Methods for forming patterned structures
    3.
    发明授权
    Methods for forming patterned structures 有权
    形成图案结构的方法

    公开(公告)号:US08709703B2

    公开(公告)日:2014-04-29

    申请号:US12053058

    申请日:2008-03-21

    IPC分类号: G03F7/20 C23F1/02

    CPC分类号: G02B5/1857

    摘要: In general, in a first aspect, the invention features a method that includes forming a first layer comprising a first material over a surface of a second layer, wherein forming the first layer includes sequentially forming a plurality of monolayers of the second material over the surface of the second layer, the second layer comprises a plurality of rows of a second material extending along a first direction and spaced from one another in a second direction orthogonal to the first direction, and the first layer conforms to the surface of the second layer. The method further includes removing portions of the first layer to produce a plurality of rows of the first material extending along the first direction and spaced from one another in the second direction and removing portions of a third layer comprising a third material, where the portions correspond to intervals between the second plurality of rows so that removing the portions forms a plurality of rows of the third material extending along the first direction and spaced apart from one another. The first and second materials are different.

    摘要翻译: 通常,在第一方面,本发明的特征在于一种方法,其包括在第二层的表面上形成包含第一材料的第一层,其中形成所述第一层包括在所述表面上顺序地形成所述第二材料的多个单层 所述第二层包括沿着第一方向延伸并沿与所述第一方向正交的第二方向彼此间隔开的多行第二材料,并且所述第一层符合所述第二层的表面。 该方法还包括去除第一层的部分以产生沿着第一方向延伸并在第二方向上彼此间隔的多行第一材料,并且去除包括第三材料的第三层的部分,其中部分对应于 到所述第二多个行之间的间隔,使得去除所述部分形成沿着所述第一方向延伸并彼此间隔开的所述第三材料的多行。 第一和第二种材料是不同的。

    Methods for forming patterned structures
    6.
    发明申请
    Methods for forming patterned structures 有权
    形成图案结构的方法

    公开(公告)号:US20090053655A1

    公开(公告)日:2009-02-26

    申请号:US12053058

    申请日:2008-03-21

    IPC分类号: G03F7/20 C23F1/02

    CPC分类号: G02B5/1857

    摘要: In general, in a first aspect, the invention features a method that includes forming a first layer comprising a first material over a surface of a second layer, wherein forming the first layer includes sequentially forming a plurality of monolayers of the second material over the surface of the second layer, the second layer comprises a plurality of rows of a second material extending along a first direction and spaced from one another in a second direction orthogonal to the first direction, and the first layer conforms to the surface of the second layer. The method further includes removing portions of the first layer to produce a plurality of rows of the first material extending along the first direction and spaced from one another in the second direction and removing portions of a third layer comprising a third material, where the portions correspond to intervals between the second plurality of rows so that removing the portions forms a plurality of rows of the third material extending along the first direction and spaced apart from one another. The first and second materials are different.

    摘要翻译: 通常,在第一方面,本发明的特征在于一种方法,其包括在第二层的表面上形成包含第一材料的第一层,其中形成所述第一层包括在所述表面上顺序地形成所述第二材料的多个单层 所述第二层包括沿着第一方向延伸并沿与所述第一方向正交的第二方向彼此间隔开的多行第二材料,并且所述第一层符合所述第二层的表面。 该方法还包括去除第一层的部分以产生沿着第一方向延伸并在第二方向上彼此间隔的多行第一材料,并且去除包括第三材料的第三层的部分,其中部分对应于 到所述第二多个行之间的间隔,使得去除所述部分形成沿着所述第一方向延伸并彼此间隔开的所述第三材料的多行。 第一和第二种材料是不同的。

    POLARIZER FILMS AND METHODS OF MAKING THE SAME
    10.
    发明申请
    POLARIZER FILMS AND METHODS OF MAKING THE SAME 审中-公开
    极化膜及其制造方法

    公开(公告)号:US20090041971A1

    公开(公告)日:2009-02-12

    申请号:US12191965

    申请日:2008-08-14

    IPC分类号: B32B3/10

    摘要: In general, in one aspect, the invention features an article that includes a layer including a plurality of spaced-apart portions of a first material extending along a first direction. The layer transmits about 20% or more of light of wavelength λ having a first polarization state incident on the layer along a path. The layer transmits about 2% or less of light of wavelength λ having a second polarization state incident on the layer along the path, the first and second polarization states being orthogonal. For wavelength λ, the first material has a refractive index of 1.8 or more and an extinction coefficient of 1.8 or more, and λ is 300 nm or less.

    摘要翻译: 通常,在一个方面,本发明的特征在于一种制品,其包括包含沿着第一方向延伸的第一材料的多个间隔开的部分的层。 该层沿着路径透射大约20%或更多具有入射在该层上的具有第一偏振状态的波长λ的光。 层沿着路径透射大约2%以下的具有入射在层上的具有第二偏振态的波长λ的光,第一和第二偏振态是正交的。 对于波长λ,第一材料的折射率为1.8以上,消光系数为1.8以上,λ为300nm以下。