公开(公告)号：US20050275144A1

公开(公告)日：2005-12-15

申请号：US10927414

申请日：2004-08-26

申请人： Andreas Muhe ,  Burkhard Altekruger ,  Axel Vonhoff

发明人： Andreas Muhe ,  Burkhard Altekruger ,  Axel Vonhoff

IPC分类号： B28B1/00 ,  C21C5/02 ,  C30B11/00 ,  C30B15/00 ,  F27B14/06 ,  F27B14/14 ,  F27D3/10

CPC分类号： F27D3/10 ,  F27B14/061 ,  F27B14/14

摘要： The invention is based on the problem of producing a melt that is as homogeneous as possible, to which fresh material in the form of granulate is continuously supplied. Since the granulate is cooler than the melt, heat sinks form that are especially pronounced when the granulate forms clumps in the melt. Therefore the invention suggests the provision of means for distributing the granulate. Especially suitable means are inductors (6) arranged outside the melting crucible (3) that generate an alternating magnetic field in the melt. In this way, electrical currents are induced there that in turn cause the material flows. The inductors are arranged and controlled in such a way that a rapid distribution of the granulate is effected and thus its rapid melting. In this way, good homogeneity is achieved, especially in the center of the melt where the removal of the melted material also occurs.

摘要翻译： 本发明是基于生产尽可能均匀的熔体的问题，其中连续供应颗粒形式的新鲜材料。 由于颗粒比熔体更冷，所以当颗粒形状聚集在熔体中时，特别显着的散热器形式。 因此，本发明提出了分配颗粒的方法。 特别合适的装置是布置在熔化坩埚（3）外部的在熔体中产生交变磁场的电感器（6）。 以这种方式，在那里引起电流，从而导致材料流动。 电感器的排列和控制方式使颗粒的快速分布得以实现，从而使其快速熔化。 以这种方式，实现了良好的均匀性，特别是在熔融材料的中心也发生熔融材料的去除。

公开(公告)号：US20050076827A1

公开(公告)日：2005-04-14

申请号：US10631571

申请日：2003-07-30

申请人： Andreas Muhe

发明人： Andreas Muhe

IPC分类号： C30B11/00 ,  F27D99/00 ,  C30B9/00 ,  C30B17/00 ,  C30B21/02 ,  C30B28/06

CPC分类号： C30B11/006 ,  F27D2099/0008 ,  Y10T117/10 ,  Y10T117/1004 ,  Y10T117/1008

摘要： In a process for calibrating the temperature control unit of a vertical gradient freeze crystal growth oven, instead of the fused material a test body (3) is used in the oven (1) that does not melt at the oven temperature, that has a heat conductivity comparable to the fused material and a central bore (4). After turning on the resistance heaters (8, 9, 10) of the oven (1) the temperature at the level of the individual control temperature indicators (11, 12, 13) of the oven (1) is measured via a reference temperature indicator (5) than can be fully inserted into the bore (4) and subsequently the output of the respective resistance heaters (8, 9, 10) is set to a desired temperature value. In the process the difference to the temperature of the respective control temperature indicators (11, 12, 13) is determined. After removing the test body (3) and the reference temperature indicator (5) the oven (1) is operated according to the control temperature indicators (11, 12 13) taking into consideration the previously determined differences between the reference temperatures and the temperature values of the control temperature indicators (11, 12, 13).

摘要翻译： 在用于校准垂直梯度冷冻晶体生长炉的温度控制单元的过程中，代替熔融材料，在烘箱（1）中使用测试体（3），其在烘箱温度下不熔化，其具有热 导电率与熔融材料和中心孔（4）相当。 在打开烤箱（1）的电阻加热器（8,9,10）之后，通过参考温度指示器（1）测量烘箱（1）的各个控制温度指示器（11,12,13）的水平处的温度 （5）可以完全插入孔（4）中，随后将各个电阻加热器（8,9,10）的输出设置为期望的温度值。 在该过程中，确定各个控制温度指示器（11,12,13）的温度差。 在拆下测试体（3）和参考温度指示器（5）之后，考虑到先前确定的参考温度和温度值之间的差异，根据控制温度指示器（11,1213）操作烤箱（1） 的控制温度指标（11,12,13）。

公开(公告)号：US20050087125A1

公开(公告)日：2005-04-28

申请号：US10921560

申请日：2004-08-19

申请人： Andreas Muhe ,  Burkhard Altekruger ,  Axel Vonhoff

发明人： Andreas Muhe ,  Burkhard Altekruger ,  Axel Vonhoff

IPC分类号： C30B11/00 ,  C30B15/14 ,  C30B15/30 ,  C30B15/00 ,  C30B1/00 ,  C30B21/06 ,  C30B27/02 ,  C30B28/10 ,  C30B30/04

CPC分类号： C30B15/30 ,  C30B11/00 ,  C30B15/14 ,  Y10S117/90 ,  Y10T117/10

摘要： The invention presented here relates to a crystal growing equipment. It is equipped in general with a resistance heater for heating a melt (13) as well as with field coils, which generate alternating magnetic field in a crucible, with which flows can be induced in the melt (13). The invention is so designed that the resistance heaters are also devised to function as the field coils, that is, they are built of a hollow cylindrical body (1), in which, by means of a surrounding slit (2) which winds around it, a spiral-shaped single layer current path is formed. This has the advantage that the current needed for the electrical heating in the equipment is also used for the generation of the magnetic field. Thus, neither separate field coils nor a separate current supply is necessary. Further, the resistance heater, which serves as the field coil arranged as a coil array, is high temperature resistant and surrounds the immediate hot core zone of the equipment and thus the region of the melt. Thus the volume, in which the magnetic field must be generated, is minimized. Further, the alternating magnetic field does not need to penetrate through the wall of the vessel of the crystal growing equipment, hence the vessel can be designed as a steel boiler in conventional manner.

摘要翻译： 本发明涉及一种晶体生长设备。 它通常装有用于加热熔体（13）的电阻加热器以及在坩埚中产生交变磁场的励磁线圈，在熔体（13）中可以引起流动。 本发明的设计使得电阻加热器也被设计成用作场线圈，即它们由中空圆柱体（1）构成，其中通过围绕其缠绕的周围狭缝（2） 形成螺旋状的单层电流路径。 这具有的优点是设备中的电加热所需的电流也用于产生磁场。 因此，不需要单独的场线圈和单独的电流源。 此外，用作线圈阵列的励磁线圈的电阻加热器是耐高温的并且围绕设备的即时热芯区域并且因此围绕熔体的区域。 因此，其中必须产生磁场的体积被最小化。 此外，交变磁场不需要穿过晶体生长设备的容器的壁，因此容器可以以常规方式设计为钢锅炉。

公开(公告)号：US20080000415A1

公开(公告)日：2008-01-03

申请号：US10592262

申请日：2005-03-11

申请人： Andreas Muhe

发明人： Andreas Muhe

IPC分类号： C30B15/30

CPC分类号： C30B15/30 ,  Y10S117/90 ,  Y10T117/10 ,  Y10T117/1008 ,  Y10T117/1032 ,  Y10T117/1064 ,  Y10T117/1068 ,  Y10T117/1072 ,  Y10T117/1088

摘要： The invention relates to the production of a cable rotating head, which is devoid of an abrasion ring, for a Czochralski-crystal drawing system which is used to drive a drawing cord in an azimuthal and vertical manner and the nucleus of a crystal is fixed therein. According to the invention, the cord rotating head comprises a cord winding mechanism which can be supported by a vertical hollow shaft, through which the drawing cord is suspended in the crystal drawing system, and the cord rotating head is rotationally mounted about the axis thereof and can be offset by a rotation motor, which is secured to the crystal drawing system, together with the cord winding mechanism and the drawing cord in a rotational movement, and said vertical hollow shaft is surrounded in a coaxial manner by a double toothed gear which is rotationally mounted opposite to the hollow shaft and can be driven by a drawing motor which is secured to the crystal drawing system. The double toothed gear can be driven by a gear of the cord winding mechanism, such that the mechanical drive energy of the drawing motor, which is secured in a stationary manner to the crystal drawing system, can be transferred to the cord winding mechanism which rotates in relation to the crystal drawing system.

摘要翻译： 本发明涉及一种用于以方位角和垂直方式驱动拉丝的切克劳斯基晶体拉伸系统的无磨损环的电缆旋转头的制造，并且晶体的核固定在其中 。 根据本发明，绳索旋转头包括绳索缠绕机构，该绳索缠绕机构可由竖直中空轴支撑，牵引绳通过该中空轴悬挂在水晶拉伸系统中，绳索旋转头围绕其轴线旋转安装， 可以通过旋转电动机与旋转运动中的绳索缠绕机构和牵引绳一起固定到水晶拉伸系统，并且所述垂直空心轴以同轴方式被双齿齿轮包围，该双齿轮是 旋转地安装成与中空轴相对，并且可以由固定到水晶拉制系统的拉丝马达驱动。 双齿轮可以由绳索缠绕机构的齿轮驱动，使得以静止方式固定在拉伸系统上的拉丝马达的机械驱动能量可以传递到旋转的绳索卷绕机构 相对于水晶绘图系统。

公开(公告)号：US20070151510A1

公开(公告)日：2007-07-05

申请号：US11609528

申请日：2007-03-20

申请人： Andreas Muhe

发明人： Andreas Muhe

IPC分类号： C30B15/00 ,  C30B11/00 ,  B01J3/04

CPC分类号： F27B14/20 ,  C30B11/003 ,  F27B14/14 ,  Y10T117/1092 ,  Y10T117/1096

摘要： This invention is based on the problem of achieving the most planar possible phase boundary extending in the horizontal direction between the still molten material and the material that has already crystallized out in a vertical Bridgman crystal-growing furnace or vertical gradient freeze crystal-growing furnace for crystallizing out the semiconductor melt (4) and doing so at a low cost. Therefore, jacket heaters (11, 12) are provided coaxially with the furnace core containing the crucible (6) and measurement devices for determining radial temperature differences in the space between the jacket heaters (11, 12) and the crucible (6), whereby the heat output of the jacket heaters (11, 12) is adjusted so that the measured temperature differences become zero. Thus, at least in the planes in which the measurement devices are located, radial heat transport is prevented and a phase boundary that is not curved is implemented.

摘要翻译： 本发明基于在垂直布里奇曼晶体生长炉或垂直梯度冷冻晶体生长炉中在仍然熔融的材料和已经结晶出的材料之间在水平方向上实现最平面可能的相边界的问题， 结晶出半导体熔体（4）并以低成本进行。 因此，夹套加热器（11,12）与包含坩埚（6）的炉芯和用于确定夹套加热器（11,12）和坩埚（6）之间的空间内的径向温度差的测量装置同轴地设置，由此 调节外套加热器（11,12）的热输出，使得测得的温差成为零。 因此，至少在测量装置所在的平面中，防止径向热传递，并且实现不弯曲的相位边界。