 , B65G49/061 , B65G49/063 , B65G2249/02
摘要： In a vacuum coating installation to coat planar substrates, comprising a vacuum chamber and a transport device arranged in the vacuum chamber for transporting the substrates along a transportation path through the vacuum chamber, with the transport device comprising a multitude of transport rollers arranged successively along the transportation path, each transport roller is adapted to be mounted at least at two different positions, vertically distanced from each other. A carrier frame has a substrate accepting structure and a guiding rod arranged at the bottom of the carrier frame in the direction of transportation to create a friction connection with the transportation device, connected to the carrier frame at the connection points, with the guiding rod being connected at least at one connection point to the carrier frame such that a relative displacement is possible of the guiding rod relative to the carrier frame in the direction of transportation.
摘要翻译： 在用于涂覆平面基板的真空涂布装置中，包括真空室和设置在真空室中的输送装置，用于沿着输送路径通过真空室输送基板，输送装置包括多个沿着 输送路径，每个输送辊适于至少安装在彼此垂直离开的两个不同位置处。 载体框架具有基板接收结构和引导杆，其在运输方向上布置在承载架的底部，以与传送装置形成摩擦连接，在连接点处连接到承载架，导杆为 至少在一个连接点处连接到承载架，使得导向杆相对于承载架在运输方向上的相对位移是可能的。
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公开(公告)号：US09186694B2
公开(公告)日：2015-11-17
申请号：US13700811
申请日：2011-06-14
CPC分类号： B05C9/08 , C23C14/56 , C23C14/568
摘要： A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay involved in supplying media, a functional chamber, as a first submodule, is arranged in a first module and provided with an outer interface which is the same for at least a second module.
摘要翻译： 模块化建筑真空涂覆系统包括多个功能室，沿着纵向范围一个接一个地布置，其中基板通过基板传送区域中的室移动。 为了降低与供应媒体有关的与生产有关的和与安装相关的费用，作为第一子模块的功能室被布置在第一模块中并且具有与至少第二模块相同的外部接口。
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